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    • 3. 发明申请
      US20080081293A1 Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same 有权
    • Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
    • US20080081293A1
    • 2008-04-03
    • US11882084
    • 2007-07-30
    • Yukako Harada , Isao Yoshida , Yoshiyuki Takata
    • Yukako Harada , Isao Yoshida , Yoshiyuki Takata
    • G03C1/73 , C07C69/00 , C07D307/77
    • C07C381/12 , C07C309/17 , C07C2603/74 , C07D307/77 , G03F7/0045 , G03F7/0046 , G03F7/0395 , G03F7/0397 , Y10S430/122 , Y10S430/123
    • The present invention provides a salt represented by the formula (I): wherein P1, P2 and P3 each independently represent a C1-C30 alkyl group which may be substituted with at least one selected from a hydroxyl group, a C3-C12 cyclic hydrocarbon group and a C1-C12 alkoxy group, or a C3-C30 cyclic hydrocarbon group which may be substituted with at least one selected from a hydroxyl group and a C1-C12 alkoxy group, provided that all of P1, P2 and P3 are not simultaneously phenyl groups which may be substituted, Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and R represents a group represented by the formula: wherein A1 represents —OH or —Y1—OH, n represents an integer of 1 to 9, and Y1 represents a divalent C1-C6 saturated aliphatic hydrocarbon group; a group represented by the formula: wherein ring X1 represents a C3-C30 monocyclic or polycyclic hydrocarbon group in which one —CH2— group is substituted with —CO—, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group; a group represented by the formula: wherein ring X2 represents a C3-C30 monocyclic or polycyclic hydrocarbon group in which a hydrogen atom of one —CH2— group is substituted with a hydroxyl group, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group; a group represented by the formula: wherein ring X3 represents a C3-C30 monocyclic or polycyclic hydrocarbon group in which one —CH2— group is substituted with —COO—, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group, and m represents an integer of 0 to 12; or a group represented by the formula: wherein ring X4 represents a C6-C30 polycyclic hydrocarbon group having tricycle or more, and at least one hydrogen atom in the polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group or a cyano group, and l represents an integer of 1 to 12. The present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Global Dossier Espacenet 法律信息 同族专利 专利引用
    • 4. 发明授权
      US07262321B2 Salt suitable for an acid generator and a chemically amplified resist composition containing the same 有权
    • Salt suitable for an acid generator and a chemically amplified resist composition containing the same
    • 适用于酸产生剂的盐和含有它的化学放大抗蚀剂组合物
    • US07262321B2
    • 2007-08-28
    • US11516644
    • 2006-09-07
    • Yukako Harada , Isao Yoshida , Yoshiyuki Takata
    • Yukako Harada , Isao Yoshida , Yoshiyuki Takata
    • C07C69/00
    • C07C309/17 , C07C381/12 , C07C2601/14
    • The present invention provides a salt of the formula (I): wherein X represents divalent or trivalent residue of acyclic hydrocarbon having 1 to 30 carbon atoms or divalent or trivalent residue of hydrocarbon having 3 to 30 carbon atoms which contains monocyclic or bicyclic ring, wherein —CH2— in the hydrocarbon may be substituted with —O— and one or more hydrogen atom in X is optionally substituted with alkoxy group having 1 to 6 carbon atoms, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; Q1 and Q2 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A+ represents organic counter ion; Y represents hydroxyl group, cyano group or methoxy group; and n shows 1 or 2. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).
    • 本发明提供式（I）的盐：其中X表示碳原子数1〜30的无环烃的二价或三价残基或含有单环或双环的碳原子数3〜30的二价或三价残基，其中， 在烃中的-CH 2 - 2可以被-O-取代，X中的一个或多个氢原子任选被具有1至6个碳原子的烷氧基，具有1至4个碳原子的全氟烷基取代 ，具有1-6个碳原子的羟基烷基，羟基或氰基; Q 1和Q 2各自独立地表示氟原子或具有1至6个碳原子的全氟烷基; A + 代表有机抗衡离子; Y表示羟基，氰基或甲氧基; 并且n表示1或2.本发明还提供包含式（I）的盐的化学放大抗蚀剂组合物。
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Espacenet 法律信息 同族专利 专利引用
    • 6. 发明申请
      US20070100096A1 Salt suitable for an acid generator and a chemically amplified resist composition containing the same 有权
    • Salt suitable for an acid generator and a chemically amplified resist composition containing the same
    • 适用于酸产生剂的盐和含有它的化学放大抗蚀剂组合物
    • US20070100096A1
    • 2007-05-03
    • US11516644
    • 2006-09-07
    • Yukako Harada , Isao Yoshida , Yoshiyuki Takata
    • Yukako Harada , Isao Yoshida , Yoshiyuki Takata
    • C08F4/06 , C07C309/12
    • C07C309/17 , C07C381/12 , C07C2601/14
    • The present invention provides a salt of the formula (I): wherein X represents divalent or trivalent residue of acyclic hydrocarbon having 1 to 30 carbon atoms or divalent or trivalent residue of hydrocarbon having 3 to 30 carbon atoms which contains monocyclic or bicyclic ring, wherein —CH2— in the hydrocarbon may be substituted with —O— and one or more hydrogen atom in X is optionally substituted with alkoxy group having 1 to 6 carbon atoms, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; Q1 and Q2each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A+ represents organic counter ion; Y represents hydroxyl group, cyano group or methoxy group; and n shows 1 or 2. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).
    • 本发明提供式（I）的盐：其中X表示碳原子数1〜30的无环烃的二价或三价残基或含有单环或双环的碳原子数3〜30的二价或三价残基，其中， 在烃中的-CH 2 - 2可以被-O-取代，X中的一个或多个氢原子任选被具有1至6个碳原子的烷氧基，具有1至4个碳原子的全氟烷基取代 ，具有1-6个碳原子的羟基烷基，羟基或氰基; Q 1和Q 2各自独立地表示氟原子或具有1至6个碳原子的全氟烷基; A + 代表有机抗衡离子; Y表示羟基，氰基或甲氧基; 并且n表示1或2.本发明还提供包含式（I）的盐的化学放大抗蚀剂组合物。
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Global Dossier Espacenet 法律信息 同族专利 专利引用
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