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    • 1. 发明授权
    • Deformable mirror device and apparatus for observing retina of eye
    • 用于观察眼睛视网膜的可变形镜装置和装置
    • US07604353B2
    • 2009-10-20
    • US11958725
    • 2007-12-18
    • Akihiro KogaMasayuki SekimuraKei MasunishiAkio KobayashiHiroyuki KawashimaHirotake Maruyama
    • Akihiro KogaMasayuki SekimuraKei MasunishiAkio KobayashiHiroyuki KawashimaHirotake Maruyama
    • A61B3/10G02B7/188G02B26/00
    • A61B3/12G02B26/0825
    • It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.
    • 可以改善“生成力(负载) - 偏转特性”的变化。 可变形反射镜装置包括:基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件,其设置在所述间隔件上方,并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜,其以间隔形成为与所述电极相对的方式设置,以覆盖所述开口,并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分,并且支撑部件设置在基板上,夹着电极膜,第一绝缘膜和间隔物。
    • 3. 发明申请
    • DEFORMABLE MIRROR DEVICE AND APPARATUS FOR OBSERVING RETINA OF EYE
    • 眼镜镜片可视化装置及观察装置
    • US20080180634A1
    • 2008-07-31
    • US11958725
    • 2007-12-18
    • Akihiro KogaMasayuki SekimuraKei MasunishiAkio KobayashiHiroyuki KawashimaHirotake Maruyama
    • Akihiro KogaMasayuki SekimuraKei MasunishiAkio KobayashiHiroyuki KawashimaHirotake Maruyama
    • A61B3/10G02B7/188
    • A61B3/12G02B26/0825
    • It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.
    • 可以改善“生成力(负载) - 偏转特性”的变化。 可变形反射镜装置包括:基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件,其设置在所述间隔件上方,并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜,其以间隔形成为与所述电极相对的方式设置,以覆盖所述开口,并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分,并且支撑部件设置在基板上,夹着电极膜,第一绝缘膜和间隔物。
    • 4. 发明申请
    • DEFORMABLE MIRROR APPARATUS
    • 可变形镜子装置
    • US20080239528A1
    • 2008-10-02
    • US12032871
    • 2008-02-18
    • Kei MasunishiAkihiro KogaRyo FurukawaTetsuya KugimiyaAkio KobayashiHiroyuki Kawashima
    • Kei MasunishiAkihiro KogaRyo FurukawaTetsuya KugimiyaAkio KobayashiHiroyuki Kawashima
    • G02B26/00
    • G02B26/0825
    • It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.
    • 可以提供可变形为复杂形状(高阶形状)的可变形反射镜装置。 可变形反射镜装置包括:基板; 设置在所述基板上的多个电极; 固定在所述基板上方的间隔件,具有第一开口,所述第一开口从所述间隔件的面向所述基板的第一面穿过所述间隔件的与所述第一面相反的第二面,所述第二面围绕所述电极,并且在所述第二面上具有台阶 ; 驱动部,其具有设置成覆盖所述间隔件的台阶并且与所述电极相对的膜部;壳体部,其在所述膜部露出并支撑所述膜部的底面具有开口部, 以及设置在所述膜部上的反射膜; 以及电压发生器,其被配置为分别在所述电极上产生预定的电压图案。
    • 6. 发明授权
    • Deformable mirror apparatus
    • 可变形镜装置
    • US07682030B2
    • 2010-03-23
    • US12032871
    • 2008-02-18
    • Kei MasunishiAkihiro KogaRyo FurukawaTetsuya KugimiyaAkio KobayashiHiroyuki Kawashima
    • Kei MasunishiAkihiro KogaRyo FurukawaTetsuya KugimiyaAkio KobayashiHiroyuki Kawashima
    • G02B7/188G02B26/00G02B26/08
    • G02B26/0825
    • It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.
    • 可以提供可变形为复杂形状(高阶形状)的可变形反射镜装置。 可变形反射镜装置包括:基板; 设置在所述基板上的多个电极; 固定在所述基板上方的间隔件,具有第一开口,所述第一开口从所述间隔件的面向所述基板的第一面穿过所述间隔件的与所述第一面相反的第二面,所述第二面围绕所述电极,并且在所述第二面上具有台阶 ; 驱动部,其具有设置成覆盖所述间隔件的台阶并且与所述电极相对的膜部;壳体部,其在所述膜部露出并支撑所述膜部的底面具有开口部, 以及设置在所述膜部上的反射膜; 以及电压发生器,其被配置为分别在所述电极上产生预定的电压图案。
    • 7. 发明授权
    • Deformable mirror device and apparatus for observing retina of eye using the same
    • 可变形镜装置及使用其的眼睛视网膜观察装置
    • US07744220B2
    • 2010-06-29
    • US12186142
    • 2008-08-05
    • Kei MasunishiAkihiro KogaRyo FurukawaOsamu NishimuraAkio KobayashiHiroyuki Kawashima
    • Kei MasunishiAkihiro KogaRyo FurukawaOsamu NishimuraAkio KobayashiHiroyuki Kawashima
    • A61B3/10G02B26/00G02B5/08
    • G02B26/0825A61B3/10
    • A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; and a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening. The electrodes are electrically insulated each other by a plurality of grooves radially extending from a region which includes a position corresponding to a center of the opening.
    • 可变形反射镜装置包括:基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件,设置在所述间隔件上方,并且具有从所述支撑构件的面向所述基板的第一面穿过到与所述第一面相对的所述支撑构件的第二面的开口; 可变电极膜,形成在所述支撑构件的所述第一面的下方,以与所述电极相对并且覆盖所述开口; 设置在所述可变形电极膜和所述支撑构件之间的绝缘膜; 以及反射膜,设置在与电极相对的可变形电极膜的表面上以与开口重叠。 电极通过从包括与开口的中心对应的位置的区域径向延伸的多个槽电绝缘。
    • 9. 发明授权
    • Actuator
    • 执行器
    • US08873218B2
    • 2014-10-28
    • US13070250
    • 2011-03-23
    • Kei MasunishiTamio IkehashiYasushi TomizawaAkihiro Koga
    • Kei MasunishiTamio IkehashiYasushi TomizawaAkihiro Koga
    • H01G5/00H01G4/005H01H59/00H01G5/18
    • H01H59/0009H01G5/18
    • According to one embodiment, an actuator includes a substrate, a lower electrode disposed on the substrate, an upper electrode, a support and a driving unit. The upper electrode is opposed to the lower electrode. The support supports the upper electrode. The driving unit is connected between the lower electrode and the upper electrode and feeds a driving voltage. The driving voltage at which the lower and upper electrodes start to come into contact with each other is defined as a pull-in voltage. A capacitance between the lower and upper electrodes is defined as a pull-in capacitance. There exist a first region and a second region. In the second region, a change rate of a capacitance ratio changes more slowly than in the first region, when the absolute value of the potential difference is further increased. The driving unit feeds the driving voltage in the second region.
    • 根据一个实施例,致动器包括基板,设置在基板上的下电极,上电极,支架和驱动单元。 上电极与下电极相对。 支撑件支撑上电极。 驱动单元连接在下电极和上电极之间,并提供驱动电压。 下电极和上电极彼此接触的驱动电压被定义为引入电压。 下电极和上电极之间的电容被定义为引入电容。 存在第一区域和第二区域。 在第二区域中,当电位差的绝对值进一步增加时,电容比的变化率比第一区域变化更慢。 驱动单元在第二区域中馈送驱动电压。