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    • 62. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20060006501A1
    • 2006-01-12
    • US11167121
    • 2005-06-28
    • Masaya Kawano
    • Masaya Kawano
    • H01L29/06
    • H01L25/0657H01L23/481H01L2224/0554H01L2224/05573H01L2224/13025H01L2224/16H01L2225/06513H01L2225/06541H01L2924/00014H01L2224/05599H01L2224/0555H01L2224/0556
    • A semiconductor device 1 has a semiconductor chip 10. The semiconductor chip 10 is constituted as having a semiconductor substrate 12 and an interlayer insulating film 14 on the semiconductor substrate 12. The semiconductor substrate 12 has a plurality of through electrodes 22 (first through electrodes) and a plurality of through electrodes 24 (second through electrodes) formed therein. On the top surface S1 (first surface) of the semiconductor chip 10, there are provided connection terminals 32 (first connection terminals) and connection terminals 34 (second connection terminals). The connection terminals 32, 34 are connected to the through electrodes 22, 24, respectively. The connection terminals 32 herein are disposed at positions overlapping the through electrodes 22 in a plan view. On the other hand, the connection terminals 34 are disposed at positions not overlapping the through electrodes 24 in a plan view.
    • 半导体器件1具有半导体芯片10。 半导体芯片10构成为在半导体基板12上具有半导体基板12和层间绝缘膜14.半导体基板12具有多个贯通电极22(第一贯通电极)和多个贯通电极24(第二贯通电极 电极)。 在半导体芯片10的上表面S1(第一表面)上设置有连接端子32(第一连接端子)和连接端子34(第二连接端子)。 连接端子32,34分别与贯通电极22,24连接。 这里的连接端子32设置在俯视图中与贯通电极22重叠的位置。 另一方面,连接端子34在平面图中设置在不与贯通电极24重叠的位置。