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    • 61. 发明授权
    • Power supply control device, plasma processing device, and plasma processing method
    • 电源控制装置,等离子体处理装置和等离子体处理方法
    • US08760053B2
    • 2014-06-24
    • US13198356
    • 2011-08-04
    • Hideo EtoNobuyasu NishiyamaMakoto SaitoKeiji Suzuki
    • Hideo EtoNobuyasu NishiyamaMakoto SaitoKeiji Suzuki
    • H05B31/26H03H7/38
    • H01J37/32091H01J37/32183H01J37/32935
    • According to one embodiment, a power supply control device of a plasma processing device having a plasma generation unit which generates plasma in a process chamber. The power supply control device includes a radio frequency power supply, a storage unit, and a matching circuit. The radio frequency power supply supplies a power to the plasma generation unit. The storage unit stores matching information including a first matching value, a second process condition, and a third matching value. The first matching value corresponds to process information of a first process condition. The second matching value corresponds to process information of a second process condition. The third matching value corresponds to process information of a transient state where the first process condition is being switched to the second process condition. The matching circuit matches impedances based on the matching information.
    • 根据一个实施例,一种具有在处理室中产生等离子体的等离子体产生单元的等离子体处理装置的电源控制装置。 电源控制装置包括射频电源,存储单元和匹配电路。 射频电源为等离子体发生单元供电。 存储单元存储包括第一匹配值,第二处理条件和第三匹配值的匹配信息。 第一匹配值对应于第一处理条件的处理信息。 第二匹配值对应于第二处理条件的处理信息。 第三匹配值对应于将第一处理条件切换到第二处理条件的过渡状态的处理信息。 匹配电路根据匹配信息匹配阻抗。
    • 63. 发明申请
    • POWER SUPPLY CONTROL DEVICE, PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
    • 电源控制装置,等离子体处理装置和等离子体处理方法
    • US20120038277A1
    • 2012-02-16
    • US13198356
    • 2011-08-04
    • Hideo ETONobuyasu NishiyamaMakoto SaitoKeiji Suzuki
    • Hideo ETONobuyasu NishiyamaMakoto SaitoKeiji Suzuki
    • H05B31/02H01L21/3065
    • H01J37/32091H01J37/32183H01J37/32935
    • According to one embodiment, a power supply control device of a plasma processing device having a plasma generation unit which generates plasma in a process chamber. The power supply control device includes a radio frequency power supply, a storage unit, and a matching circuit. The radio frequency power supply supplies a power to the plasma generation unit. The storage unit stores matching information including a first matching value, a second process condition, and a third matching value. The first matching value corresponds to process information of a first process condition. The second matching value corresponds to process information of a second process condition. The third matching value corresponds to process information of a transient state where the first process condition is being switched to the second process condition. The matching circuit matches impedances based on the matching information.
    • 根据一个实施例,一种具有在处理室中产生等离子体的等离子体产生单元的等离子体处理装置的电源控制装置。 电源控制装置包括射频电源,存储单元和匹配电路。 射频电源为等离子体发生单元供电。 存储单元存储包括第一匹配值,第二处理条件和第三匹配值的匹配信息。 第一匹配值对应于第一处理条件的处理信息。 第二匹配值对应于第二处理条件的处理信息。 第三匹配值对应于将第一处理条件切换到第二处理条件的过渡状态的处理信息。 匹配电路根据匹配信息匹配阻抗。
    • 65. 发明授权
    • Field emission display
    • 场发射显示
    • US07821191B2
    • 2010-10-26
    • US11961704
    • 2007-12-20
    • Masanori TakahashiHiroaki IbukiKeiji Suzuki
    • Masanori TakahashiHiroaki IbukiKeiji Suzuki
    • H01J1/62
    • H01J31/127H01J29/085H01J29/92H01J2329/08H01J2329/28H01J2329/92
    • A display apparatus includes an electron source; a substrate; a light emitting body arranged on the substrate and emitting light by being irradiated by an electron emitted from the electron source; an anode disposed on the substrate and supplied with a voltage for accelerating the electron; and an electrode for supplying the voltage to the anode, the electrode being disposed along a side of the substrate, and the electrode has a plurality of electrode films, the electrode films including two electrode films adjacent to each other, and a resistor film connecting between the electrode films, and a length of the portion opposing the other electrode film in one electrode film from among the two electrode films is longer than a length of the one electrode film in a direction orthogonal to the longitudinal direction of the electrode.
    • 显示装置包括电子源; 底物; 发光体,其被布置在所述基板上,并且通过被从所述电子源发射的电子照射而发光; 阳极,设置在基板上并提供用于加速电子的电压; 以及用于向阳极供给电压的电极,电极沿着基板的一侧设置,电极具有多个电极膜,电极膜包括彼此相邻的两个电极膜,以及电阻膜, 两个电极膜中的一个电极膜中的电极膜和与另一个电极膜相对的部分的长度比一个电极膜在与电极的纵向正交的方向上的长度长。
    • 68. 发明申请
    • IMAGE DISPLAY APPARATUS
    • 图像显示设备
    • US20070246747A1
    • 2007-10-25
    • US11768245
    • 2007-06-26
    • Hirotaka MURATAKeiji Suzuki
    • Hirotaka MURATAKeiji Suzuki
    • H01L29/768
    • H01J31/127H01J2329/28
    • An image display apparatus includes a front substrate, and a rear substrate opposed to the front substrate. The front substrate has phosphor layers, resistor layers provided between the phosphor layers, a metal-back layer divided into metal-back segments covering the phosphor layers and resistor layers at least in part, and spaced apart by gaps Gx in a first direction intersecting at right angles with a scanning direction and by gaps Gy in a second direction identical to the scanning direction, and a voltage-applying portion which applies a voltage on the metal-back segments. Rx(100)/Rx(1)
    • 图像显示装置包括前基板和与前基板相对的后基板。 前面基板具有荧光体层,设置在荧光体层之间的电阻层,金属背层被分割成至少部分地覆盖荧光体层和电阻层的金属后部,并且在与第一方向相交的第一方向上被间隙Gx间隔开 在与扫描方向相同的第二方向上具有扫描方向和间隙Gy的直角以及在金属制背部上施加电压的电压施加部。 Rx(100)/ Rx(1)
    • 69. 发明申请
    • Spare part lineup selection system
    • 备件选择系统
    • US20050060327A1
    • 2005-03-17
    • US10931209
    • 2004-09-01
    • Jiro KawaharaKeiji Suzuki
    • Jiro KawaharaKeiji Suzuki
    • G06Q50/10G06F17/00G06Q50/00
    • G06Q30/02G06Q10/087
    • In a spare part lineup selection system, after a drawing has been issued for each part or part assembly of the group of parts constituting the completed product and a symbol has been selected from among a group of symbols indicating rank in physical function and an operator inputs information of the drawing that identifies the part or part assembly together with the selected symbol, the inputted drawing information is registered in a shelf corresponding to the selected symbol from among shelves provided in a drawing information server for the respective symbols, the server is then accessed and the drawing information registered in one from among the shelves that correspond to a predetermine first symbol, and the part or part assembly identified by the drawing information extracted from the shelf corresponding to the predetermined first symbol is determined or selected as a spare part to be sold.
    • 在备件组件选择系统中,在构成完成产品的部件组的每个零件或零件组装已经发出图形之后,从表示物理功能等级的符号组和操作员输入中选择符号 与所选择的符号一起识别零件或部件组合的图形信息,输入的绘图信息从设置在各个符号的绘图信息服务器中的搁板中登记在与所选符号相对应的架子中,然后访问服务器 以及从与预定的第一符号相对应的搁架之一中登记的绘图信息,以及从与预定的第一符号相对应的搁架中提取的绘图信息标识的部分或部分组合被确定或选择为备用部分 卖了