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    • 69. 发明授权
    • Deformable mirror device and apparatus for observing retina of eye
    • 用于观察眼睛视网膜的可变形镜装置和装置
    • US07604353B2
    • 2009-10-20
    • US11958725
    • 2007-12-18
    • Akihiro KogaMasayuki SekimuraKei MasunishiAkio KobayashiHiroyuki KawashimaHirotake Maruyama
    • Akihiro KogaMasayuki SekimuraKei MasunishiAkio KobayashiHiroyuki KawashimaHirotake Maruyama
    • A61B3/10G02B7/188G02B26/00
    • A61B3/12G02B26/0825
    • It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.
    • 可以改善“生成力(负载) - 偏转特性”的变化。 可变形反射镜装置包括:基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件,其设置在所述间隔件上方,并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜,其以间隔形成为与所述电极相对的方式设置,以覆盖所述开口,并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分,并且支撑部件设置在基板上,夹着电极膜,第一绝缘膜和间隔物。