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    • 2. 发明授权
    • Robot arm mechanism
    • 机器人手臂机构
    • US07244091B2
    • 2007-07-17
    • US11287366
    • 2005-11-28
    • Hiroki MoriTetsuya WatanabeChohei Okuno
    • Hiroki MoriTetsuya WatanabeChohei Okuno
    • B25J17/00
    • B25J9/1065Y10S414/13Y10T74/20329
    • Herein disclosed is a robot arm mechanism comprising a first arm link mechanism and a second arm link mechanism, a robot arm driving mechanism for driving the first arm link mechanism and the second arm link mechanism, and a link retaining mechanism for pivotably retaining the first arm link mechanism and the second arm link mechanism, in which a third arm link and a fourth arm link of the first arm link mechanism are kept forward in a first rotation direction, in which the first arm link mechanism and the second arm link mechanism are extended, thereby enabling to prevent the quadric crank chain constituting the robot arm mechanism from being flattened out while the first arm link mechanism and the second arm link mechanism are extended, and improving resistance to deformation, in comparison with the conventional robot arm mechanism.
    • 这里公开了一种机器人手臂机构,包括第一臂连杆机构和第二臂连杆机构,用于驱动第一臂连杆机构和第二臂连杆机构的机器人手臂驱动机构,以及连杆保持机构,用于可枢转地保持第一臂 连杆机构和第二臂连杆机构,其中第一臂连杆机构的第三臂连杆和第四臂连杆沿第一旋转方向保持向前,第一臂连杆机构和第二臂连杆机构延伸 从而与传统的机器人手臂机构相比,能够防止构成机器人臂机构的二次曲柄链在第一臂连杆机构和第二臂连杆机构伸长的同时被平坦化,并且提高耐变形性。
    • 3. 发明授权
    • Robot arm mechanism and robot apparatus
    • US07040852B2
    • 2006-05-09
    • US10421834
    • 2003-04-24
    • Hiroki MoriTetsuya WatanabeChohei Okuno
    • Hiroki MoriTetsuya WatanabeChohei Okuno
    • B25J18/00
    • B25J9/1065H01L21/67739Y10S414/13Y10T74/20329
    • Herein disclosed is a robot arm mechanism comprising: a first handling member for supporting and handling a first object; a second handling member for supporting and handling a second object; a first robot arm including a first arm link and a second arm link, the first end portion of the second arm link being pivotably connected to the second end portion of the first arm link, and the second end portion of the second arm link being connected to the first handling member to allow the first handling member to support the first object in a stable condition; a second robot arm including a first arm link and a second arm link, the first end portion of the second arm link being pivotably connected to the second end portion of the first arm link, the second arm link being inclined with respect to the second arm link of the first robot arm at a preset angle defined between the central line of the second arm link of the second robot arm and the central line of the second arm link of the first robot arm, and the second end portion of the second arm link being connected to the second handling member to allow the second handling member to support the second object in a stable condition; a robot arm moving mechanism for allowing one of the first arm links and of the first and second robot arms to be angularly moved with respect to the other of the first arm links of the first and second robot arms; and an angle keeping mechanism for keeping substantially fixed the preset angle defined between the central line of the second arm link of the second robot arm and the central line of the second arm link of the first robot arm as one of the first arm links of the first and second robot arms is angularly moved with respect to the other of the first arm links of the first and second robot arms.
    • 6. 发明授权
    • Robot arm mechanism
    • 机器人手臂机构
    • US06705177B2
    • 2004-03-16
    • US10115098
    • 2002-04-04
    • Chohei OkunoHiroki MoriTetsuya Watanabe
    • Chohei OkunoHiroki MoriTetsuya Watanabe
    • B25J1700
    • H01L21/68707B25J9/1065Y10T74/20305Y10T74/20317Y10T74/20329
    • A robot arm mechanism includes a handling member for supporting and handling an object, a robot arm made up of a plurality of links, and a robot arm driving mechanism for driving the robot arm to assume its contracted and extended position. The robot arm comprises first and second arm links, a link retaining mechanism pivotably retaining the first and second arm links and a link operating mechanism to operate one of the first and second arm links by a motion of the other of the first and second arm links. The link operating mechanism comprises a crank, a coupling link and a connecting link. The crank integrally connected to the coupling link is pivotably connected to one of the first and second arms and to the link retaining mechanism. The connecting link is pivotably connected to the other of the first and second arms. This leads to the advantage that the robot arms can be contracted and extended and rotated by only two electric motors.
    • 机器人手臂机构包括用于支撑和处理物体的处理构件,由多个连杆构成的机器人手臂,以及用于驱动机器人手臂以承受收缩和延伸位置的机器人手臂驱动机构。 机器人臂包括第一和第二臂连杆,可枢转地保持第一和第二臂连杆的连杆保持机构和连杆操作机构,以通过另一个第一和第二臂连杆的运动来操作第一和第二臂连杆中的一个 。 连杆操作机构包括一个曲柄,一个联接杆和一个连接杆。 整体连接到联接杆的曲柄可枢转地连接到第一和第二臂中的一个和连杆保持机构。 连接连杆可枢转地连接到第一和第二臂中的另一个。 这导致机器人臂可以仅由两个电动机收缩和延伸和旋转的优点。
    • 10. 发明授权
    • Wafer surface observing method and apparatus
    • 晶圆表面观察方法及装置
    • US08577119B2
    • 2013-11-05
    • US11698987
    • 2007-01-29
    • Hiroshi HigashiTetsuya WatanabeKenji Aiko
    • Hiroshi HigashiTetsuya WatanabeKenji Aiko
    • G06K9/00G01N21/00
    • G01N21/9501G01N21/9503
    • A wafer surface observing apparatus for inspecting a peripheral portion of an object has (A) a lens system and a CCD camera for taking images of the peripheral portion of the object, (B) storage for storing image data about the taken images, and (C) display for displaying the image data stored in the storage device. In particular, the present apparatus can have functions of rotating the object placed on a prealignment portion, recording images of one full outer periphery of an end portion of the object by the lens system and CCD camera into the location where the orientation flat portions or notched portions of the object are placed in position, accepting the images into the storage device, and displaying the images on a CRT.
    • 用于检查物体的周边部分的晶片表面观察装置具有(A)用于拍摄物体的周边部分的图像的透镜系统和CCD照相机,(B)用于存储关于拍摄图像的图像数据的存储器和( C)显示用于显示存储在存储装置中的图像数据。 具体地说,本装置具有使放置在预对准部上的物体旋转的功能,通过透镜系统和CCD照相机将物体的端部的一个完整外周的图像记录到定位平面部分或切口的位置 将物体的部分放置在适当位置,将图像接收到存储装置中,并将图像显示在CRT上。