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61. 发明授权

US07550904B2 Thin-film piezoelectric resonator and filter circuit 有权
标题翻译：薄膜压电谐振器和滤波电路
公开(公告)号：US07550904B2
公开(公告)日：2009-06-23
申请号：US11646684
申请日：2006-12-28
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01L41/047 , H01L41/053
CPC分类号： H03H9/171 , H03H9/02228 , H03H9/0519 , H03H9/132 , H03H9/582
摘要： A thin-film piezoelectric resonator has a piezoelectric film which is formed via a space on a substrate and is supported on the substrate at least one location, an upper electrode which has a plurality of electrode layers and a connection part connecting the electrode layers to each other, each of the electrode layers being formed on the piezoelectric film, having the same width and being arranged at the same interval as the width, a lower electrode formed under the piezoelectric film, a first pad which is formed on the substrate and is electrically connected to the upper electrode, and a second pad which is formed on the substrate and is electrically connected to the lower electrode.
摘要翻译：薄膜压电谐振器具有通过基板上的空间形成的压电膜，并且至少在一个位置上被支撑在基板上，上电极具有多个电极层，以及将电极层连接到每个电极层的连接部另外，每个电极层形成在压电膜上，具有相同的宽度并且以与宽度相同的间隔布置，形成在压电膜下面的下电极，形成在基板上并且电连接的第一焊盘连接到上电极，第二焊盘形成在基板上并与下电极电连接。

62. 发明申请

US20090051251A1 PIEZOELECTRIC DRIVEN MEMS APPARATUS AND PORTABLE TERMINAL 失效
标题翻译：压电驱动MEMS器件和便携式终端
公开(公告)号：US20090051251A1
公开(公告)日：2009-02-26
申请号：US12133027
申请日：2008-06-04
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01L41/047
CPC分类号： H01G5/16 , H01H2057/006 , H01L41/094 , H01L41/0946
摘要： A piezoelectric driven MEMS apparatus includes: a substrate; a support part provided on the substrate; a fixed electrode provided on the substrate; and an actuator having a first electrode film, a piezoelectric film formed on the first electrode film, and a second electrode film formed on the piezoelectric film, a first end of the actuator being supported by the support part, a second end of the actuator being disposed so as to be opposed to the fixed electrode. The second end of the actuator is divided into a plurality of electrode parts by a plurality of slits which pass through the first electrode film, the piezoelectric film and the second electrode film, at least a part of each electrode part is linked to parts of adjacent electrode parts, and each electrode part is capable of generating bending deformation individually.
摘要翻译：压电驱动MEMS装置包括：基板; 设置在基板上的支撑部; 设置在基板上的固定电极; 以及致动器，其具有第一电极膜，形成在所述第一电极膜上的压电膜和形成在所述压电膜上的第二电极膜，所述致动器的第一端由所述支撑部支撑，所述致动器的第二端为被设置为与固定电极相对。致动器的第二端通过穿过第一电极膜，压电膜和第二电极膜的多个狭缝分成多个电极部分，每个电极部分的至少一部分连接到相邻部分电极部分，并且每个电极部分能够分别产生弯曲变形。

63. 发明授权

US07461577B2 Bar material supply device of numerically controlled automatic lathe 有权
标题翻译：数控自动车床棒料供料装置
公开(公告)号：US07461577B2
公开(公告)日：2008-12-09
申请号：US10579747
申请日：2004-11-22
申请人： Takaichi Nakaya , Takashi Kawakubo , Tadahiro Iida , Youhei Nonaka
发明人： Takaichi Nakaya , Takashi Kawakubo , Tadahiro Iida , Youhei Nonaka
IPC分类号： B23B17/00 , B23Q5/02
CPC分类号： B23B13/128 , B23B13/021 , Y10T82/2514 , Y10T82/2518 , Y10T82/2521
摘要： There is provided a bar material supply device of a simple configuration suited to machining of a bar material without increasing machining cost even when a short bar material such as an end material is machined. The bar material supply device includes a stocker 12 for supplying a bar material w on an axis C of a spindle 230, a base 10 attached to a head stock 220, a push rod 15 disposed in the base 10 to move back and forth on the axis C and to push the bar material w fed from the stocker 12, a push rod guide 11 disposed in the base 10 to guide the back-and-forth movement of the push rod 15, a plurality of rollers arranged on both sides of the axis C of the base 10 to hold the push rod 15 on the axis C therebetween, one of the plurality of rollers being constituted as a driving roller 135 which is rotated by a driving body disposed in the base, and at least one of the other rollers excluding the driving roller 135 being constituted as a driven roller 132 which is rotated without any slippage with the push rod 15, and rotation detection means 133 for detecting the rotation of the driven roller 132.
摘要翻译：提供了一种简单配置的棒材料供应装置，即使在诸如端材料的短棒材料被加工时，也可以不增加加工成本而适用于棒材的加工。棒材供给装置包括用于在主轴230的轴线C上供给棒料w的储料器12，附接到头料220的基座10，设置在基座10中的推杆15，并且推动从储料器12供给的棒材w;设置在基座10中的引导杆11，用于引导推杆15的往复运动;多个辊，基座10的轴线C，以将推杆15保持在其间的轴线C上，多个辊中的一个被构造为由设置在基座中的驱动体旋转的驱动辊135，并且至少一个不包括驱动辊135的辊被构成为与推杆15无任何滑动而旋转的从动辊132，以及用于检测从动辊132的旋转的旋转检测装置133。

64. 发明申请

US20080017489A1 MEMS SWITCH 失效
标题翻译： MEMS开关
公开(公告)号：US20080017489A1
公开(公告)日：2008-01-24
申请号：US11673984
申请日：2007-02-12
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01H1/20 , H01H1/50 , H01H2057/006
摘要： A MEMS switch according to one aspect of the present invention comprises: a substrate; a fixing portion formed on the substrate; a movable beam including a lower electrode, a first insulation layer formed on the lower electrode, and an upper electrode formed on the first insulation layer, the movable beam having one end fixed by the fixing portion, the lower electrode and the first insulation layer having an opening going through both of the lower electrode and the first insulation layer; a fixed electrode formed on the substrate facing to a bottom surface of the other end of the movable beam, the fixed electrode facing to the opening; a contact electrode formed in the opening so as to project below the bottom surface of the movable beam and to be electrically connected to the upper electrode as well as to be insulated from the lower electrode; and a second insulation layer formed on the fixed electrode and having an opening facing to the contact electrode so as to insulate the lower electrode from the fixed electrode and to permit the contact electrode to come into contact with the fixed electrode.
摘要翻译：根据本发明的一个方面的MEMS开关包括：基板; 形成在所述基板上的固定部; 可动梁，包括下电极，形成在下电极上的第一绝缘层和形成在第一绝缘层上的上电极，可动梁的一端由固定部分固定，下电极和第一绝缘层具有穿过下电极和第一绝缘层的开口; 形成在所述基板上的固定电极，所述固定电极面对所述可动光束的另一端的底面，所述固定电极面向所述开口; 形成在所述开口中的接触电极，以便在所述可移动光束的底表面下方突出并且与所述上电极电连接并且与所述下电极绝缘; 以及形成在固定电极上并具有面向接触电极的开口以便使下电极与固定电极绝缘并允许接触电极与固定电极接触的第二绝缘层。

65. 发明授权

US07301260B2 Bulk acoustic wave device and method of manufacturing the same 失效
标题翻译：体声波装置及其制造方法
公开(公告)号：US07301260B2
公开(公告)日：2007-11-27
申请号：US10736830
申请日：2003-12-17
申请人： Takashi Kawakubo
发明人： Takashi Kawakubo
IPC分类号： H01L41/08
CPC分类号： H03H9/173 , H03H3/02 , H03H9/105 , H03H9/175
摘要： A bulk acoustic wave device includes: a bulk acoustic wave element including a piezoelectric layer formed on a substrate, a lower electrode contacting a lower surface of the piezoelectric layer, and an upper electrode contacting an upper surface of the piezoelectric layer and partially overlapping the lower electrode, a lower hollow section being formed between the substrate and the lower surface of the piezoelectric layer, a first through-hole reaching the lower hollow section being formed through the bulk acoustic wave element in a direction perpendicular to a surface of the piezoelectric layer; an upper hollow section forming layer forming an upper hollow section with the upper surface of the piezoelectric layer, a second through-hole reaching the upper hollow section being formed therethrough in a direction perpendicular to a surface thereof; and a sealing layer covering the upper hollow section forming layer and filling up the second through-hole.
摘要翻译：体声波装置包括：体声波元件，其包括形成在基板上的压电层，与压电层的下表面接触的下电极以及与压电层的上表面接触并与压电层的下表面部分重叠的上电极电极，在所述基板和所述压电体层的下表面之间形成下部中空部，在与所述压电体层的表面垂直的方向上通过所述体声波元件形成到达所述下部中空部的第一贯通孔; 形成具有压电层的上表面的上部中空部分的上部中空部分形成层，到达上部中空部分的第二通孔沿与其表面垂直的方向形成; 以及覆盖上部中空部形成层并填充第二通孔的密封层。

66. 发明授权

US07215066B2 Piezoelectric actuator and micro-electromechanical device 有权
标题翻译：压电致动器和微机电装置
公开(公告)号：US07215066B2
公开(公告)日：2007-05-08
申请号：US11196596
申请日：2005-08-04
申请人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
IPC分类号： H01L41/053
CPC分类号： H01H57/00 , H01G5/18 , H01G5/38 , H01H2057/006 , H01L41/094 , H01L41/0946 , H01L41/0953 , Y10S977/837
摘要： A piezoelectric actuator includes a first beam including a first bottom electrode, a first piezoelectric film on the first bottom electrode, and a first top electrode on the first piezoelectric film, a fixed end assigned at an end of the first beam and fixed on a substrate, a connecting end assigned at another end of the first beam and suspended over a free space; and a second beam including a second piezoelectric film connected to the first piezoelectric film at the connecting end, a second bottom electrode under the second piezoelectric film, and a second top electrode on the second piezoelectric film, a working end assigned at an end of the second beam opposite to another end to which the connecting end is assigned and suspended over the free space; wherein a distance between centers of the fixed end and the working end is shorter than a distance from the working end to the connecting end.
摘要翻译：压电致动器包括第一梁，该第一梁包括第一底电极，第一底电极上的第一压电膜和第一压电膜上的第一顶电极，分配在第一梁的端部并固定在基板上的固定端，分配在第一梁的另一端并悬挂在自由空间上的连接端; 以及第二光束，包括在连接端连接到第一压电膜的第二压电膜，第二压电膜下的第二底电极和第二压电膜上的第二顶电极，分配在第二压电膜的端部的工作端第二梁相对于连接端被分配并悬挂在自由空间上的另一端; 其中固定端和工作端的中心之间的距离短于从工作端到连接端的距离。

67. 发明申请

US20060055287A1 Piezoelectric actuator and micro-electromechanical device 有权
标题翻译：压电致动器和微机电装置
公开(公告)号：US20060055287A1
公开(公告)日：2006-03-16
申请号：US11196596
申请日：2005-08-04
申请人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
IPC分类号： H01L41/04
CPC分类号： H01H57/00 , H01G5/18 , H01G5/38 , H01H2057/006 , H01L41/094 , H01L41/0946 , H01L41/0953 , Y10S977/837
摘要： A piezoelectric actuator includes a first beam including a first bottom electrode, a first piezoelectric film on the first bottom electrode, and a first top electrode on the first piezoelectric film, a fixed end assigned at an end of the first beam and fixed on a substrate, a connecting end assigned at another end of the first beam and suspended over a free space; and a second beam including a second piezoelectric film connected to the first piezoelectric film at the connecting end, a second bottom electrode under the second piezoelectric film, and a second top electrode on the second piezoelectric film, a working end assigned at an end of the second beam opposite to another end to which the connecting end is assigned and suspended over the free space; wherein a distance between centers of the fixed end and the working end is shorter than a distance from the working end to the connecting end.
摘要翻译：压电致动器包括第一梁，该第一梁包括第一底电极，第一底电极上的第一压电膜和第一压电膜上的第一顶电极，分配在第一梁的端部并固定在基板上的固定端，分配在第一梁的另一端并悬挂在自由空间上的连接端; 以及第二光束，包括在连接端连接到第一压电膜的第二压电膜，第二压电膜下的第二底电极和第二压电膜上的第二顶电极，分配在第二压电膜的端部的工作端第二梁相对于连接端被分配并悬挂在自由空间上的另一端; 其中固定端和工作端的中心之间的距离短于从工作端到连接端的距离。

68. 发明授权

US5889696A Thin-film capacitor device and RAM device using ferroelectric film 失效
标题翻译：薄膜电容器和使用铁电薄膜的RAM器件
公开(公告)号：US5889696A
公开(公告)日：1999-03-30
申请号：US45958
申请日：1998-03-23
申请人： Takashi Kawakubo , Noburu Fukushima , Kazuhide Abe
发明人： Takashi Kawakubo , Noburu Fukushima , Kazuhide Abe
IPC分类号： H01L27/10 , G11C11/22 , H01L21/8242 , H01L21/8246 , H01L27/105 , H01L27/108
CPC分类号： G11C11/22
摘要： A semiconductor memory device is constituted by arranging a plurality of memory cells in a matrix format, each of which includes a thin-film capacitor having a ferroelectric film and a pair of electrodes facing each other via the ferroelectric film, and a transfer gate transistor connected to the thin film capacitor. A voltage corresponding to the width of a hysteresis curve obtained when the thin-film capacitor is saturated and polarized falls within the range of 5% or higher to 20% or lower of the voltage difference between the positive and negative directions in a writing operation. A remanent polarization amount obtained when the thin-film capacitor is saturated and polarized falls within the range of 5% or higher to 30% or lower of the total polarization amount obtained upon application of a voltage in the writing operation.
摘要翻译：半导体存储器件通过以矩阵形式布置多个存储单元而构成，每个存储单元包括具有铁电膜的薄膜电容器和经由铁电体膜相互面对的一对电极，并且连接有传输栅极晶体管到薄膜电容器。当薄膜电容器饱和和极化时获得的滞后曲线的宽度对应的电压落在写入操作中正负方向之间的电压差的5％以上至20％以下的范围内。当薄膜电容器饱和和极化时获得的剩余极化量落在在写入操作中施加电压时获得的总极化量的5％以上至30％以下的范围内。

69. 发明授权

US08395462B2 Resonator and oscillator with a tuning fork vibrator in a cut-out portion of a layered body 失效
标题翻译：谐振器和振荡器，其具有在分层体的切口部分中的音叉振子
公开(公告)号：US08395462B2
公开(公告)日：2013-03-12
申请号：US13422023
申请日：2012-03-16
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
IPC分类号： H03H9/21 , H03H9/10 , H03B5/32 , H03L1/02
CPC分类号： H03H9/172 , H03H9/02338 , H03H9/2473 , H03H2009/02496 , H03H2009/241
摘要： A resonator according to the embodiment includes: a substrate; a flat layered body which is formed above the substrate and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; an anchor portion which fixes the layered body above the substrate; a cut-out portion inside the layered body; a tuning fork vibrator which is formed in the cut-out portion, has both ends supported by the layered body and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; and an envelope which envelopes the layered body and the tuning fork vibrator in a noncontact fashion, and prevents an external force from being applied to the layered body and the tuning fork vibrator.
摘要翻译：根据实施例的谐振器包括：基板; 形成在基板的上方并形成有至少一个下电极，压电膜和上电极的平坦层状体; 锚定部，其将层叠体固定在基板的上方; 分层体内的切口部分; 形成在切口部分的音叉振动器具有由层叠体支撑的两端，并且至少形成有下电极，压电膜和上电极; 以及以非接触的方式包围层叠体和音叉振动器的信封，并且防止外力施加到层叠体和音叉振动器。

70. 发明授权

US08038890B2 Piezoelectric-driven MEMS device and method for manufacturing the same 失效
标题翻译：压电驱动MEMS器件及其制造方法
公开(公告)号：US08038890B2
公开(公告)日：2011-10-18
申请号：US12038568
申请日：2008-02-27
申请人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
IPC分类号： G01D15/00 , G11B5/127 , H01L21/00 , H01L21/302 , H01L21/461
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译：可以可靠且一致地制造压电驱动的MEMS器件。压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。

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