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    • 64. 发明申请
    • CATADIOPTRIC PROJECTION OBJECTIVE WITH TILTED DEFLECTING MIRRORS, PROJECTION EXPOSURE APPARATUS, PROJECTION EXPOSURE METHOD, AND MIRROR
    • 投影曝光装置,投影曝光方法和镜像的目标投影目标
    • US20110304926A1
    • 2011-12-15
    • US13217793
    • 2011-08-25
    • Ralf MuellerAksel GoehnermeierWolfgang Singer
    • Ralf MuellerAksel GoehnermeierWolfgang Singer
    • G02B17/08
    • G02B17/08G02B27/286G03F7/70225G03F7/70566
    • A projection objective has an object surface and an image surface. The projection objective includes a plurality of optical elements arranged along an optical axis and configured so that during operation the projection objective images a pattern arranged in the object surface onto the image surface. The optical elements include a concave mirror a first deflecting mirror and a second deflecting mirror. The first deflecting mirror is tilted relative to the optical axis by a first tilt angle, t1, about a first tilt axis so that during operation the first deflecting mirror deflects light at a wavelength λ from the object surface towards the concave mirror or deflects light at λ from the concave mirror towards the image surface. The second deflecting mirror is tilted relative to the optical axis by a second tilt angle, t2, about a second tilt axis. For a pattern including a grating having a line width of 45 nm and a pitch, p, the projection objective images the pattern to the image surface such that for a first orientation of the pattern and a second orientation of the pattern a difference, ΔHV, between the imaged line width is 1.2 nm or less for 100 nm
    • 投影物镜具有物体表面和图像表面。 投影物镜包括沿着光轴布置的多个光学元件,并且被配置为使得在操作期间,投影物镜将布置在物体表面中的图案图像映像到图像表面上。 光学元件包括凹面镜,第一偏转镜和第二偏转镜。 第一偏转镜相对于光轴相对于第一倾斜轴倾斜第一倾斜角度t1,使得在操作期间,第一偏转镜将波长λ的物体从物体表面偏转到凹面镜,或使光线偏转 λ从凹面镜朝向图像表面。 第二偏转镜相对于光轴倾斜第二倾斜角t2,约为第二倾斜轴。 对于包括具有45nm的线宽度和间距p的光栅的图案,投影物镜将图案图像到图像表面,使得对于图案的第一取向和图案的第二取向而言,Dgr; HV,对于100nm

    • 67. 发明申请
    • OPTICAL SYSTEM
    • 光学系统
    • US20100231888A1
    • 2010-09-16
    • US12782831
    • 2010-05-19
    • Ralf MuellerToralf Gruner
    • Ralf MuellerToralf Gruner
    • G03B27/72G02B27/28G03F7/20
    • G02B5/3083G02B1/08G03F7/70141G03F7/70191G03F7/70258G03F7/70308G03F7/70566G03F7/70966
    • The disclosure provides an optical system having an optical axis, where the optical system includes a polarization manipulator which includes first and second subelements. The first subelement has a non-planar, optically effective surface. For light passing through the first subelement, the first subelement causes a change in the polarization state. A maximum effective retardation introduced by the first subelement along the optical axis is less than a quarter of the working wavelength of the optical system. The first subelement and the second subelement have mutually facing surfaces which are mutually complementary. The optical system also includes a position manipulator to manipulate the relative position of the first and second subelements.
    • 本公开提供了一种具有光轴的光学系统,其中光学系统包括包括第一和第二子元件的偏振操纵器。 第一个子元件具有非平面的光学有效表面。 对于通过第一子元件的光,第一子元件导致极化状态的变化。 由第一子元件沿着光轴引入的最大有效延迟小于光学系统的工作波长的四分之一。 第一子元件和第二子元件具有相互互补的相互面对的表面。 光学系统还包括位置操纵器来操纵第一和第二子元件的相对位置。
    • 69. 发明申请
    • WRAPPER SEALING PROCESS AND ARTICLE
    • 包装密封工艺和文章
    • US20100022980A1
    • 2010-01-28
    • US12444656
    • 2007-10-12
    • Joseph JunioDavid L. KimballRalf MuellerTony Ng
    • Joseph JunioDavid L. KimballRalf MuellerTony Ng
    • A61F13/20B65B11/56
    • A61F13/2085A61F13/55175A61F15/003Y10S604/904
    • A process for overwrapping a catamenial device such as a tampon includes the steps of providing a substantially cylindrical overwrapper material, inserting a catamenial device into the overwrap material, and closing the open end of the overwrapper material. The overwrapper material has an open end, a closed end, and a first length. The catamenial device has a tapered insertion end, a longitudinal axis, and a length less than the first length, such that the open end of the overwrapper material extends beyond the insertion end of the inserted catamenial device. Concave clamping jaws are applied to the open end of the overwrapper material to urge it toward the longitudinal axis of the catamenial device; to conform portions of the overwrapper material to the insertion end of the catamenial device; and to fold overwrapper material between adjacent clamping jaws to form fins extending outwardly from the conformed portions.
    • 用于包装月经装置(例如卫生棉条)的方法包括以下步骤:提供基本上圆柱形的外包装材料,将月经装置插入外包装材料中,以及封闭外包装材料的开口端。 外包装材料具有开口端,封闭端和第一长度。 月经装置具有锥形插入端,纵向轴线和小于第一长度的长度,使得外包裹材料的开口端延伸超过插入的月经装置的插入端。 凹面夹钳被施加到外包装材料的开口端以将其推向月经装置的纵向轴线; 将外包装材料的一部分配合到月经装置的插入端; 并且在相邻夹爪之间折叠外包装材料以形成从配合部分向外延伸的翅片。