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61. 发明授权

US4748407A Method and apparatus for measuring time dependent signals with a particle probe 失效
标题翻译：用粒子探针测量时间依赖信号的方法和装置
公开(公告)号：US4748407A
公开(公告)日：1988-05-31
申请号：US16696
申请日：1987-01-28
申请人： Matthias Brunner , Reinhold Schmitt , Dieter Winkler
发明人： Matthias Brunner , Reinhold Schmitt , Dieter Winkler
IPC分类号： H01L21/66 , G01N23/225 , G01Q30/02 , G01R31/26 , G01R31/302 , G01R31/305 , H01J37/28 , H01J49/44 , G01R31/28
CPC分类号： G01R31/305
摘要： To measure high frequency signal curves at nodes and interconnections of integrated circuits and achieve a good chronological resolution in accordance with the sampling method, extremely short primary electron pulses are used. For such extremely short pulse widths obtainable with beam blanking systems, only individual statistically appearing secondary electrons are registered per pulse, these electrons generating current pulses having different amplitudes and different time behaviors at the output of an energy analyzer. It is proposed that the number of current pulses occurring at the output of the energy analyzer within a prescribed time interval be identified and the quotient, or ratio, thereof, be kept constant with the assistance of a feedback circuit for connection to the voltage of a retarding field electrode. The feedback circuit includes a pulse counter, a digital-to-analog converter, and a spectrometer drive.
摘要翻译：为了测量集成电路的节点和互连的高频信号曲线，并根据采样方法实现良好的时间分辨率，使用极短的一次电子脉冲。对于通过光束消隐系统可获得的这种极短的脉冲宽度，每个脉冲仅记录每个统计学显示的二次电子，这些电子在能量分析仪的输出处产生具有不同幅度和不同时间行为的电流脉冲。提出在规定的时间间隔内在能量分析器的输出处出现的电流脉冲数被识别，并且在一个反馈电路的辅助下，商或其比率被保持恒定，以连接到延迟场电极。反馈电路包括脉冲计数器，数模转换器和光谱仪驱动器。

62. 发明申请

US20130214155A1 CHARGED PARTICLE BEAM DEVICE WITH DYNAMIC FOCUS AND METHOD OF OPERATING THEREOF 审中-公开
标题翻译：具有动态聚焦的充电颗粒光束装置及其操作方法
公开(公告)号：US20130214155A1
公开(公告)日：2013-08-22
申请号：US13405759
申请日：2012-02-27
申请人： Dieter Winkler , Igor Petrov
发明人： Dieter Winkler , Igor Petrov
IPC分类号： H01J37/04
CPC分类号： H01J37/145 , H01J37/1474 , H01J37/21 , H01J37/28 , H01J2237/28
摘要： A retarding field scanning electron microscope is described. The microscope includes a scanning deflection assembly configured for scanning an electron beam over a specimen, one or more controllers in communication with the scanning deflection assembly for controlling the electron beam scanning pattern, and a combined magnetic-electrostatic objective lens configured for focusing the electron beam including an electrostatic lens portion. The electrostatic lens portion includes a first electrode with a high potential bias, and a second electrode disposed between the first electrode and the specimen plane with a potential bias lower than the first electrode, wherein the second electrode is configured for providing a retarding field. The microscope further includes a voltage supply connected to the second electrode for biasing the second electrode and being in communication with the controllers, wherein the controllers synchronize a variation of the potential of the second electrode with the scanning pattern.
摘要翻译：描述了延迟场扫描电子显微镜。显微镜包括扫描偏转组件，其被配置为扫描试样上的电子束，与用于控制电子束扫描图案的扫描偏转组件连通的一个或多个控制器，以及组合的静电物镜，其被配置用于聚焦电子束包括静电透镜部分。静电透镜部分包括具有高电位偏置的第一电极和设置在第一电极和检体平面之间的电位偏压低于第一电极的第二电极，其中第二电极被配置为提供延迟场。显微镜还包括连接到第二电极的电压源，用于偏置第二电极并与控制器连通，其中控制器使第二电极的电位变化与扫描图案同步。

63. 发明授权

US07800075B2 Multi-function module for an electron beam column 有权
标题翻译：电子束柱多功能模块
公开(公告)号：US07800075B2
公开(公告)日：2010-09-21
申请号：US12194220
申请日：2008-08-19
申请人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
发明人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
IPC分类号： G21K1/08 , H01J3/14 , H01J3/26 , H01J49/42
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31754
摘要： A multifunction module for an electron beam column comprises upper and lower electrodes, and a central ring electrode. The upper and lower electrodes have multipoles and are capable of deflecting, or correcting an aberration of, an electron beam passing through the electrodes. A voltage can be applied to the central ring electrode independently of the voltages applied to the upper and lower electrodes to focus the electron beam on a substrate.
摘要翻译：用于电子束柱的多功能模块包括上电极和下电极以及中心环电极。上电极和下电极具有多极并且能够偏转或校正通过电极的电子束的像差。可以独立于施加到上电极和下电极的电压而将电压施加到中心环电极，以将电子束聚焦在衬底上。

64. 发明申请

US20100187436A1 HIGH RESOLUTION GAS FIELD ION COLUMN 有权
标题翻译：高分辨气体场离子柱
公开(公告)号：US20100187436A1
公开(公告)日：2010-07-29
申请号：US12691932
申请日：2010-01-22
申请人： Juergen Frosien , Dieter Winkler
发明人： Juergen Frosien , Dieter Winkler
IPC分类号： H01J27/02 , H01J27/00
CPC分类号： H01J37/05 , H01J37/12 , H01J37/153 , H01J37/28 , H01J37/285 , H01J2237/04756 , H01J2237/04924 , H01J2237/053 , H01J2237/057 , H01J2237/0805 , H01J2237/0807 , H01J2237/1534 , H01J2237/28
摘要： An ion beam apparatus and a method for providing an energy-filtered primary ion beam are described. Therein, a primary ion beam having an asymmetric first energy distribution is generated by means of an ion source. The primary ion beam is energy filtered using, for example, a retarding lens.
摘要翻译：描述了用于提供能量过滤的一次离子束的离子束装置和方法。其中，通过离子源产生具有不对称的第一能量分布的一次离子束。使用例如延迟透镜对初级离子束进行能量过滤。

65. 发明授权

US07692165B2 Charged particle beam device with a gas field ion source and a gas supply system 有权
标题翻译：带气体离子源和气体供应系统的带电粒子束装置
公开(公告)号：US07692165B2
公开(公告)日：2010-04-06
申请号：US11752560
申请日：2007-05-23
申请人： Dieter Winkler
发明人： Dieter Winkler
IPC分类号： G21K5/10 , H01J37/08
CPC分类号： H01J37/08 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/0815
摘要： The present invention provides a charged particle beam device for irradiating a specimen with ions. The charged particle beam device comprises a gas field ion source unit for generating a beam of ions, the gas field ion source having an emitter unit having an emitter unit tip; and a gas supply system for directing gas to the emitter unit tip. The gas supply system comprises an array of capillary tubes. Further, the present invention provides a method for irradiating a specimen with ions by operating a charged particle beam device having a gas field ion source, wherein the method comprises the step of directing a gas flow to an emitter unit tip, wherein the gas flow has a gas beam aperture angle of 3° or less.
摘要翻译：本发明提供一种用离子照射样本的带电粒子束装置。带电粒子束装置包括用于产生离子束的气体离子源单元，气体离子源具有发射极单元，其具有发射极单元尖端; 以及用于将气体引导到发射器单元尖端的气体供应系统。气体供应系统包括一排毛细管。此外，本发明提供了一种通过操作具有气体离子源的带电粒子束装置对离子进行照射的方法，其中该方法包括将气流引导到发射器单元尖端的步骤，其中气流具有气束孔径角为3°以下。

66. 发明授权

US07638777B2 Imaging system with multi source array 有权
标题翻译：具有多源阵列的成像系统
公开(公告)号：US07638777B2
公开(公告)日：2009-12-29
申请号：US10564752
申请日：2004-05-17
申请人： Hans-Peter Feuerbaum , Jürgen Frosien , Uli Hoffmann , Dieter Winkler , Pavel Adamec
发明人： Hans-Peter Feuerbaum , Jürgen Frosien , Uli Hoffmann , Dieter Winkler , Pavel Adamec
IPC分类号： H01J1/50
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3177 , H01J2237/047 , H01J2237/0635
摘要： The present invention provides a charged particle beam device. The device comprises an emitter array for emitting a plurality of charged particle beams. The plurality of charged particle beams are imaged with a lens. An electrode unit is provided for accelerating the plurality of charged particle beams. The potential differences between a first potential of the emitter array, a second potential of the electrode unit, and a third potential of a specimen, are controlled by a first control unit and a second control unit. Thereby, the second potential is capable of accelerating the plurality of charged particle beams with respect to the first potential, and the third potential is capable of decelerating the plurality of charged particle beams with respect to the second potential.
摘要翻译：本发明提供一种带电粒子束装置。该装置包括用于发射多个带电粒子束的发射极阵列。多个带电粒子束用透镜成像。提供电极单元用于加速多个带电粒子束。第一控制单元和第二控制单元控制发射极阵列的第一电位与电极单元的第二电位和第三电位之间的电位差。因此，第二电位能够相对于第一电位加速多个带电粒子束，并且第三电位能够使多个带电粒子束相对于第二电位减速。

67. 发明申请

US20090031697A1 Apparatus for the combustion of a fuel-oxidizer mix 有权
标题翻译：用于燃料 - 氧化剂混合物燃烧的装置
公开(公告)号：US20090031697A1
公开(公告)日：2009-02-05
申请号：US12155397
申请日：2008-06-03
申请人： Timothy Griffin , Dieter Winkler
发明人： Timothy Griffin , Dieter Winkler
IPC分类号： F23R3/40
CPC分类号： F23C13/00 , B01F3/02 , B01F5/0641 , B01F5/0643 , B01J12/007 , B01J19/2485 , B01J19/249 , B01J19/32 , B01J35/04 , B01J2208/00849 , B01J2219/2454 , B01J2219/2458 , B01J2219/2459 , B01J2219/2474 , B01J2219/2479 , B01J2219/2482 , B01J2219/2493 , B01J2219/3221 , B01J2219/32213 , B01J2219/32296 , B01J2219/33 , F23C13/02 , F23C13/06 , F23C99/00 , F23D14/62 , F23R3/286 , F23R3/40
摘要： Apparatus for combustion of a fuel-oxidizer mixture in a combustion chamber of a turbogroup, in particular of a power plant wherein total oxidizer flow is divided into a main oxidizer flow and a secondary oxidizer flow. The main oxidizer flow is lean mixed with a main fuel flow in a premix burner, and the mixture is fully oxidized in the combustion chamber. The secondary oxidizer flow is divided into a pilot oxidizer flow and a heat-exchanging oxidizer flow. The pilot oxidizer flow is rich mixed with a pilot fuel flow, and the mixture is partially oxidized in a catalyst, with hydrogen being formed. Downstream of the catalyst, the partially oxidized pilot fuel-oxidizer mixture and the heat-exchanging oxidizer flow are together introduced into at least one zone which is suitable for stabilizing the combustion of the main fuel-oxidizer mixture.
摘要翻译：燃料 - 氧化剂混合物在涡轮组的燃烧室中的燃烧装置，特别是在其中总氧化剂流分为主氧化剂流和次级氧化剂流的发电厂。主要氧化剂流与预混燃烧器中的主要燃料流混合，并且混合物在燃烧室中被完全氧化。次级氧化剂流分为先导氧化剂流和热交换氧化剂流。先导氧化剂流与引燃燃料流充分混合，混合物在催化剂中部分氧化，形成氢气。在催化剂的下游，部分氧化的先导燃料 - 氧化剂混合物和热交换氧化剂流一起引入至少一个适于稳定主燃料 - 氧化剂混合物燃烧的区域。

68. 发明申请

US20090020708A1 MODULAR GAS ION SOURCE 有权
标题翻译：模块化气体源
公开(公告)号：US20090020708A1
公开(公告)日：2009-01-22
申请号：US12167734
申请日：2008-07-03
申请人： Dieter Winkler , Thomas Jasinski , Udo Weigel
发明人： Dieter Winkler , Thomas Jasinski , Udo Weigel
IPC分类号： H01J27/02
CPC分类号： H01J37/08 , H01J27/26 , H01J2237/006 , H01J2237/03 , H01J2237/0807
摘要： A gas field ion source is described. The gas field ion source includes an emitter module. The emitter module includes an emitter holder, an emitter structure, a detachably connectable electrical connection assembly of the emitter module, and a detachably connectable gas supply connection assembly of the emitter module. The gas field ion source further includes a supply module, wherein the supply module includes an electrical conductor for providing voltage and/or current, a gas supply conduit, a thermal conductor, a detachably connectable electrical connection assembly of the supply module, and a detachably connectable gas supply connection assembly of the supply module. The emitter module and the supply module are detachably connectable by the detachably connectable connection assemblies of the emitter module and the detachably connectable connection assemblies of the supply module.
摘要翻译：描述了气体场离子源。气体离子源包括发射器模块。发射器模块包括发射器支架，发射器结构，发射器模块的可拆卸连接的电连接组件以及发射器模块的可拆卸地连接的气体供应连接组件。所述气体离子源还包括供电模块，其中所述供应模块包括用于提供电压和/或电流的电导体，气体供应导管，热导体，所述供应模块的可拆卸地连接的电连接组件，供电模块的可连接气体供应连接组件。发射器模块和供电模块可通过发射器模块的可拆卸连接的连接组件和供应模块的可拆卸连接的连接组件可拆卸地连接。

69. 发明申请

US20080308751A1 MULTI-FUNCTION MODULE FOR AN ELECTRON BEAM COLUMN 有权
标题翻译：电子束柱的多功能模块
公开(公告)号：US20080308751A1
公开(公告)日：2008-12-18
申请号：US12194220
申请日：2008-08-19
申请人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
发明人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
IPC分类号： A61N5/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31754
摘要： A multifunction module for an electron beam column comprises upper and lower electrodes, and a central ring electrode. The upper and lower electrodes have multipoles and are capable of deflecting, or correcting an aberration of, an electron beam passing through the electrodes. A voltage can be applied to the central ring electrode independently of the voltages applied to the upper and lower electrodes to focus the electron beam on a substrate.
摘要翻译：用于电子束柱的多功能模块包括上电极和下电极以及中心环电极。上电极和下电极具有多极并且能够偏转或校正通过电极的电子束的像差。可以独立于施加到上电极和下电极的电压而将电压施加到中心环电极，以将电子束聚焦在衬底上。

70. 发明授权

US07427765B2 Electron beam column for writing shaped electron beams 有权
标题翻译：用于写入成形电子束的电子束柱
公开(公告)号：US07427765B2
公开(公告)日：2008-09-23
申请号：US11243363
申请日：2005-10-03
申请人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
发明人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
IPC分类号： A61N5/00 , G21G5/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31754
摘要： An electron beam column comprises a thermal field emission electron source to generate an electron beam, an electron beam blanker, a beam shaping module, and electron beam optics comprising a plurality of electron beam lenses. In one version, the optical parameters of the electron beam blanker, beam shaping module, and electron beam optics are set to achieve an acceptance semi-angle β of from about ¼ to about 3 mrads, where the acceptance semi-angle β is half the angle subtended by the electron beam at the writing plane. The beam-shaping module can also operate as a single lens using upper and lower projection lenses. A multifunction module for an electron beam column is also described.
摘要翻译：电子束柱包括产生电子束的热场发射电子源，电子束消除器，光束整形模块和包括多个电子束透镜的电子束光学器件。在一个版本中，电子束消隐器，光束整形模块和电子束光学器件的光学参数被设置为实现约¼至约3mrads的接受半角β，其中接受半角β是一半在写平面处电子束对着的角度。光束成形模块也可以使用上下投影透镜作为单个透镜进行操作。还描述了用于电子束柱的多功能模块。

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