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61. 发明授权

US06563072B1 Welding technique for forming passive chromium oxide film in weld and gas feed system for welding 有权
标题翻译：焊接和焊接进气系统中形成无源氧化铬膜的焊接技术
公开(公告)号：US06563072B1
公开(公告)日：2003-05-13
申请号：US09509707
申请日：2000-06-08
申请人： Tadahiro Ohmi , Takahisa Nitta , Yasuyuki Shirai , Osamu Nakamura
发明人： Tadahiro Ohmi , Takahisa Nitta , Yasuyuki Shirai , Osamu Nakamura
IPC分类号： B23K3538
CPC分类号： B23K35/38 , B23K9/0026 , B23K9/16 , B23K35/383 , C23C8/10
摘要： Welding of material such as a piping using ferrite system stainless steel, in which a back sealed gas used for conventional welding is switched from argon gas (or a hydrogen gas/argon gas mix) to an argon gas to which an oxidizing gas is doped at the time of forming a chromium oxide passivation film. Welding conditions are set at the temperature in which the inner surface of the piping does not melt at the time of forming the chromium oxide passivation film. The temperature of the welding piping is set uniformly between welding conditions in conventional welding and welding conditions at the time of forming the chromium oxide passivation film, and in order to replace gases used with conventional welding with gases used at the time of forming the chromium oxide passivation film. A cycle of one round or more is performed under the welding conditions for forming a chromium oxide passivation film, thereby, to form the chromium oxide passivation film on a weld in concurrence with welding.
摘要翻译：将用于常规焊接的背面密封气体从氩气（或氢气/氩气混合物）切换到掺杂有氧化气体的氩气的铁氧体系不锈钢的管道的材料的焊接形成氧化铬钝化膜的时间。焊接条件设定为在形成氧化铬钝化膜时管道的内表面不熔化的温度。在形成氧化铬钝化膜时，焊接管道的温度在常规焊接和焊接条件的焊接条件之间均匀地设置，并且为了代替在形成氧化铬时使用的气体的常规焊接中使用的气体钝化膜。在形成氧化铬钝化膜的焊接条件下进行一圈以上的循环，由此在焊接上形成与焊接同时的氧化铬钝化膜。

62. 发明授权

US06436353B1 Gas recovering apparatus 失效
标题翻译：气体回收装置
公开(公告)号：US06436353B1
公开(公告)日：2002-08-20
申请号：US09096986
申请日：1998-06-12
申请人： Tadahiro Ohmi , Takahisa Nitta , Yasuyuki Shirai , Taiji Hashimoto , Kazuhide Ino
发明人： Tadahiro Ohmi , Takahisa Nitta , Yasuyuki Shirai , Taiji Hashimoto , Kazuhide Ino
IPC分类号： B01D5302
CPC分类号： B01D53/70 , B01D53/002 , B01D53/04 , B01D53/68 , B01D2257/502
摘要： The present invention makes possible the recycling of exhaust has components in a manufacturing process by cooling, liquefaction, and recovery, and to use toxic or useful gases without disposal, and to dramatically reduce the frequency of exhaust system maintenance by combining such a recovery method with a vacuum exhaust system.
摘要翻译：本发明使废气的再循环成为可以通过冷却，液化和回收的制造过程中的组分，并且不经处置地使用有毒或有用的气体，并且通过将这种回收方法与真空排气系统。

63. 发明授权

US06215806B1 Excimer laser generator provided with a laser chamber with a fluoride passivated inner surface 失效
标题翻译：准分子激光发生器具有激光室，具有氟化物钝化的内表面
公开(公告)号：US06215806B1
公开(公告)日：2001-04-10
申请号：US08812288
申请日：1997-03-06
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Naoto Sano
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Naoto Sano
IPC分类号： H01S322
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/225
摘要： An excimer laser generating system includes a laser chamber whose inner surface is covered with a fluorine-passivated surface. Preferably, the surfaces of a blower and heat exchanger disposed in the laser chamber are also covered with a fluorine-passivated surface. The fluorine-passivated surface may be formed of a wide variety of materials including an aluminum oxide film, a fluoride film containing aluminum fluoride and magnesium fluoride, iron fluoride, and nickel fluoride. Preferably, the excimer laser generation system includes a gas supply system having an inert gas purging system so that gas sources can be replaced without exposing the inside of gas supply pipes to atmosphere. With the above arrangement, the excimer laser generating system can generate a laser beam pulse whose energy and shape are maintained constant for a long period of operation time without encountering serious degradation. The invention also provides a high-reliability step-and-repeat exposure apparatus using the above excimer laser generating system, capable of exposing a very fine pattern.
摘要翻译：准分子激光发生系统包括其内表面被氟钝化表面覆盖的激光室。优选地，设置在激光室中的鼓风机和热交换器的表面也被氟钝化表面覆盖。氟钝化表面可以由各种各样的材料形成，包括氧化铝膜，含氟化铝和氟化镁的氟化物膜，氟化铁和氟化镍。优选地，准分子激光发生系统包括具有惰性气体吹扫系统的气体供应系统，使得可以更换气体源而不将气体供应管的内部暴露于大气。通过上述布置，准分子激光发生系统可以产生激光束脉冲，其能量和形状在长时间的操作时间内保持恒定，而不会严重恶化。本发明还提供了使用上述准分子激光发生系统的能够曝光非常精细图案的高可靠性分步重复曝光装置。

64. 发明申请

US20090308537A1 SUBSTRATE SUPPORT DEVICE AND PLASMA PROCESSING APPARATUS 有权
标题翻译：基板支撑装置和等离子体处理装置
公开(公告)号：US20090308537A1
公开(公告)日：2009-12-17
申请号：US12423235
申请日：2009-04-14
申请人： Yohsuke Shibuya , Yasuyuki Shirai , Hirofumi Asanuma , Junji Nakamura
发明人： Yohsuke Shibuya , Yasuyuki Shirai , Hirofumi Asanuma , Junji Nakamura
IPC分类号： H01L21/306 , C23C16/44 , C23C14/34 , C23C16/513
CPC分类号： C23C14/50 , C23C14/541 , H01L21/67103 , H01L21/67109 , Y10T279/23
摘要： There is provided a substrate support device capable of preventing powder dust from being produced. A thermoconductive intermediate member is interposed between a base table and a substrate support table and has a communication aperture path for communicating the aperture path of the base table with the aperture path of the substrate support table. An elastic member such as bellows tube is disposed in the communication aperture path of the thermoconductive intermediate member, for insulating the thermoconductive intermediate member from the inert gas which flows through the communication aperture path.
摘要翻译：提供了能够防止粉尘产生的基板支撑装置。导热中间构件插入在基台和基板支撑台之间，并且具有用于使基台的孔径路径与基板支撑台的孔径连通的连通孔径路径。诸如波纹管的弹性构件设置在导热中间构件的连通孔径路径中，用于使导热中间构件与流过连通孔径的惰性气体绝缘。

65. 发明申请

US20060085282A1 Online shopping system and method 审中-公开
标题翻译：在线购物系统和方法
公开(公告)号：US20060085282A1
公开(公告)日：2006-04-20
申请号：US11250388
申请日：2005-10-17
申请人： Atsushi Hanai , Masayuki Nishimoto , Fusakichi Ohkouchi , Tsukasa Fukudome , Tatsuto Torikai , Hiroshi Hosoda , Yasuyuki Shirai , Eiji Shinohara , Akihiro Nishida , Sachiko Misumi , Takuya Higashimae , Yoshiaki Ohno , Keisuke Kataoka , Shizuo Kamimura
发明人： Atsushi Hanai , Masayuki Nishimoto , Fusakichi Ohkouchi , Tsukasa Fukudome , Tatsuto Torikai , Hiroshi Hosoda , Yasuyuki Shirai , Eiji Shinohara , Akihiro Nishida , Sachiko Misumi , Takuya Higashimae , Yoshiaki Ohno , Keisuke Kataoka , Shizuo Kamimura
IPC分类号： G06Q30/00
CPC分类号： G06Q30/00 , G06Q30/0631
摘要： There is provided a network shopping system that contributes to the omission of the item to be purchased and the prevention of purchasing an unnecessary item. Information of equipment that each client possesses is stored in net member DB. A main item, an option, or an item having a tendency to be used at the same time, are associated with an item related thereto and stored in related item DB. When a user inputs individual identification information for authentication processing, the system searches net member DB to specify equipment that the user possesses. Next the system gains access to related item DB, searches a related item, and recommends the item to the user.
摘要翻译：提供了一种有助于省略要购买的物品的网络购物系统，并且防止购买不必要的物品。每个客户拥有的设备信息存储在网络成员DB中。主要项目，选项或具有同时使用倾向的项目与与之相关的项目相关联并存储在相关项目DB中。当用户输入用于认证处理的个人识别信息时，系统搜索网络成员DB以指定用户拥有的设备。接下来，系统获得对相关项目DB的访问，搜索相关项目，并向用户推荐该项目。

66. 发明授权

US08618711B2 Three-phase DC motor 有权
标题翻译：三相直流电机
公开(公告)号：US08618711B2
公开(公告)日：2013-12-31
申请号：US13352700
申请日：2012-01-18
申请人： Yasuyuki Shirai
发明人： Yasuyuki Shirai
IPC分类号： H02K1/00
CPC分类号： H02K1/165 , H02K7/06 , H02K21/14
摘要： A three-phase DC motor includes a rotor 30 having poles 30a and a stator 28 having core units 32b arranged around the rotor 30. Three or more coils are wound around the core units 32b. An outer surface of the rotor 30 has alternating poles of N and S around the circumference of the rotor 30. The coils 35a, 35b, 35c, and 35d are placed only within a range defined by second virtual planes P2 specified respectively by rotating a first virtual plane P1 according to a predetermined angle in a rotor rotating direction and a direction opposite thereto. The first virtual plane P1 passes through the axial center of the rotor 30. The inner surface of the adjacent 3N (N=1, 2, 3, . . . ) number of core units 32b are delimited within a width of one pole on the outer surface of the rotor 30.
摘要翻译：三相直流电动机包括具有极数30a的转子30和具有围绕转子30配置的铁心单元32b的定子28.三个或更多个线圈缠绕在铁心单元32b周围。转子30的外表面在转子30的周围具有N和S的交变极。线圈35a，35b，35c和35d仅在由第二虚拟平面P2限定的范围内，第二虚拟平面P2分别通过旋转第一虚拟平面P1根据转子旋转方向上的预定角度和与其相反的方向。第一虚拟平面P1穿过转子30的轴向中心。相邻的3N（N = 1,2,3，...）数量的芯单元32b的内表面在一个极的宽度上限定在转子30的外表面。

67. 发明申请

US20100162838A1 ELECTRIC ACTUATOR 有权
标题翻译：电动执行器
公开(公告)号：US20100162838A1
公开(公告)日：2010-07-01
申请号：US12643228
申请日：2009-12-21
申请人： Masanori Hirai , Yasuyuki Shirai , Tsunehisa Nomura , Koji Itoh
发明人： Masanori Hirai , Yasuyuki Shirai , Tsunehisa Nomura , Koji Itoh
IPC分类号： F16H25/20 , B64C25/20
CPC分类号： H02K7/06 , B64C25/24 , F16H25/2015 , F16H2025/2075 , H02K7/10 , Y10T74/18168 , Y10T74/18656
摘要： An object of the present invention is to provide an electric actuator having a structure capable of reducing an external force or impact acting on an screw shaft when a piston rod is at a stretched position. An electric actuator 1 includes a nut 5, a piston rod 4, recesses 6, keys 7, holes 8, an a tapered portion 9. Into the nut 5, a screw shaft 3 is screwed. The piston rod 4 moves linearly via the nut 5. The recesses 6 are formed on an outer circumferential surface of the nut 5. The keys 7 are each provided to a recess 6. The tapered portion 9 is formed on an inner wall of the cylinder body 2. The piston rod 4 advances to move the keys 7 outward to cause the keys 7 to fit to the tapered portion 9 to block retraction of the piston rod 4.
摘要翻译：本发明的一个目的是提供一种电动致动器，其具有当活塞杆处于拉伸位置时能够减小作用在螺杆轴上的外力或冲击的结构。电动执行器1包括螺母5，活塞杆4，凹槽6，键7，孔8和锥形部分9。螺母5中螺纹轴3被拧紧。活塞杆4经由螺母5线性移动。凹部6形成在螺母5的外周面上。键7分别设置在凹部6上。锥形部9形成在筒体的内壁活塞杆4前进以向外移动键7，使键7适合于锥形部分9以阻止活塞杆4的缩回。

68. 发明授权

US09103338B2 Hydraulic system for aircraft actuators 有权
标题翻译：飞机执行器液压系统
公开(公告)号：US09103338B2
公开(公告)日：2015-08-11
申请号：US13114849
申请日：2011-05-24
申请人： Atsushi Fukui , Yasuyuki Shirai
发明人： Atsushi Fukui , Yasuyuki Shirai
IPC分类号： B64C13/42 , F04B49/06 , B64C13/40 , F15B18/00 , F15B20/00
CPC分类号： F04B49/06 , B64C13/40 , F15B18/00 , F15B20/004 , F15B2211/20515 , F15B2211/20546 , F15B2211/7054 , F15B2211/8633 , F15B2211/8636 , F15B2211/864 , F15B2211/8757 , Y02T50/44 , Y10T137/85986
摘要： An electric motor drives a variable capacity backup hydraulic pump that can supply pressure oil to an actuator when a loss or reduction occurs in the function of an aircraft central hydraulic power source. A power source unit rectifies electric power supplied from a variable frequency supply. A driver supplies the electric power from the power source unit, and drives the electric motor so as to rotate the pump at a predetermined constant rotational speed. The constant rotational speed is set, based on the change in the efficiency of each of the pump, the electric motor, and the driver with respect to the rotational speed of the pump, such that the overall efficiency, obtained as a product of these efficiencies, has a maximum value.
摘要翻译：电动机驱动可变容量的备用液压泵，当在飞机中央液压动力源的功能中发生损失或减少时，可以向致动器供应压力油。电源单元对从可变频率电源供给的电力进行整流。驱动器从电源单元提供电力，并且驱动电动机以使泵以预定的恒定转速旋转。基于泵，电动机和驾驶员的效率相对于泵的转速的变化来设定恒定转速，使得作为这些效率的乘积获得的总体效率，具有最大值。

69. 发明授权

US5569350A Mechanism and method for mechanically removing a substrate 失效
标题翻译：用于机械去除基材的机理和方法
公开(公告)号：US5569350A
公开(公告)日：1996-10-29
申请号：US389789
申请日：1995-02-16
申请人： Tomoaki Osada , Yasuyuki Shirai
发明人： Tomoaki Osada , Yasuyuki Shirai
IPC分类号： C23C16/458 , H01L21/683 , C23F1/02 , C23C16/00
CPC分类号： H01L21/6831 , C23C16/4586
摘要： A mechanism for completely separating a substrate, such as a semiconductor substrate, from at base in such a way that the substrate is in a horizontal position and can be easily removed from an electrostatic chuck. The substrate is mounted on a pedestal which is placed on a base such as an electrode. Pins are mounted within the base beneath a central portion of the substrate. The pins can be moved vertically through the circular pedestal to lift the substrate from the pedestal. A ring is mounted around the pedestal and underneath the outer edge of the substrate. When the pins are protrude beyond the top surface of the circular pedestal the substrate is lifted and caused to tilt. The ring then is lifted to act on the outer edge of the rear surface of the substrate, thus separating the substrate from the circular pedestal and returning the substrate to a horizontal position.
摘要翻译：用于将基板（例如半导体基板）从底部完全分离以使得基板处于水平位置并且可以容易地从静电卡盘移除的方式的机构。基板安装在放置在诸如电极的基座上的基座上。引脚安装在底座下方的基板的中心部分之下。销可以垂直移动通过圆形底座从基座提起基板。一个环安装在基座周围并在基底的外边缘下方。当销突出超过圆形基座的顶面时，基板被提起并使其倾斜。然后，环被提升以作用在基板的后表面的外边缘上，从而将基板与圆形基座分离并将基板返回到水平位置。

70. 发明授权

US4643629A Automatic loader 失效
标题翻译：自动装载机
公开(公告)号：US4643629A
公开(公告)日：1987-02-17
申请号：US790288
申请日：1985-10-22
申请人： Nobuyuki Takahashi , Ryuji Sugimoto , Yasuyuki Shirai
发明人： Nobuyuki Takahashi , Ryuji Sugimoto , Yasuyuki Shirai
IPC分类号： B65G1/00 , B65G1/04 , B65G1/07 , B65G47/52 , C23C14/56 , H01L21/67 , H01L21/677 , B65G1/06
CPC分类号： H01L21/67781 , C23C14/56 , Y10S414/136 , Y10S414/137 , Y10S414/139
摘要： In an automatic loader for automatically loading a flat unprocessed substrate to a substrate processing apparatus for processing the flat substrate and automatically unloading a processed substrate, the automatic loader has: a plurality of cassette stages for vertically moving cassettes having a plurality of substrates held horizontally and parallel to each other; a first substrate convey mechanism contacting a single door of the substrate processing apparatus and forming a common conveyance path of all substrates; a single substrate posture control stage arranged in contact with the first convey mechanism to correct a posture of the substrate to be fed in the substrate processing apparatus; second substrate convey mechanisms for forming at least one conveyance path between the plurality of cassette stages and the substrate posture control stage and exchanging and conveying the substrate; and substrate counters arranged in the respective conveyance paths of the second substrate convey mechanisms. The processed substrates are returned to the original cassette.
摘要翻译：在自动装载机中，将平坦的未处理的基板自动装载到用于处理平坦基板并自动卸载处理的基板的基板处理装置，自动装载机具有：多个用于垂直移动的带盒，具有水平保持的多个基板，相互平行; 与基板处理装置的单个门接触并形成所有基板的公共输送路径的第一基板输送机构; 单个基板姿势控制台，其布置成与所述第一输送机构接触以校正要供给到所述基板处理装置中的所述基板的姿势; 第二基板输送机构，用于形成多个盒带台与基板姿势控制台之间的至少一个输送路径，并交换和输送基板; 以及布置在第二基板输送机构的各个输送路径中的基板计数器。经处理的基板返回原始盒。

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