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61. 发明公开

EP0751301A3 Fluid control apparatus 失效
标题翻译：流体管理设备
公开(公告)号：EP0751301A3
公开(公告)日：1998-07-15
申请号：EP96110514
申请日：1996-06-28
申请人： OHMI TADAHIRO , FUJIKIN KK
发明人： OHMI TADAHIRO , HIRAO KEIJI , YAMAJI MICHIO , ITOI SHIGERU , SHINOHARA TSUTOMU , IKEDA NOBUKAZU , KOJIMA TETSUYA
IPC分类号： G05D7/06 , F15B13/00 , F15B13/08 , G05D16/20
CPC分类号： F15B13/0832 , F15B13/0817 , F15B13/0871 , Y10T137/5109 , Y10T137/5283 , Y10T137/87885
摘要： A fluid control apparatus (1) comprises a mass flow controller (2), two on-off valves (3,4) disposed at the inlet side of the controller and three on-off valves (5,6,7) disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve (4) is positioned on a purge fluid on-off valve (3), and at the outlet side, a vent on-off valve (6) is positioned on a vacuum suction on-off valve (5), with a main passage on-off valve (7) further positioned on the vent on-off valve (6).

62. 发明专利

SG11202113065VA DIAPHRAGM VALVE 未知
公开(公告)号：SG11202113065VA
公开(公告)日：2021-12-30
申请号：SG11202113065V
申请日：2020-06-08
申请人： FUJIKIN KK
发明人： ISHIBASHI KEISUKE , YOSHIDA TOSHIHIDE , YAKUSHIJIN TADAYUKI , YAMAJI MICHIO , SHINOHARA TSUTOMU
IPC分类号： F16K7/17 , F16K31/122 , F16K39/02
摘要： The present invention provides a control valve exhibiting excellent durability performance without being constrained by the intended use such as high-pressure use or high-temperature use and having particle generation suppressed. This diaphragm valve is provided with: a valve body (2) in which an inlet passage (22) and an outlet passage (23) for a fluid are formed; a valve seat (25) formed at the peripheral edge of the inlet passage in the valve body; a diaphragm (30) that abuts against or separates from the valve seat so as to connect or disconnect the inlet passage and the outlet passage; a diaphragm presser (31) that presses the center portion of the diaphragm; and an actuator (4) that moves the diaphragm presser. The diaphragm valve also has an adjustment mechanism for adjusting the closing pressure between the valve seat and the diaphragm to a prescribed pressure level.

63. 发明专利

SG11201607988SA FLUID CONTROLLER 未知
公开(公告)号：SG11201607988SA
公开(公告)日：2016-11-29
申请号：SG11201607988S
申请日：2016-02-05
申请人： FUJIKIN KK
发明人： TOKUDA ICHIRO , HARADA AKIHIRO , KISO HIDENORI , NAKATA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO
IPC分类号： F16K7/17 , F16K31/122
摘要： A fluid controller that reduces an increase in cost by additional components or additional processes for setting means, and solves the problem that a set value of an upward movable amount of a stem changes is provided. An upper surface of an outer peripheral edge portion of a diaphragm holder 7 and a lower surface of an inner peripheral edge portion of a holder adapter 15 are formed so as to oppose to each other with a first gap A interposed therebetween. By setting the first gap A to a predetermined value, an upward movable amount of the diaphragm holder 7 is set.

64. 发明专利

SG11201509861PA VACUUM VALVE 未知
公开(公告)号：SG11201509861PA
公开(公告)日：2015-12-30
申请号：SG11201509861P
申请日：2014-08-08
申请人： FUJIKIN KK
发明人： TANIKAWA TSUYOSHI , YAMAJI MICHIO , YAKUSHIJIN TADAYUKI , ISHIBASHI KEISUKE , YANAGIDA YASUMASA
IPC分类号： F16K17/06 , F16K51/02 , G05D16/06
摘要： A vacuum valve is provided with opening pressure setting means that sets a set value of a fluid pressure in a primary side passage beyond which communication is opened and forcible opening means that forcibly opens communication regardless of the fluid pressure in the primary side passage. The opening pressure setting means includes a spring receiver fixed to a stem, a compression coil spring having a lower end supported by the spring receiver, and an adjustment screw, movable in the axial direction, that presses the upper end of the compression coil spring. The forcible opening means includes a piston inserted onto the stem 5 under the spring receiver so as to be movable upward and downward and piston driving means that moves the piston and the spring receiver upward integrally by moving the piston upward using compressed air.

65. 发明专利

DE60319352T2 未知
公开(公告)号：DE60319352T2
公开(公告)日：2009-02-26
申请号：DE60319352
申请日：2003-03-19
申请人： FUJIKIN KK
发明人： SUGIYAMA KAZUHIKO , HADA KEIKO , IDETA EIJI , IKEDA NOBUKAZU , YASUMOTO NAOFUMI , YAMAJI MICHIO
IPC分类号： F16L19/08 , F16L23/02 , F16L19/02 , F16L19/025 , F16L19/03 , F16L23/036 , F16L47/14
摘要： A pipe joint 1 comprises a first joint member 2 of synthetic resin having an annular recessed portion 7 in an end face thereof, and a second joint member 3 of synthetic resin having an annular ridge 8 on an end face thereof. The ridge 8 is fitted in the opening of the recessed portion 7, with a synthetic resin gasket 4 fitted in the recessed portion 7. When the pipe joint 1 is properly tightened up, the outer surface of the ridge 8 of the second joint member 3 is pressed against the inner surface of the recessed portion 7 of the first joint member 2 with the gasket 4 interposed therebetween in intimate contact the surfaces approximately over the entire areas thereof, a portion 2d of the end face of the first joint member 2 positioned radially inwardly of the recessed portion is then in intimate contact with a portion 3d of the end face of the second joint member 3 positioned radially inwardly of the ridge approximately over the entire surface areas thereof, a portion 2e of the end face of the first joint member 2 positioned radially outwardly of the recessed portion is then in intimate contact with a portion 3e of the end face of the second joint member 3 positioned radially outwardly of the ridge approximately over the entire surface areas thereof.

66. 发明专利

CA2267453C FLUID COUPLING 未知
公开(公告)号：CA2267453C
公开(公告)日：2008-05-13
申请号：CA2267453
申请日：1999-03-30
申请人： FUJIKIN KK
发明人： SHINOHARA TSUTOMU , YAMAJI MICHIO , YOKOYAMA KOSUKE
IPC分类号： F16L17/00 , F16L19/00 , F16K27/00 , H01L21/02
摘要： Each of coupling members 5, 12 is formed with a retainer accommodating recessed portion 45, 46 in an butting end face thereof, the recessed portion 45, 46 being formed on a bottom face thereof with a gasket holding annular ridge 47, 48 having an annular projection 47a, 48a. A retainer 42 comprises a retainer body 43 holding the outer periphery of a gasket 41 and attached to the outer periphery of the annular ridge 47 of one of the coupling members, 5, and a guide ring portion 44 for guiding a peripheral surface of the recessed portion 46 of the other coupling member 12 when the two coupling members 5, 12 are butted against each other.

67. 发明专利

AT365292T 未知
公开(公告)号：AT365292T
公开(公告)日：2007-07-15
申请号：AT06005025
申请日：1997-12-01
申请人： FUJIKIN KK , TOHOKU STEEL CO LTD , OHMI TADAHIRO , TAKAHASHI MIGAKU
发明人： OHMI TADAHIRO , TAKAHASHI MIGAKU , YAMAJI MICHIO , TANIGAWA TAKESHI , IKEDA NOBUKAZU , DOI RYOSUKE , NISHINO KOJI , YASUMOTO NAOFUMI , FUKUDA HIROYUKI , UNO TOMIO , YANAI YASUYUKI
IPC分类号： F16K31/06 , F16K7/14 , F16K31/08
摘要： The invention relates to a fluid control valve which controls a fluid moving through a valve body by means of opening and closing a portion between a valve seat and a valve holder using a drive unit, wherein: said drive unit comprises a rod shaped shaft for applying pressure via said valve seat and a valve rod, and a member a which is affixed around said rod shaped shaft, said member a comprises a magnetic material, and a coil having a space between it and the shaft and provided at a position parallel to said shaft moves said member a upwardly and downwardly by electromagnetic induction, and using the force of a spring, as well, the portion between said valve seat and said valve holder is opened and closed, and after an exciting current supplied to said coil is cut off, an exciting current is resupplied to said coil for a brief period after a passage of a short time t.

68. 发明专利

DE60118674T2 未知
公开(公告)号：DE60118674T2
公开(公告)日：2006-09-21
申请号：DE60118674
申请日：2001-09-05
申请人： FUJIKIN KK
发明人： FUJIMOTO HIDEKI , UZAWA NOBORU , SATO NAOYUKI , YAMAJI MICHIO , TANAKA SHIGEAKI , KAWANO YUJI , OMATA YASUJUKI , FUKUI MASAKAZU
IPC分类号： F16K27/00 , F17D1/02 , F15B1/00 , H01L21/205 , H01L21/302 , H01L21/3065
摘要： A fluid control apparatus comprises lines A1, A2, A3, A4, A5, B1, B2, B3 each removably attached to a substrate 1 by a plurality of brackets 8, 9, 18, 19, 20, and channel communication means 47, 48 which are removable upward.

69. 发明专利

DE60029838D1 未知
公开(公告)号：DE60029838D1
公开(公告)日：2006-09-14
申请号：DE60029838
申请日：2000-06-05
申请人： OHMI TADAHIRO , FUJIKIN KK
发明人： OHMI TADAHIRO , NISHINO KOUJI , IKEDA NOBUKAZU , YAMAJI MICHIO , DOHI RYOUSUKE , IDETA EIJI , HIROSE TAKASHI
IPC分类号： F16K47/08 , F04F1/08 , F16K7/14 , F16K7/16 , F16K25/00 , F16K27/00 , F16K31/02 , F16K47/00 , H04B17/00 , H04W4/90 , H04W48/12 , H04W74/08
摘要： It is an object of the present invention to provide at low costs a valve with an integral orifice for use in a gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. To realize the objects of the present invention, the main part of the valve with an integral orifice comprises a valve main body made of heat-resisting materials having a gas inflow passage in communication with a valve chamber with an upper open end and a gas outflow passage, a synthetic resin made valve seat body formed in the valve chamber and having a gas outflow passage in communication with the gas outflow passage of the aforementioned valve main body and a valve seat, an orifice disc made of heat-resisting materials removably installed in the gas outflow passage of the valve seat body, and an orifice formed in the orifice disc to reduce the gas outflow passage of the valve seat body; wherein the orifice is formed in the stainless steel made orifice disc in advance and the metal made orifice disc with the orifice formed by a separate processing and the synthetic resin made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via the metal inner disc.

70. 发明专利

DE69832956T2 未知
公开(公告)号：DE69832956T2
公开(公告)日：2006-08-17
申请号：DE69832956
申请日：1998-08-13
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGAZUME TETU , SUGIYAMA KAZUHIKO , FUKADA OSAMU , OZAWA SUSUMU , SATOU YOSHIHIRO , DOHI RYOUSUKE , UNO TOMIO , NISHINO KOUJI , FUKUDA HIROYUKI , IKEDA NOBUKAZU , YAMAJI MICHIO
IPC分类号： F15D1/08 , B23P15/16 , G01F1/40 , G01F1/42 , G05D7/01
摘要： An orifice for use in pressure type flow rate control unit which can be manufactured easily and inexpensively, and which has a linear relationship between pressure P1 upstream of the orifice and the flow rate over a wide range of pressure ratio P2/P1 (where P1 is the pressure upstream of the orifice and P2 is the pressure downstream of same), with the flow rate characteristic relationship among a plurality of orifices being easily adjustable. More specifically, the orifice has a structure comprising a tapered inlet section (1) wherein one open end of a bottom hole (6) bored into a main body member (D) is cut into a shape like the mouthpiece of a trumpet, and a short drawn parallel part (2) continuing therefrom; and a short expanded tapered section (3) formed by expanding the diameter of the other open end of the bottom hole (6) and continuing from the drawn parallel part (2), and an expanded parallel part (4) continuing therefrom.

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