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    • 64. 发明授权
    • Blanking aperture array type charged particle beam exposure
    • 消隐孔径阵列式带电粒子束曝光
    • US5430304A
    • 1995-07-04
    • US327810
    • 1994-10-24
    • Hiroshi YasudaYasushi TakahashiYoshihisa OaeTomohiko AbeShunsuke Fueki
    • Hiroshi YasudaYasushi TakahashiYoshihisa OaeTomohiko AbeShunsuke Fueki
    • H01L21/027H01J37/302
    • B82Y10/00B82Y40/00H01J37/3026H01J37/3174H01J2237/0435H01J2237/31776
    • A charged particle beam-exposure method in which a subject is exposed to a pattern via a charged particle beam having an on/off exposure characteristic. A blanking aperture array has n open/close devices which individually/correspond to respective scan positions of the charged particle beam and operate to control the on/off exposure characteristic of the charged particle beam. The method includes: (1) selectively designating bit positions of successive n-bit width data blocks of the pattern, each n-bit width data block stored within a row of the pattern; (2) successively reading each n-bit width data block; (3) forming successive rows of unit pattern data from the successively designated and read n-bit width data block, each successive row corresponding to a successively designated and read n-bit width data block; (4) storing the successive rows of unit pattern data to form unit pattern data in bit matrix form having m columns and n rows; and (5) sequentially supplying the successive rows of unit pattern data to the blanking aperture array to control the on/off exposure characteristic of the charged particle beam.
    • 一种带电粒子束曝光方法,其中被摄体经由具有开/关曝光特性的带电粒子束曝光于图案。 消隐孔径阵列具有单独/对应于带电粒子束的相应扫描位置的n个打开/关闭装置,并且用于控制带电粒子束的开/关曝光特性。 该方法包括:(1)有选择地指定图案的连续n位宽度数据块的位位置,每个n位宽数据块存储在该行图案中; (2)连续读取每个n位宽数据块; (3)从连续指定和读取的n位宽度数据块形成连续的单位图形数据行,每个连续行对应于连续指定和读取的n位宽度数据块; (4)存储连续的单位图形数据行以形成具有m列和n行的位矩阵形式的单位图形数据; 并且(5)将连续行的单位图形数据顺序地提供给消隐孔径阵列,以控制带电粒子束的接通/断开曝光特性。
    • 67. 发明授权
    • Flexible supporting sheath for cables and the like
    • 用于电缆等的柔性支撑护套
    • US5215338A
    • 1993-06-01
    • US800526
    • 1991-12-02
    • Akira KimuraNobuo KitaoHiroshi YasudaKiyoshi IsozakiHiroshi NishimuraYoshimasa Shimomura
    • Akira KimuraNobuo KitaoHiroshi YasudaKiyoshi IsozakiHiroshi NishimuraYoshimasa Shimomura
    • F16L3/015H02G3/0475Y10S285/921Y10T403/32565
    • A universally articulable supporting sheath comprises an interconnected series of links, each having a convex spherical surface at one end, and a concave spherical surface at its opposite end. The concave and convex surfaces mate with one another to form the sheath. Special links having branch openings may be provided. Various forms of waterproofing seals are provided, including O-rings, axially compressed rings, flexible belts, and ridges on the spherical surfaces. The links can be fitted together by thermal expansion. However, an axially split link is also described, which comprises two parts which snap together. The split parts may be molded as a unit with an integral thin wall hinge. The bending characteristics and bending radius of a sheath can be modified by insertion of spacers between the links at selected locations, or by the insertion of pins into radial holes provided in the links. Spacers with tongues may be used to prevent rotation of the links about the sheath axis, while allowing unidirectional articulation. Projections on one of a pair of mating spherical surfaces can be engaged with holes, slots or recesses of rectangular or other shapes to produce various limits on articulation and rotation. A single link may be provided with several alternatively usable holes, recesses and the like. The outer surface of a link can be provided with an axial extension engageable with a surface of an adjoining link to prevent back bending, or to prevent bending altogether.
    • 普遍关节的支撑护套包括互连的连接系列,每个连杆在一端具有凸形球形表面,在其相对端具有凹形球形表面。 凹凸表面彼此配合形成护套。 可以提供具有分支开口的特殊连接。 提供各种形式的防水密封件,包括O形圈,轴向压缩环,柔性带和球形表面上的脊。 连杆可以通过热膨胀装配在一起。 然而,还描述了轴向分离连杆,其包括两个部件,它们卡在一起。 分开的部件可以被模制成具有整体薄壁铰链的单元。 护套的弯曲特性和弯曲半径可以通过在选定位置处的连杆之间插入间隔件,或者通过将销插入设置在连杆中的径向孔中来改变。 可以使用具有舌头的间隔器来防止链节围绕护套轴线的旋转,同时允许单向铰接。 一对配对球面之一上的突起可以与矩形或其它形状的孔,槽或凹槽接合,以产生铰接和旋转的各种限制。 单个链节可以设置有多个可选择的可用孔,凹槽等。 连杆的外表面可以设置有可与邻接连杆的表面接合的轴向延伸部,以防止背部弯曲,或者完全防止弯曲。
    • 70. 发明授权
    • Method for forming patterns by using a high-current-density electron beam
    • 通过使用高电流密度电子束形成图案的方法
    • US4735881A
    • 1988-04-05
    • US883386
    • 1986-07-08
    • Koichi KobayashiHiroshi Yasuda
    • Koichi KobayashiHiroshi Yasuda
    • H01L21/027G03F7/20H01J37/302H01L21/00H01L21/30G03C5/00
    • H01J37/3026G03F7/2059Y10S430/143
    • A method incorporated in a high throughput EB lithography suitable to the fabrication of VLSI semiconductor circuit. The method comprises a step of providing patterns which are delineated to join together with an overlap determined in accordance with the time interval between the respective delineations thereof by using an electron beam having a high current density and/or high energy. When a first and a second patterns having respective edge portions contacting with each other are delineated in the order of the first pattern and the second pattern by respective exposures thereof to corresponding at least single shots of an electron beam, at least one of the first and second patterns is extended in the direction perpendicular to the edge portions so that the patterns are provided with an overlap with the amount determined in accordance with the time interval between the respective shots of the electron beam to said edge portions.
    • 一种并入适用于制造VLSI半导体电路的高通量EB光刻中的方法。 该方法包括以下步骤:通过使用具有高电流密度和/或高能量的电子束,提供被描绘成与根据其各自描绘之间的时间间隔确定的重叠的图案。 当具有彼此接触的相应边缘部分的第一和第二图案以第一图案和第二图案的顺序通过其相应的曝光被描绘到相应的至少单个电子束的照射时,第一和第二图案中的至少一个 第二图案在垂直于边缘部分的方向上延伸,使得图案设置有与根据电子束的各个镜头与所述边缘部分的各个镜头之间的时间间隔确定的量的重叠。