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61. 发明授权

US07055825B2 Shaft sealing apparatus 有权
公开(公告)号：US07055825B2
公开(公告)日：2006-06-06
申请号：US10718569
申请日：2003-11-24
申请人： Tetsuya Watanabe , Hiroki Mori , Chohei Okuno
发明人： Tetsuya Watanabe , Hiroki Mori , Chohei Okuno
IPC分类号： F16J15/32
CPC分类号： F16J15/324 , F16J15/006 , F16J15/3212 , F16J15/3232 , F16J15/3236 , F16J15/54 , H01L21/68792 , Y10S277/913
摘要： Herein disclosed is a shaft sealing apparatus which comprises a vacuum casing formed with a vacuum chamber, a driving shaft having an outer cylindrical surface and movably extending in the vacuum chamber of the vacuum casing, and a sealing ring in the form of an annular ring shape and including a sealing lip held in contact with the outer cylindrical surface of the driving shaft, an annular spring member operative to impart a force to the sealing lip to ensure that the sealing lip is held in tight contact with the outer cylindrical surface of the driving shaft, and a peripheral portion radially outwardly extending from the sealing lip, in which the outer cylindrical surface of the driving shaft is smaller in surface roughness Ra than 0.1 (μm).

62. 发明授权

US06998630B2 Method and its apparatus for inspecting particles or defects of a semiconductor device 有权
公开(公告)号：US06998630B2
公开(公告)日：2006-02-14
申请号：US10933977
申请日：2004-09-03
申请人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
发明人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
IPC分类号： G01N21/88
CPC分类号： G01N21/4738 , G01N21/8806 , G01N21/93 , G01N21/94 , G01N21/9501 , G01N2015/1486 , G01N2015/1493
摘要： Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.

63. 发明申请

US20060030060A1 Apparatus and method for testing defects 失效
标题翻译：检测缺陷的装置和方法
公开(公告)号：US20060030060A1
公开(公告)日：2006-02-09
申请号：US11244080
申请日：2005-10-06
申请人： Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
发明人： Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
IPC分类号： G01R31/26 , H01L21/66
CPC分类号： B82Y15/00 , G01N21/94 , G01N21/95623 , G01N21/95684 , G01N2021/8822 , G01R31/308 , H01J37/00 , H01J2237/022 , H01J2237/0225 , H01L21/67253 , H01L21/67288 , H01L21/681 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： An apparatus for detecting defects on a specimen including am illumination optical unit which obliquely projects a laser onto a region which is longer in one direction than in a direction transverse to said one direction on a surface of a specimen, a table unit which mounts said specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from said specimen in both directions of the one direction and the direction transverse and which reflected light in both directions is formed on said image sensor while said table is moving, a signal processor which processes a signal outputted from said image sensor of said detection optical unit to extract defects of said specimen. A display unit which displays information of defects extracted by said signal processor.
摘要翻译：一种用于检测试样上的缺陷的装置，包括：am照明光学单元，其将激光倾斜地突出到在一个方向上比沿着与所述一个方向横切的方向在一个方向上长的区域;安装所述样本的台单元检测光学单元，其利用图像传感器检测在所述图像传感器上形成有从所述一个方向的两个方向和横向方向反射的光形成的光，并且在所述图像传感器上形成两个方向的反射光当所述表移动时，信号处理器处理从所述检测光学单元的所述图像传感器输出的信号，以提取所述样本的缺陷。一种显示由所述信号处理器提取的缺陷信息的显示单元。

64. 发明授权

US06888959B2 Method of inspecting a semiconductor device and an apparatus thereof 有权
标题翻译：检查半导体器件的方法及其装置
公开(公告)号：US06888959B2
公开(公告)日：2005-05-03
申请号：US09791682
申请日：2001-02-26
申请人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Kenji Oka , Takanori Ninomiya , Maki Tanaka , Kenji Watanabe , Tetsuya Watanabe , Yoshio Morishige
发明人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Kenji Oka , Takanori Ninomiya , Maki Tanaka , Kenji Watanabe , Tetsuya Watanabe , Yoshio Morishige
IPC分类号： G01N21/956 , G06T7/00 , H01L21/66 , G06K9/00
CPC分类号： G06T7/001 , G01N21/8851 , G01N21/9501 , G01N2021/8861 , G01N2021/8867 , G06T7/97 , G06T2207/10152 , G06T2207/30148
摘要： In order to inspect a substance to be detected such as a foreign substance in accordance with the condition of the surface of a sample to be inspected such as a semiconductor substrate manufactured in various manufacturing processes under a suitable inspection condition, this method includes the steps of: inspecting a substance to be detected on a sample to be inspected under a plurality inspection conditions, which are previously set, as a single unit to detect at least the data of a detected substance for each of the plurality of inspection conditions; checking the data of the detected substance for the respective inspection conditions against each other to make check data; analyzing the detected substance based on the check data of the detected substance to classify the detected substance; adding the data of classified detected substance to the coordinate data of the detected substance for the respective inspection conditions to make data relating to the classified detected substance for the respective inspection conditions; and selecting a suitable inspection condition based on the data relating to the classified detected substance for the respective inspection conditions.
摘要翻译：为了在适当的检查条件下，根据在各种制造工序中制造的半导体衬底等被检测样品的表面状况，检查异物等异物，该方法包括以下步骤：在预先设定的多个检查条件下检查待检测样品上检测到的物质作为单个单元，至少检测多个检查条件中检测物质的数据; 检查相应检查条件的检测物质的数据，以进行检查数据; 基于检测到的物质的检查数据分析检测到的物质以对检测到的物质进行分类; 将各种检测条件的检测物质的坐标数据相加，对各检查条件进行分类检测物质的数据的添加; 以及基于与各检查条件的分类检测物质有关的数据来选择合适的检查条件。

65. 发明授权

US06859823B1 Workflow server and workflow system control method 失效
标题翻译：工作流服务器和工作流系统控制方法
公开(公告)号：US06859823B1
公开(公告)日：2005-02-22
申请号：US09514945
申请日：2000-02-28
申请人： Hiroshi Nishihara , Tetsuya Watanabe , Yoshiyuki Yamaguchi , Takayuki Yokoyama
发明人： Hiroshi Nishihara , Tetsuya Watanabe , Yoshiyuki Yamaguchi , Takayuki Yokoyama
IPC分类号： G06Q10/00 , G06F15/16
CPC分类号： G06Q10/10
摘要： A workflow server is provided with, in association with a user management table 100 for managing work items for each user, a list 130 of substitute users for indicating a substitute user for each work or process and a list 140 of users in charge who designates the user as a substitute. When a client terminal user selects a specific user among the users in charge on the list 130, the workflow server checks the power of substitute by referring to the list 140 of substitute users for the selected user, thereby to allow the client terminal user to process a predesignated unprocessed work item instead of the selected user in charge.
摘要翻译：与用于管理每个用户的工作项的用户管理表100相关联地提供工作流服务器，用于指示每个工作或处理的替代用户的代表用户列表130以及指定用户的用户的列表140 用户作为替代品。当客户终端用户在列表130中负责的用户中选择特定用户时，工作流服务器通过参照所选择的用户的替代用户的列表140来检查替代的权力，从而允许客户终端用户处理预先指定的未处理的工作项目，而不是所选的用户。

66. 发明申请

US20050024633A1 Method and its apparatus for inspecting particles or defects of a semiconductor device 有权
标题翻译：用于检查半导体器件的颗粒或缺陷的方法及其装置
公开(公告)号：US20050024633A1
公开(公告)日：2005-02-03
申请号：US10933977
申请日：2004-09-03
申请人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
发明人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
IPC分类号： G01N21/88 , G01N21/94
CPC分类号： G01N21/4738 , G01N21/8806 , G01N21/93 , G01N21/94 , G01N21/9501 , G01N2015/1486 , G01N2015/1493
摘要： Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.
摘要翻译：通常，作为检测结果，粒子/缺陷检查装置输出检测出的粒子/缺陷的总数。对于制造过程中的故障采取对策，分析检查装置检测到的颗粒/缺陷。由于检查装置输出大量检测到的粒子/缺陷，所以需要巨大的时间来分析检测到的粒子/缺陷，从而导致制造过程中的失败的对策的延迟。在本发明中，用于光学检查颗粒或缺陷的装置在检查结果中将颗粒或缺陷尺寸与故障原因相关联。数据处理电路从检查结果统计中指出故障原因，并显示检查结果信息。通过设定用于识别半导体装置等上的各区域的故障的阈值来进行故障分析，以统计学评价检测出的粒子。

67. 发明授权

US06825145B2 Exhaust gas purifying catalyst 有权
标题翻译：废气净化催化剂
公开(公告)号：US06825145B2
公开(公告)日：2004-11-30
申请号：US10452206
申请日：2003-06-02
申请人： Hiroshi Tanada , Osamu Nakayama , Keisuke Tashiro , Kinichi Iwachido , Tetsuya Watanabe , Kazuo Koga
发明人： Hiroshi Tanada , Osamu Nakayama , Keisuke Tashiro , Kinichi Iwachido , Tetsuya Watanabe , Kazuo Koga
IPC分类号： B01J2906
CPC分类号： B01D53/9422 , B01D53/945 , B01D53/9468 , B01D2255/102 , B01D2255/202 , B01D2255/204 , B01D2255/30 , B01D2255/50 , B01D2255/91 , B01J23/58 , B01J29/082 , B01J29/084 , B01J29/18 , B01J29/40 , B01J29/70 , B01J37/0244 , B01J37/0246 , Y02T10/22
摘要： The present invention provides an exhaust gas purifying catalyst that is capable of substantially reducing the degree of deterioration in an exhaust gas purifying capability, which results from dissipation of an absorbent agent. Accordingly, an exhaust gas purifying catalyst, which includes a carrier and a catalyst layer, and to which at least one material selected from a group of alkali metals and alkali earth metals is added as an absorbent agent, is characterized in that acid material with a high affinity with respect to the absorbent agent is mixed in the catalyst layer so as to fix the absorbent agent, and an inhibiting layer is formed between the catalyst layer and the carrier so as to inhibit the movement of the absorbent agent toward the carrier.
摘要翻译：本发明提供一种排气净化催化剂，其能够显着降低由吸收剂的耗散引起的废气净化能力的劣化程度。因此，作为吸收剂，添加有载体和催化剂层，并且添加有选自碱金属和碱土类金属中的至少一种的废气净化用催化剂，其特征在于，具有在催化剂层中混合相对于吸收剂的高亲合力，以固定吸收剂，并且在催化剂层和载体之间形成抑制层，以抑制吸收剂向载体的移动。

68. 发明授权

US06729201B2 Traction drive speed reducer, conveyance apparatus using traction drive speed reducer, and arrangement of two-axis output encoder in conveyance apparatus 有权
标题翻译：牵引驱动减速机，使用牵引驱动减速机的输送装置，以及输送装置中的两轴输出编码器的配置
公开(公告)号：US06729201B2
公开(公告)日：2004-05-04
申请号：US09901859
申请日：2001-07-10
申请人： Hiroki Mori , Tetsuya Watanabe , Chohei Okuno , Takahiro Maekawa
发明人： Hiroki Mori , Tetsuya Watanabe , Chohei Okuno , Takahiro Maekawa
IPC分类号： B25J1700
CPC分类号： B25J9/102 , B25J18/04 , F16H13/02 , F16H13/06 , Y10T74/20305 , Y10T74/20341
摘要： A traction drive speed reducer which comprises circumscribed axes 20A and 20B, a plurality of intermediate axes 30A and 30B arranged contacting around the outer periphery of the circumscribed axes, and inscribed cylinders 40A and 40B inscribing the outer periphery of the intermediate axes, and in which a supporting member 10 to rotatably support the intermediate axes is fixed, a drive motor is connected to at least one of the plurality of intermediate axes, and an output is taken from the circumscribed axis having the larger diameter than the outer diameter of the intermediate axis.
摘要翻译：牵引驱动减速器，其包括外围轴线20A，20B，围绕外部轴线的外周配置的多个中间轴线30A，30B，以及内接于中间轴线的外周的内接缸体40A，40B，固定用于可旋转地支撑中间轴的支撑构件10，驱动马达连接到多个中间轴线中的至少一个，并且从具有比中间轴线的外径大的直径的外接轴线取出输出。

69. 发明授权

US06537946B1 Exhaust gas purifying catalyst 有权
标题翻译：废气净化催化剂
公开(公告)号：US06537946B1
公开(公告)日：2003-03-25
申请号：US09642366
申请日：2000-08-21
申请人： Hiroshi Tanada , Osamu Nakayama , Keisuke Tashiro , Kinichi Iwachido , Tetsuya Watanabe
发明人： Hiroshi Tanada , Osamu Nakayama , Keisuke Tashiro , Kinichi Iwachido , Tetsuya Watanabe
IPC分类号： B01J2302
CPC分类号： B01D53/9422 , B01D2255/2022 , B01D2255/204 , B01D2255/20707 , B01D2255/20776 , B01D2255/50 , B01J23/58 , B01J35/04 , B01J37/0244 , B01J37/0246 , F01N3/0814 , Y10T29/49345
摘要： In an exhaust gas purifying catalyst, an acid material with a high affinity with respect to an absorbing agent is dispersed and mixed in a catalyst layer, to which the absorbing agent is added, or a layer of the acid material is formed inside the catalyst layer in order to prevent the absorbing agent from moving from the catalyst layer into the carrier. This reduces the permeation of the absorbing agent added to the catalyst layer into a carrier, the evaporation and splash of the absorbing agent from the catalyst, and the deterioration in the durability and the exhaust gas purifying performance of the catalyst.
摘要翻译：在排气净化催化剂中，将相对于吸收剂具有高亲和力的酸性物质分散并混合在添加有吸收剂的催化剂层中，或在催化剂层内形成酸物质层以防止吸收剂从催化剂层移动到载体中。这样可以减少添加到催化剂层中的吸收剂向载体中的渗透，吸收剂从催化剂的蒸发和飞溅以及催化剂的耐久性和废气净化性能的劣化。

70. 发明授权

US06514025B2 Screw member with elastically deformable features 失效
标题翻译：具有弹性变形特征的螺杆构件
公开(公告)号：US06514025B2
公开(公告)日：2003-02-04
申请号：US09862073
申请日：2001-05-21
申请人： Tetsuya Watanabe
发明人： Tetsuya Watanabe
IPC分类号： F16B3930
CPC分类号： F16B39/30 , F16B33/02 , F16B39/284
摘要： A screw member having a loosening prevention function is provided to improve a fastening power and a relative strength in thread connection. With an arrangement to provide a first crest portion and a second crest portion at the opposite ends of a thread point, a first screw member generates a loosening prevention effect due to elastic deformation of the first crest portion and the second crest portion, with the entire thread flank from the base portion to the point brought into contact with a second screw member on the both surfaces of the thread flanks. With this arrangement, a strong fastening power can be obtained, and a clamping force applied to the thread is distributed over the thread, thereby enabling improvement in the relative strength in thread connection.
摘要翻译：提供具有松动防止功能的螺纹构件以提高螺纹连接中的紧固力和相对强度。通过在螺纹点的相对端设置第一顶部部分和第二顶部部分的布置，第一螺纹部件由于第一顶部部分和第二顶部部分的弹性变形而产生松动防止效果，整个螺纹齿从基部到与螺纹面的两个表面上的第二螺纹构件接触的点。通过这种布置，可以获得强大的紧固力，并且施加到螺纹的夹紧力分布在螺纹上，从而可以提高螺纹连接中的相对强度。

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