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    • 64. 发明授权
    • MOS transistor with laser-patterned metal gate, and method for making the same
    • 具有激光图案化金属栅极的MOS晶体管及其制造方法
    • US08461628B2
    • 2013-06-11
    • US11203563
    • 2005-08-11
    • Criswell ChoiJoerg RockenbergerJ. Devin MacKenzieChristopher Gudeman
    • Criswell ChoiJoerg RockenbergerJ. Devin MacKenzieChristopher Gudeman
    • H01L29/66H01L21/336H01L21/8234H01L29/772
    • H01L21/32131H01L21/28123H01L21/84H01L27/1292H01L29/66757
    • A MOS transistor with a laser-patterned metal gate, and methods for its manufacture. The method generally includes forming a layer of metal-containing material on a dielectric film, wherein the dielectric film is on an electrically functional substrate comprising an inorganic semiconductor; laser patterning a metal gate from the metal-containing material layer; and forming source and drain terminals in the inorganic semiconductor in locations adjacent to the metal gate. The transistor generally includes an electrically functional substrate; a dielectric film on at least portions of the electrically functional substrate; a laser patterned metal gate on the dielectric film; and source and drain terminals comprising a doped inorganic semiconductor layer adjacent to the metal gate. The present invention advantageously provides MOS thin film transistors having reliable electrical characteristics quickly, efficiently, and/or at a low cost by eliminating one or more conventional photolithographic steps.
    • 具有激光图案化金属栅极的MOS晶体管及其制造方法。 该方法通常包括在电介质膜上形成含金属材料层,其中电介质膜位于包含无机半导体的电功能基底上; 激光从含金属材料层图案化金属栅极; 以及在与金属栅极相邻的位置的无机半导体中形成源极和漏极端子。 晶体管通常包括电功能基板; 在所述电功能基板的至少一部分上的介电膜; 电介质膜上的激光图案化金属栅极; 源极和漏极端子包括与金属栅极相邻的掺杂的无机半导体层。 本发明有利地通过消除一个或多个常规光刻步骤来快速,有效地和/或以低成本提供具有可靠电特性的MOS薄膜晶体管。
    • 68. 发明授权
    • Doped polysilanes, compositions containing the same, methods for making the same, and films formed therefrom
    • 掺杂的聚硅烷,含有它们的组合物,其制备方法和由其形成的膜
    • US07951892B1
    • 2011-05-31
    • US11249167
    • 2005-10-11
    • Wenzhuo GuoVladimir K. DioumaevJoerg Rockenberger
    • Wenzhuo GuoVladimir K. DioumaevJoerg Rockenberger
    • C08G77/00
    • C07F7/0896C08G77/60C08L83/16
    • Doped polysilanes, inks containing the same, and methods for their preparation and use are disclosed. The doped polysilane generally has the formula H-[AaHb(DRx)m]q-[(AcHdR1e)n]p—H, where each instance of A is independently Si or Ge, and D is B, P, As or Sb. In preferred embodiments, R is H, -AfHf+1R2f, alkyl, aryl or substituted aryl, and R1 is independently H, halogen, aryl or substituted aryl. In one aspect, the method of making a doped poly(aryl)silane generally includes the steps of combining a doped silane of the formula AaHb+2(DRx)m (optionally further including a silane of the formula AcHd+2R1e) with a catalyst of the formula R4wR5yMXz (or an immobilized derivative thereof) to form a doped poly(aryl)silane, then removing the metal M. In another aspect, the method of making a doped polysilane includes the steps of halogenating a doped polyarylsilane, and reducing the doped halopolysilane with a metal hydride to form the doped polysilane. The synthesis of semiconductor inks via dehydrocoupling of doped silanes and/or germanes allows for tuning of the ink properties (e.g., viscosity, boiling point, surface tension and dopant level or concentration) and for deposition of doped silicon films or islands by spincoating, inkjetting, dropcasting, etc., with or without the use of UV irradiation.
    • 公开了掺杂聚硅烷,含有它们的油墨及其制备和使用方法。 掺杂的聚硅烷通常具有式H [AaHb(DRx)m] q - [(AcHdR1e)n] p-H,其中A的每个实例独立地为Si或Ge,D为B,P,As或Sb。 在优选的实施方案中,R是H,-AfHf + 1R2f,烷基,芳基或取代的芳基,R1独立地是H,卤素,芳基或取代的芳基。 一方面,制备掺杂的聚(芳基)硅烷的方法通常包括将式AaHb + 2(DRx)m的掺杂硅烷(任选进一步包括式AcHd + 2R1e的硅烷)与催化剂 (或其固定化的衍生物)以形成掺杂的聚(芳基)硅烷,然后除去金属M.另一方面,制备掺杂聚硅烷的方法包括以下步骤:卤化掺杂的聚芳基硅烷,并将 掺杂的卤代聚硅烷与金属氢化物反应形成掺杂的聚硅烷。 通过掺杂硅烷和/或锗烷的脱氢键合合半导体油墨允许调节油墨性能(例如粘度,沸点,表面张力和掺杂剂水平或浓度),以及通过旋涂,喷墨来沉积掺杂的硅膜或岛 ,放映等,有或没有使用紫外线照射。