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61. 发明申请

US20110183264A1 RESIST PROCESSING METHOD AND USE OF POSITIVE TYPE RESIST COMPOSITION 审中-公开
标题翻译：电阻加工方法和正极型电阻组合物的使用
公开(公告)号：US20110183264A1
公开(公告)日：2011-07-28
申请号：US13063670
申请日：2009-09-08
申请人： Kazuhiko Hashimoto , Mitsuhiro Hata , Satoshi Yamamoto
发明人： Kazuhiko Hashimoto , Mitsuhiro Hata , Satoshi Yamamoto
IPC分类号： G03F7/004 , G03F7/20
CPC分类号： G03F7/0035 , G03F7/0045 , G03F7/0046 , G03F7/0397 , G03F7/40
摘要： A resist processing method has the steps of: (1) forming a first resist film by applying a first resist composition comprising: a resin (A) including a structural unit represented by the formula (XX), and having an acid-labile group, being insoluble or poorly soluble in alkali aqueous solution, and being rendered soluble in alkali aqueous solution through the action of an acid, and a photo acid generator (B) onto a substrate and drying; (2) prebaking the first resist film; (3) exposing the first resist film; (4) post-exposure baking of the first resist film; (5) developing with a first alkali developer to obtain a first resist pattern; (6) hard-baking the first resist pattern, (7) obtaining a second resist film by applying a second resist composition onto the first resist pattern, and then drying; (8) pre-baking the second resist film; (9) exposing the second resist film; (10) post-exposure baking the second resist film; and (11) developing with a second alkali developer to obtain a second resist pattern. wherein, Ra1 represents a hydrogen atom, a halogen atom or a C1 to C3 saturated hydrocarbon group which may be substituted with a halogen atom; Ra2 represents a single bond or a divalent organic group; Ra3 represents a hydrogen atom, a C1 to C12 saturated hydrocarbon group which may be substituted with a hydroxy group etc., and Ra4 represent a C1 to C12 saturated hydrocarbon group.
摘要翻译：抗蚀剂处理方法具有以下步骤：（1）通过施加第一抗蚀剂组合物形成第一抗蚀剂膜，所述第一抗蚀剂组合物包含：包含由式（XX）表示的结构单元并具有酸不稳定基团的树脂（A）在碱性水溶液中不溶或难溶，并且通过酸的作用使碱溶液和光酸产生剂（B）溶解在基材上并干燥; （2）预烘第一抗蚀膜; （3）曝光第一抗蚀膜; （4）第一抗蚀剂膜的曝光后烘烤; （5）用第一碱性显影剂显影以获得第一抗蚀剂图案; （6）对第一抗蚀剂图案进行硬烘烤，（7）通过将第二抗蚀剂组合物施加到第一抗蚀剂图案上，然后干燥获得第二抗蚀剂膜; （8）预烘烤第二抗蚀剂膜; （9）使第二抗蚀剂膜曝光; （10）曝光后烘烤第二抗蚀膜; 和（11）用第二碱性显影剂显影以获得第二抗蚀剂图案。其中，Ra1表示氢原子，卤素原子或可被卤素原子取代的C1〜C3饱和烃基; Ra2表示单键或二价有机基团; Ra3表示氢原子，可被羟基取代的C1〜C12饱和烃基等，Ra4表示C1〜C12饱和烃基。

62. 发明申请

US20110091818A1 PROCESS FOR PRODUCING PHOTORESIST PATTERN 审中-公开
标题翻译：生产光电子图案的工艺
公开(公告)号：US20110091818A1
公开(公告)日：2011-04-21
申请号：US12906522
申请日：2010-10-18
申请人： Mitsuhiro HATA , Kazuhiko Hashimoto
发明人： Mitsuhiro HATA , Kazuhiko Hashimoto
IPC分类号： G03F7/20
CPC分类号： G03F7/0035 , G03F7/0045 , G03F7/0046 , G03F7/0397 , G03F7/40
摘要： The present invention provides a process for producing a photoresist pattern comprising the following steps (1) to (11): (1) a step of applying the first photoresist composition comprising a resin comprising a structural unit having an acid-labile group in its side chain and being itself insoluble or poorly soluble in an alkali aqueous solution but becoming soluble in an alkali aqueous solution by the action of an acid, and an acid generator, on a substrate followed by conducting drying, thereby forming the first photoresist film, (2) a step of prebaking the first photoresist film, (3) a step of exposing the prebaked first photoresist film to radiation, (4) a step of baking the exposed first photoresist film, (5) a step of developing the baked first photoresist film with the first alkaline developer, thereby forming the first photoresist pattern, (6) a step of forming a coating layer on the first photoresist pattern, (7) a step of applying the second photoresist composition on the coating layer followed by conducting drying, thereby forming the second photoresist film, (8) a step of prebaking the second photoresist film, (9) a step of exposing the prebaked second photoresist film to radiation, (10) a step of baking the exposed second photoresist film, and (11) a step of developing the baked second photoresist film with the second alkaline developer, thereby forming the second photoresist pattern.
摘要翻译：本发明提供了一种制备光致抗蚀剂图案的方法，包括以下步骤（1）至（11）：（1）将包含具有酸不稳定基团的结构单元的树脂在其侧面上施加的第一光致抗蚀剂组合物的步骤并且本身不溶于或难溶于碱性水溶液，但是通过酸和酸产生剂在碱性水溶液中溶解，然后进行干燥，从而形成第一光致抗蚀剂膜（2 ）预烘烤第一光致抗蚀剂膜的步骤，（3）将预焙蚀的第一光致抗蚀剂膜暴露于辐射的步骤，（4）烘烤曝光的第一光致抗蚀剂膜的步骤，（5）与第一碱性显影剂，由此形成第一光致抗蚀剂图案，（6）在第一光致抗蚀剂图案上形成涂层的步骤，（7）将第二光致抗蚀剂组合物涂布在涂层上然后进行干燥，从而形成第二光致抗蚀剂膜，（8）预烘烤第二光致抗蚀剂膜的步骤，（9）将预焙烧的第二光致抗蚀剂膜暴露于辐射的步骤，（10）第二光致抗蚀剂膜，和（11）用第二碱性显影剂显影所焙烧的第二光致抗蚀剂膜的步骤，从而形成第二光致抗蚀剂图案。

63. 发明申请

US20050160325A1 Monitoring system 失效
标题翻译：监视系统
公开(公告)号：US20050160325A1
公开(公告)日：2005-07-21
申请号：US10510986
申请日：2003-02-21
申请人： Hiroyuki Ogino , Hideki Omori , Hidekazu Yamashita , Naofumi Nakatani , Osamu Eguchi , Makoto Imai , Wataru Uchiyama , Kazuhiko Hashimoto , Tadashi Miki , Haruo Terai , Kenji Kida
发明人： Hiroyuki Ogino , Hideki Omori , Hidekazu Yamashita , Naofumi Nakatani , Osamu Eguchi , Makoto Imai , Wataru Uchiyama , Kazuhiko Hashimoto , Tadashi Miki , Haruo Terai , Kenji Kida
IPC分类号： G08B13/196 , G08B25/08 , G06F11/00
CPC分类号： G08B13/19656 , G08B13/19645 , G08B13/19658 , G08B13/19691 , G08B13/19697 , G08B25/08
摘要： A monitoring system which is suitable for, for example, preventing crime for a residence, includes a plurality of terminals (31, 32, . . . ) for monitoring whether predetermined monitoring points are in a stationary state or a nonstationary state, and a central processing device (10) for controlling a setting/canceling operation of alarm operations of the terminals (31, 32, . . . ). The central processing device (10) has a communication unit that receives information related to the stationary/nonstationary states from the terminals and transmits predetermined information including commands to the terminals. Each terminal has a communication unit that transmits information related to stationary/nonstationary states to the central processing device and receives the predetermined information from the central processing device. Thus bidirectional communication can be achieved between the central processing device and the terminals. The plurality of terminals (31, 32, . . . ) may include a terminal with an emergency call unit which operates in an emergency to call or notify, and a terminal having a notification unit which indicates that notification of occurrence of nonstationay state has been accepted by a predetermined point of contact.
摘要翻译：适用于例如防止住宅犯罪的监视系统包括用于监视预定监视点是处于静止状态还是处于非稳态状态的多个终端（31,32 ...）和中央处理装置（10），用于控制终端（31,32 ...）的报警操作的设置/取消操作。中央处理装置（10）具有通信单元，其从终端接收与静止/非平稳状态有关的信息，并向终端发送包括命令的预定信息。每个终端具有通信单元，其向中央处理设备发送与静止/非静止状态相关的信息，并从中央处理设备接收预定信息。因此，可以在中央处理装置和终端之间实现双向通信。多个终端（31,32 ...）可以包括具有在紧急情况下操作以进行呼叫或通知的紧急呼叫单元的终端，以及具有指示非易失性状态的发生通知已经被通知的通知单元的终端接受预定的接触点。

64. 发明授权

US06893792B2 Positive resist composition 失效
标题翻译：正抗蚀剂组成
公开(公告)号：US06893792B2
公开(公告)日：2005-05-17
申请号：US10366673
申请日：2003-02-14
申请人： Yoshiko Miya , Kouji Toishi , Kazuhiko Hashimoto
发明人： Yoshiko Miya , Kouji Toishi , Kazuhiko Hashimoto
IPC分类号： G03F7/004 , G03F7/039
CPC分类号： G03F7/0046 , G03F7/0045 , G03F7/0395 , Y10S430/108
摘要： The present invention provides a positive resist composition comprising a resin which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, and an acid generator, wherein the content of halogen atoms in the resin is 40% by weight or more, at least one of structural units constituting the resin is a structural unit having an alicyclic hydrocarbon skeleton, and the structural unit having an alicyclic hydrocarbon skeleton contains therein at least one group rendering the resin soluble in an alkali aqueous solution by the action of an acid, and at least one halogen atom.
摘要翻译：本发明提供一种正型抗蚀剂组合物，其包含本身在碱性水溶液中不溶或难溶于但通过酸作用而在碱性水溶液中溶解的树脂，和酸产生剂，其中卤素原子的含量树脂为40重量％以上，构成树脂的结构单元中的至少一个为具有脂环烃骨架的结构单元，具有脂环烃骨架的结构单元含有至少一个使树脂溶于碱水溶液，通过酸的作用和至少一个卤素原子。

65. 发明授权

US06674081B2 Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same 失效
标题翻译：红外线检测元件，红外二维图像传感器及其制造方法
公开(公告)号：US06674081B2
公开(公告)日：2004-01-06
申请号：US10251953
申请日：2002-09-23
申请人： Kazuhiko Hashimoto , Tomonori Mukaigawa , Ryuichi Kubo , Hiroyuki Kishihara , Minoru Noda , Masanori Okuyama
发明人： Kazuhiko Hashimoto , Tomonori Mukaigawa , Ryuichi Kubo , Hiroyuki Kishihara , Minoru Noda , Masanori Okuyama
IPC分类号： G01J500
CPC分类号： H01L37/02 , G01J5/34 , H01L27/16
摘要： An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.
摘要翻译：由铁电体膜形成的红外线检测电容器，其电容器部分由第一和第二互连线支撑，以保持在位于沟槽两侧的Si衬底上。下电极与第一互连线耦合，而上电极与第二互连线耦合。电容器部分是平面图中的矩形，没有在对角线方向上彼此相对的小三角形部分。

66. 发明授权

US06616607B2 State information acquisition system, state information acquisition apparatus, attachable terminal apparatus, and state information acquisition method 失效
标题翻译：状态信息获取系统，状态信息获取装置，可附装终端装置和状态信息获取方法
公开(公告)号：US06616607B2
公开(公告)日：2003-09-09
申请号：US09981333
申请日：2001-10-17
申请人： Kazuhiko Hashimoto , Shinji Tanaka , Shigeyuki Inoue , Nobuyuki Yoshiike
发明人： Kazuhiko Hashimoto , Shinji Tanaka , Shigeyuki Inoue , Nobuyuki Yoshiike
IPC分类号： A61B500
CPC分类号： A61B5/1113 , A61B5/0022 , A61B5/11 , A61B5/1116 , A61B5/1128 , A61B5/117 , A61B5/6823 , A61B5/6889 , G06F19/00 , G16H40/67 , Y10S128/903
摘要： A state information acquisition system has a terminal which has physiological state detecting means of detecting the physiological state of a person or animal, posture/action detecting means of detecting the posture and/or action state of the person or animal, and detection signal transmitting means of transmitting detection signals based on the detection of (1) the physiological state and (2) the posture and/or action state, and is attachable to the person or animal; and signal receiving and processing means which receives and processes a signal transmitted from the terminal and is located in a predetermined region; and thereby obtaining state information indicating the state of the person or animal on the basis of the detection signal.
摘要翻译：一种状态信息获取系统具有检测人或动物的生理状态的生理状态检测装置的终端，检测人或动物的姿势和/或动作状态的姿势/动作检测装置，以及检测信号发送装置基于（1）生理状态的检测和（2）姿势和/或动作状态发送检测信号，并且可附接到人或动物; 信号接收和处理装置，其接收并处理从终端发送并位于预定区域中的信号; 并且通过基于检测信号获得指示人或动物的状态的状态信息。

67. 发明授权

US06262418B1 Thermal type infrared sensing device, fabrication method for thermal type infrared sensing device, and infrared imaging system and infrared imaging apparatus 有权
标题翻译：热式红外感测装置，热式红外感测装置的制造方法，红外成像系统和红外成像装置
公开(公告)号：US06262418B1
公开(公告)日：2001-07-17
申请号：US09177148
申请日：1998-10-22
申请人： Kazuhiko Hashimoto , Masanori Okuyama , Ryuichi Kubo , Tomonori Mukaigawa
发明人： Kazuhiko Hashimoto , Masanori Okuyama , Ryuichi Kubo , Tomonori Mukaigawa
IPC分类号： G01J510
CPC分类号： G01J5/34
摘要： A thermal type infrared sensing device has; a plurality of light-receiving electrodes for outputting a change of surface charge associated with a polarization that occurs in a dielectric when subjected to infrared radiation; and a plurality of compensation electrodes, corresponding one for one to plurality of light-receiving electrodes, for compensating the outputs of corresponding light-receiving electrodes, and wherein plurality of compensation electrodes are formed on a different substrate from a substrate on which plurality of light-receiving electrodes are formed.
摘要翻译：一种热式红外传感器具有：多个光接收电极，用于输出当经受红外辐射时在电介质中发生的与偏振有关的表面电荷的变化; 以及多个补偿电极，对应一个用于一个到多个光接收电极，用于补偿相应的光接收电极的输出，并且其中多个补偿电极形成在不同的衬底上，所述衬底上具有多个光形成接收电极。

68. 发明授权

US5939132A Alignment chips positioned in the peripheral part of the semiconductor substrate and method of manufacturing thereof 失效
标题翻译：定位在半导体衬底的周边部分的对准芯片及其制造方法
公开(公告)号：US5939132A
公开(公告)日：1999-08-17
申请号：US833193
申请日：1997-04-14
申请人： Toyokazu Fujii , Mikio Nishio , Mitsuru Sekiguchi , Kazuhiko Hashimoto
发明人： Toyokazu Fujii , Mikio Nishio , Mitsuru Sekiguchi , Kazuhiko Hashimoto
IPC分类号： C23C14/04 , C23C16/04 , H01L21/00 , H01L21/677 , B05D5/12 , H07L21/301
CPC分类号： H01L21/67167 , C23C14/042 , C23C16/042 , H01L21/67207 , H01L21/67225 , H01L21/67796 , H01L2223/54473 , H01L2223/5448 , Y10S438/975
摘要： On a semiconductor substrate, chips to be products and alignment chips located at a portion a part thereof is left out from a peripheral part of the semiconductor substrate are formed. Contact holes and alignment marks are formed at the chips to be products and the alignment chips. Covering the alignment chips with alignment mark cover parts of a substrate holder, a material for metal wiring is deposited on the semiconductor substrate to form a metal film on the substrate. A mask pattern is formed on the metal film using the alignment marks of the alignment chips on which the metal film is not formed.
摘要翻译：在半导体基板上，形成从半导体基板的周边部分留出的成为产品的芯片和位于其一部分的对准芯片。在作为产品的芯片和对准芯片上形成接触孔和对准标记。用衬底保持器的对准标记覆盖部分覆盖对准芯片，在半导体衬底上沉积用于金属布线的材料，以在衬底上形成金属膜。使用未形成金属膜的取向芯片的对准标记，在金属膜上形成掩模图案。

69. 发明授权

US5877688A Thermal object measuring apparatus 失效
标题翻译：热物体测量仪
公开(公告)号：US5877688A
公开(公告)日：1999-03-02
申请号：US629937
申请日：1996-04-12
申请人： Katsuya Morinaka , Nobuyuki Yoshiike , Kazuhiko Hashimoto , Tetsuya Kawai
发明人： Katsuya Morinaka , Nobuyuki Yoshiike , Kazuhiko Hashimoto , Tetsuya Kawai
IPC分类号： G01S7/481 , G01S7/483 , G01S7/497 , G01S15/42 , G01S15/88 , G01S17/02 , G01S17/10 , G01S17/88 , G06K9/00 , G08B13/19 , G08B13/191 , G08B29/26 , H04N5/33 , G08B17/00
CPC分类号： G01S7/497 , G01S17/023 , G01S17/10 , G01S7/4813 , G01S7/483 , G06K9/00362 , G08B13/19 , G08B13/191 , G08B29/26 , G01S15/42 , G01S15/88 , G01S17/88 , H04N5/33
摘要： A thermal object detecting method and apparatus. According to the method and apparatus, a thermal image of a measuring space is obtained by a two-dimensional thermal image detecting device. Then, position information of an object in the measuring space is obtained by an object distance detecting device, which determines a distance between the apparatus and the object. The output of the two-dimensional thermal image detecting device can be corrected using the distance data from the object distance detecting device.
摘要翻译：一种热物体检测方法和装置。根据该方法和装置，通过二维热图像检测装置获得测量空间的热像。然后，通过确定设备和对象之间的距离的物体距离检测装置获得测量空间中的对象的位置信息。可以使用来自物体距离检测装置的距离数据来校正二维热图像检测装置的输出。

70. 发明授权

US5866887A Apparatus for detecting the number of passers 失效
标题翻译：用于检测路人数的装置
公开(公告)号：US5866887A
公开(公告)日：1999-02-02
申请号：US922600
申请日：1997-09-03
申请人： Kazuhiko Hashimoto , Nobuyuki Yoshiike , Katsuya Morinaka
发明人： Kazuhiko Hashimoto , Nobuyuki Yoshiike , Katsuya Morinaka
IPC分类号： G06M7/00 , G01J1/02 , G01P13/04 , G01V8/12 , G06K9/20 , G06M11/00 , G07C9/00 , B61L1/16
CPC分类号： G06K9/00778 , G06K9/2018 , G07C9/00
摘要： A plurality of rows are provided on a calling of sensors and each have a plurality of distance variation measuring sensors. The distance variation measuring sensors each include a light emitter and a light receiver arranged in the orthogonal direction to the direction in which human bodies pass. The number of passers is detected on the basis of the number of the distance variation measuring sensors which have detected a human body. The traveling direction of human bodies is detected on the basis of the change in the distance to the distance variation measuring human bodies measured by the sensors.
摘要翻译：在传感器的呼叫上提供多行，并且每行具有多个距离变化测量传感器。距离变化测量传感器各自包括在与人体通过的方向正交的方向上布置的光发射器和光接收器。基于已经检测到人体的距离变化测量传感器的数量来检测路人的数量。基于与由传感器测量的测量人体的距离变化的距离的变化来检测人体的行进方向。

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