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    • 65. 发明授权
    • Power semiconductor device
    • 功率半导体器件
    • US06967374B1
    • 2005-11-22
    • US10923743
    • 2004-08-24
    • Wataru SaitoIchiro Omura
    • Wataru SaitoIchiro Omura
    • H01L27/095H01L29/06H01L29/76H01L29/78
    • H01L29/7806H01L29/0634H01L29/7802
    • There are provided a power switching element including a first semiconductor layer of a first conductivity type; a plurality of second semiconductor layers of a second conductivity type, which are in a columnar shape, and arranged in the first semiconductor layer at certain intervals in a direction parallel to a layer surface of the first semiconductor layer; a first electrode formed on a surface of one side of the first semiconductor layer, the first electrode being electrically connected with the first semiconductor layer; a plurality of third semiconductor layers selectively formed in a surface region of the other side of the first semiconductor layer, the third semiconductor layers being connected to the second semiconductor layers; a fourth semiconductor layer of the first conductivity type selectively formed in a surface region of the third semiconductor layers; second electrodes formed so as to contact surfaces of the third semiconductor layers and the fourth semiconductor layer; and gate electrodes formed on regions of the first semiconductor layer sandwiched between the adjacent third semiconductor layers, gate dielectric films being inserted between the gate electrodes and the first semiconductor layer, and a Schottky barrier diode in which a cathode is connected to the first electrode of the power switching element, and an anode is connected to the second electrodes of the power switching element.
    • 提供了包括第一导电类型的第一半导体层的功率开关元件; 多个第二导电类型的第二半导体层,其为柱状,并且在与第一半导体层的层表面平行的方向上以一定间隔配置在第一半导体层中; 第一电极,形成在所述第一半导体层的一侧的表面上,所述第一电极与所述第一半导体层电连接; 选择性地形成在所述第一半导体层的另一侧的表面区域中的多个第三半导体层,所述第三半导体层连接到所述第二半导体层; 选择性地形成在第三半导体层的表面区域中的第一导电类型的第四半导体层; 形成为与第三半导体层和第四半导体层接触的第二电极; 以及栅电极,形成在夹在相邻的第三半导体层之间的第一半导体层的区域上,栅极电介质膜插入在栅电极和第一半导体层之间,肖特基势垒二极管和阴极连接到第一电极的第一电极 功率开关元件和阳极连接到功率开关元件的第二电极。