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    • 61. 发明申请
    • SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
    • 半导体结构及其形成方法
    • WO2013174069A1
    • 2013-11-28
    • PCT/CN2012/078728
    • 2012-07-16
    • TSINGHUA UNIVERSITYWANG, JingGUO, LeiWANG, Wei
    • WANG, JingGUO, LeiWANG, Wei
    • H01L27/092H01L21/8238
    • H01L21/823807H01L21/823814
    • A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises: a semiconductor substrate (100); a source region and a drain region defined in the semiconductor substrate (100) respectively, and a trench (200, 300) formed in the source region and/or the drain region, in which a rare earth oxide layer (400) is formed in the trench (200, 300); a source (500) and/or a drain (600) formed on the rare earth oxide layer (400); and a channel region (700) formed between the source (500) and the drain (600). A relationship between a lattice constant a of the rare earth oxide layer (400) and a lattice constant b of a semiconductor material of the source (500) and/or the drain (600) and/or the channel region (700) is a = (n ?c)b, where n is an integer, c is a mismatch ratio of lattice constants, and 0
    • 提供半导体结构及其形成方法。 半导体结构包括:半导体衬底(100); 分别限定在半导体衬底(100)中的源极区和漏极区以及形成在源区和/或漏区中的在其中形成稀土氧化物层(400)的沟槽(200,300) 沟槽(200,300); 在所述稀土氧化物层(400)上形成的源极(500)和/或漏极(600)。 以及形成在源极(500)和漏极(600)之间的沟道区域(700)。 稀土氧化物层(400)的晶格常数a与源极(500)和/或漏极(600)和/或沟道区域(700)的半导体材料的晶格常数b之间的关系为 =(n≥c)b,其中n是整数,c是晶格常数的失配比,0
    • 65. 发明申请
    • COMPLEMENTARY TUNNELING FIELD EFFECT TRANSISTOR AND METHOD FOR FORMING THE SAME
    • 补充隧道场效应晶体管及其形成方法
    • WO2012136066A1
    • 2012-10-11
    • PCT/CN2011/083069
    • 2011-11-28
    • TSINGHUA UNIVERSITYLIANG, RenrongXU, JunWANG, Jing
    • LIANG, RenrongXU, JunWANG, Jing
    • H01L29/78H01L29/06H01L21/336
    • H01L29/66356H01L29/0657H01L29/0847H01L29/165H01L29/4236H01L29/7391
    • A complementary tunneling field effect transistor and a method for forming the same are provided. The complementary tunneling field effect transistor comprises: a substrate (1100); an insulating layer (1200), formed on the substrate (1100); a first semiconductor layer (1300), formed on the insulating layer (1200) and comprising a first doped region (1310) and a second doped region (1320); a first type TFET vertical structure (1400) formed on a first part (1311) of the first doped region (1310) and a second type TFET vertical structure (1500) formed on a first part (1321) of the second doped region (1320), in which a second part (1312) of the first doped region (1310) is connected with a second part (1322) of the second doped region (1320) and a connecting portion between the second part (1312) of the first doped region (1310) and the second part (1322) of the second doped region (1320) is used as a drain output (7000); and a U-shaped gate structure (1600), formed between the first type TFET vertical structure (1400) and the second type TFET vertical structure (1500).
    • 提供互补隧道场效应晶体管及其形成方法。 互补隧道场效应晶体管包括:衬底(1100); 形成在所述基板(1100)上的绝缘层(1200); 形成在所述绝缘层(1200)上并包括第一掺杂区域(1310)和第二掺杂区域(1320)的第一半导体层(1300); 形成在第一掺杂区域(1310)的第一部分(1311)上的第一类型TFET垂直结构(1400)和形成在第二掺杂区域(1320)的第一部分(1321)上的第二类型TFET垂直结构(1500) ),其中第一掺杂区域(1310)的第二部分(1312)与第二掺杂区域(1320)的第二部分(1322)连接,并且第一掺杂区域的第二部分(1312)与第一掺杂区域 使用第二掺杂区域(1320)的区域(1310)和第二部分(1322)作为漏极输出(7000); 以及形成在第一类型TFET垂直结构(1400)和第二类型TFET垂直结构(1500)之间的U形门结构(1600)。