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    • 63. 发明授权
    • Method of manufacturing a magnetic head having short pole yoke length
    • 具有短磁轭长度的磁头的制造方法
    • US07322097B2
    • 2008-01-29
    • US10758428
    • 2004-01-16
    • Richard HsiaoEdward Hin Pong Lee
    • Richard HsiaoEdward Hin Pong Lee
    • G11B5/17G11B5/187
    • G11B5/3133G11B5/3163Y10T29/49021Y10T29/49032Y10T29/49043Y10T29/4906Y10T29/49062
    • The induction coil of the magnetic head of the present invention is fabricated in a patterned electrical insulation material, preferably utilizing reactive ion etch (RIE) techniques. The electrical insulation material is particularly patterned such that it is formed away from the ABS surface and in the location of the induction coil. A fill layer is deposited around the patterned electrical insulation material layer, such that the fill layer is disposed at the ABS surface. In a preferred embodiment, the patterned electrical insulation material is initially fabricated from hard baked photoresist and subsequent to the deposition of the fill layer the hard baked photoresist material is removed and replaced by SiO2. The SiO2 is thereby located away from the ABS surface and the induction coil is subsequently fabricated within the SiO2 material.
    • 本发明的磁头的感应线圈以图案化的电绝缘材料制成,优选利用反应离子蚀刻(RIE)技术。 电绝缘材料被特别图案化,使得其形成为远离ABS表面并且在感应线圈的位置。 填充层沉积在图案化的电绝缘材料层周围,使得填充层设置在ABS表面。 在优选实施例中,图案化电绝缘材料最初由硬烘焙光致抗蚀剂制造,并且在沉积填充层之后,去除硬烘烤的光致抗蚀剂材料并用SiO 2替代。 因此,SiO 2 2位于离开ABS表面的位置,随后在SiO 2材料内制造感应线圈。
    • 64. 发明申请
    • Damascene coil design for a perpendicular magnetic recording head
    • 大马士革线圈设计用于垂直磁记录头
    • US20080002290A1
    • 2008-01-03
    • US11478925
    • 2006-06-30
    • Donald G. AllenEdward Hin Pong LeeJennifer Ai-Ming Loo
    • Donald G. AllenEdward Hin Pong LeeJennifer Ai-Ming Loo
    • G11B5/17
    • G11B5/1278G11B5/3123G11B5/3163
    • A magnetic recording head for use in perpendicular magnetic recording having a design that allows the write coil to be manufactured by a damascene process for increased coil pitch and reduced coil resistance. The magnetic write head includes a photoresist dam structure that allows a hard baked photoresist to be formed that does not extend to the air bearing surface (ABS). Since the photoresist dam prevents the hard baked photoresist from reaching the ABS, the a damascene process, in which the hard baked photoresist remains in the finished write head, can be used to produce the write head. The use of such a damascene process advantageously allows the space between the coil turns to be reduced, which maximizes the number of turns that can be used and also maximizes the number width to which the coil turns can be constructed, thereby minimizing the electrical resistance of the write coil.
    • 一种用于垂直磁记录的磁记录头,其具有允许通过镶嵌工艺制造写入线圈以增加线圈间距并减小线圈电阻的设计。 磁写头包括光致抗蚀剂阻挡结构,其允许形成不延伸到空气轴承表面(ABS)的硬烘烤光致抗蚀剂。 由于光致抗蚀剂防止了硬烘烤的光致抗蚀剂到达ABS,所以可以使用其中硬烘烤的光致抗蚀剂保留在完成的写入头中的镶嵌工艺来产生写入头。 使用这种镶嵌工艺有利地减小了线圈匝之间的空间,这使得可以使用的匝数最大化,并且还使构造线圈匝数的数量最大化,从而最小化电阻 写线圈。