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61. 发明专利

JPS62297294A PRODUCTION OF BULK SEMICONDUCTOR OF EUTECTIC ALLOY WITH REGULAR STRUCTURE 失效
公开(公告)号：JPS62297294A
公开(公告)日：1987-12-24
申请号：JP13807886
申请日：1986-06-16
申请人： HITACHI LTD
发明人： SATO MAKOTO , FURUHATA YOSHIO , KAJIMURA TAKASHI , KUBOTA SHIGEO , KATO SHIGEO
IPC分类号： C30B21/02 , C30B29/52 , C30B30/08 , H01L21/18 , H01L21/208
摘要： PURPOSE:The thermal fluctuation is suppressed utilizing weightlessness to make hetero-junction semiconductors with a regular such as laminar or columnar structure. CONSTITUTION:For example, GaAs seed crystal 41, Ge seed crystal 42 and GaAs-Ge eutectic alloy 43 are sealed in a quartz vacuum ampoule. The ampoule is set in an electric oven 46 and heated so that the temperature at the conjunction part To exceeds 860 deg.C to melt GaAs seed crystal 41, Ge seed crystal 42 and GaAs-Ge eutectic alloy 43. Then, the inside of the ampoule is made weightless less than 10 G and cooled down by 10-20 deg.C/cm in the homogeneous melt of the eutectic alloy semiconductor at a cooling rate of 200-400 deg.C/min.

62. 发明专利

JPS6118615A Conveying apparatus 失效
标题翻译：输送装置
公开(公告)号：JPS6118615A
公开(公告)日：1986-01-27
申请号：JP13713684
申请日：1984-07-04
申请人： Hitachi Ltd
发明人： KUBOTA SHIGEO , KETSUSAKO MITSUNORI , SAITOU SAKAE , TAJIMA TAKESHI , NAKAZAWA HIDEO , HABU TOORU , MATSUO AKIHIKO , KANEKO YUTAKA , KAWAGUCHI KOUJI
IPC分类号： B65G17/00 , B65G35/04 , B65G47/64 , H01L21/67 , H01L21/677
CPC分类号： B65G35/04
摘要： PURPOSE:To freely convey a sample in any direction and to facilitate various kinds of processes by moving and guiding a flexible conveying belt having sample support means at the forward end thereof along a three-dimensional rails. CONSTITUTION:A conveying belt 11 is rolled round a coil bobbin 12 like a coil, and the conveying belt 11 is let out and taken up by the turning of a sprocket 13. The movement of the conveying belt 11 is guided by guide rails 16 to move a sample support table 15 where a sample 4 is placed, which is fixed to the forward end of the conveying belt 11. The moving route of the conveying belt 11 can be freely selected by feed direction switch rails 17 switched by a switching actuator 21. The guide rails 16 are formed in three-dimensions substantially C-shaped in section, so that the sample 4 can be set in a designated direction at a destination position.
摘要翻译：目的：通过沿着三维轨道移动和引导具有样品支撑装置的前端的柔性输送带，可以沿任何方向自由地传送样品并促进各种处理。构成：输送带11如线圈一样卷绕在线圈架12上，输送带11由于链轮13的转动而被排出并被吸收。输送带11的移动被导轨16引导到移动固定在输送带11的前端的样品4的样品支撑台15。输送带11的移动路径可以由切换致动器21切换的进给方向开关导轨17自由选择导轨16形成为三维大致C字形的截面，使得样品4能够在指定方向上设置在目的位置。

63. 发明专利

JPS612327A CONDUCTANCE VARIABLE VALVE OF SEMICONDUCTOR MANUFACTURING DEVICE 失效
公开(公告)号：JPS612327A
公开(公告)日：1986-01-08
申请号：JP12210284
申请日：1984-06-15
申请人： HITACHI LTD
发明人： MIYATA TOSHIMITSU , KUBOTA SHIGEO , MATSUO AKIHIKO , KONDOU YOSHIMASA , TAKAHASHI TOSHIO
IPC分类号： C23F4/00 , C23C16/44 , C23C16/455 , H01L21/205 , H01L21/302 , H01L21/3065
摘要： PURPOSE:To manufacture the titled valve with large variable ratio of conductance by a method wherein two rotary variable blades are fixed to be superposed while the space of opening formed by the variable blades is made almost proportional to the revolution of said variable blades. CONSTITUTION:Two rotary and variable blades 19 are fixed to the racks 21 in a valve case 20. The variable blades 19 are superposed by superposing parts 23. The space of opening 25 formed by the two variable blades 19 is made proportional to the revolution thereof. The racks 21 are respectively driven by independent driving devices engaged with the gears 22 of variable blades 19. Said space of opening 25 may be changed by shifting the racks 21 to keep the pressure in a reaction chamber 7 constant. Through these procedures, the pressure in reaction chamber 7 may be finely adjusted since the reaction of variable blades 19 and conductance may be made securely proportional to each other.

64. 发明专利

JPS59200863A Rotation introducing driving device 失效
标题翻译：旋转引导驱动装置
公开(公告)号：JPS59200863A
公开(公告)日：1984-11-14
申请号：JP7288683
申请日：1983-04-27
申请人： Hitachi Ltd
发明人： KUBOTA SHIGEO , YAMAGUCHI SUMIO
IPC分类号： H02K49/10 , F16H49/00
CPC分类号： F16H49/005
摘要： PURPOSE:To improve sealing and airtight properties by a method wheren a cup- shaped seal member, intercepting vacuum or special gas atmosphere, is provided in a gap between the stator and the rotor of a motor. CONSTITUTION:The cup-shaped thin seal member 30, intercepting the vacuum or special gas atmosphere, is provided in the gap between the stator 28 and the rotor 29 of the motor 27. The rotor 29 is rotated by the rotary magnetic field of the stator 28 and the rotating force thereof is taken out to an output shaft 31. According to this method, the electric rotating force may be introduced into an airtight chamber directly, therefore, the sealing and airtight properties may be improved remarkably.
摘要翻译：目的：通过在电机的定子和转子之间的间隙中提供杯形密封件，截断真空或特殊气体气氛的方法来提高密封和气密性能。构成：在定子28和电动机27的转子29之间的间隙中设置有截断真空或特殊气体气氛的杯状薄密封构件30.转子29由定子的旋转磁场并且其旋转力被输出到输出轴31.根据该方法，电旋转力可以直接引入气密室中，因此可以显着地改善密封和气密性能。

65. 发明专利

JPS59147289A Radiation detector 失效
标题翻译：辐射探测器
公开(公告)号：JPS59147289A
公开(公告)日：1984-08-23
申请号：JP1981283
申请日：1983-02-10
申请人： Hitachi Ltd , Hitachi Medical Corp
发明人： HAYAKAWA TAKAYUKI , FUJII HIDEJI , YOSHIDA MINORU , KUBOTA SHIGEO , KOIKE KOUICHI
IPC分类号： G01T1/20
CPC分类号： G01T1/20
摘要： PURPOSE:To minimize variations in the characteristic between detection elements with a higher grooving accuracy by photoetching to form grooves of a groove plate for fixing a partition plate and an electrode plate at a specified space. CONSTITUTION:A detector element is composed of a pair of groove plates 3 facing each other and electrode plates 1 and 2 or a partition plate 4. In the manufacture of the groove plates 3, a pattern is transferred onto a photosensitive glass and then, grooves formed thereon by an etching process. The electrode plates 1 and 2 or the partition plate 4 with a scintillator are inserted into the grooves and fixed with an adhesive.
摘要翻译：目的：通过光蚀刻来最小化检测元件之间的特性变化，以形成用于将隔板和电极板固定在特定空间的槽板的槽。构成：检测元件由一对面对面的槽板3和电极板1和2或隔板4组成。在制造槽板3时，将图案转印到感光玻璃上，然后将凹槽通过蚀刻工艺在其上形成。将电极板1和2或具有闪烁体的隔板4插入槽中并用粘合剂固定。

66. 发明专利

JPS5943684A Electronic camera device 失效
标题翻译：电子相机设备
公开(公告)号：JPS5943684A
公开(公告)日：1984-03-10
申请号：JP15390082
申请日：1982-09-06
申请人： Hitachi Ltd
发明人： IZUMIDA MORIJI , SATOU KAZUHIRO , MORIYAMA SHIGEO , KUBOTA SHIGEO , MATSUO AKIHIKO , KAJI TETSUNORI , OOTAKE MASATOSHI
IPC分类号： H04N5/225 , G11B27/28 , H04N5/78
CPC分类号： G11B27/28
摘要： PURPOSE:To reduce the access time of reproduction, by giving a synchronizing pattern and an address before and after a data and reproducing the data even if a tape runs reversely, in an electronic camera having a magnetic head. CONSTITUTION:A light through an optical lens 6 is fetched at an optical shutter 7, photoelectric-converted at an image pickup element 8, extracted at a one- frame extracting circuit 9 and inputted to a recording digital circuit 10. The input is A/D-converted and the synchronizing signal and the address are added. A synchronizing pattern 100 is given to the head of tracks T0-TN and an address 101 is given. A data 102 is provided after it. After the end of recording, a data 103 arranging the address 101 reversely is recorded and then the data arranging the synchronizing patterns 100 reversely is recorded. The reproduction of data is attained even if the tape is scanned reversely in this way.
摘要翻译：目的：通过在具有磁头的电子照相机中，即使在磁带反向运行时，通过给出数据和数据之前和之后的同步模式和地址来减少再现的访问时间。构成：通过光学透镜6的光被取出在光学快门7处，在图像拾取元件8处进行光电转换，在一帧提取电路9处提取并输入到记录数字电路10.输入是A / D转换，并添加同步信号和地址。将同步图案100赋予轨迹T0-TN的头部，给出地址101。之后提供数据102。在记录结束之后，记录地址101反向排列的数据103，然后记录反向排列同步图案100的数据。即使以这种方式反向扫描磁带，也可以获得数据的再现。

67. 发明专利

JPS58202532A Microwave plasma discharge tube 失效
标题翻译： MICROWAVE等离子放电管
公开(公告)号：JPS58202532A
公开(公告)日：1983-11-25
申请号：JP8477382
申请日：1982-05-21
申请人： Hitachi Ltd
发明人： KUBOTA SHIGEO , SUZUKI KEIZOU , KONDOU YOSHIMASA , MIYATA TOSHIMITSU , TAKAHASHI TOSHIO , NINOMIYA TAKESHI , NISHIMATSU SHIGERU
IPC分类号： H01L21/302 , C23F4/00 , H01J37/32 , H01L21/3065
CPC分类号： H01J37/32357
摘要： PURPOSE:To contrive to improve the property of fineness of etching by microwave discharge plasma and the etching speed, by providing a gas inlet to a discharge tube. CONSTITUTION:A gas introduction pipe 13 is provided to the discharge tube 12. A plasma discharge region 14 has an electric field impressed by a solenoid coil 15 and a permanent magnet 17 provided under a sample base 16. The shape of this electric field is that of a Miller electric field. Active reaction gas is passed through the gas introduction pipe 13 provided to the discharge tube 12 via a leak valve 11 and supplied to the region 14. When the microwave power is supplied to the region 14 thereat, the discharge starts.
摘要翻译：目的：通过向放电管提供气体入口，旨在通过微波放电等离子体和蚀刻速度来提高蚀刻细度的性质。构成：在放电管12上设置有气体导入管13.等离子体放电区域14具有由螺线管线圈15施加的电场和设置在试样基体16的下方的永磁体17.该电场的形状为的米勒电场。活性反应气体经由泄漏阀11通过设置在排出管12上的气体导入管13，供给到区域14.当微波功率被供给到该区域14时，开始放电。

68. 发明专利

JPS51124383A PRECISION PLANE SHIFT MECHANISM 失效
公开(公告)号：JPS51124383A
公开(公告)日：1976-10-29
申请号：JP4867175
申请日：1975-04-23
申请人： HITACHI LTD
发明人： KUBOTA SHIGEO , MORITA OSAMU
IPC分类号： G03B27/32 , B23Q1/00 , B23Q1/36 , B23Q1/62 , B23Q3/00 , G03F9/00 , H01L21/027 , H01L21/30 , H01L21/68
摘要： PURPOSE:To easily obtain a surface shift of a flatness which is less than the lightwave length by tracing an optically flat plate which has a simple shape for easy processing.

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