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61. 发明授权

US07378029B2 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US07378029B2
公开(公告)日：2008-05-27
申请号：US11059487
申请日：2005-02-17
申请人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
发明人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
IPC分类号： G11B3/70
CPC分类号： G11B5/855 , G11B5/851 , H01F41/32
摘要： A method for manufacturing a magnetic recording medium is provided, by which a magnetic recording medium having a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and high recording and reproducing precision is efficiently manufactured. In a non-magnetic material filling step, a non-magnetic material is deposited over a recording layer formed in a predetermined concavo-convex pattern over a substrate to fill concave portions of the concavo-convex pattern with the non-magnetic material. In a flattening step, an excess part of the non-magnetic material above the recording layer is removed by dry etching, to flatten surfaces of the recording layer and the non-magnetic material. Processing conditions are set so as to substantially equalize an etching rate of the non-magnetic material with an etching rate of the recording layer with respect to the dry etching in the flattening step.
摘要翻译：提供了一种用于制造磁记录介质的方法，通过该方法，有效地制造具有以凹凸图案形成的记录层，足够平坦表面和高记录和再现精度的磁记录介质。在非磁性材料填充步骤中，非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，以用非磁性材料填充凹凸图案的凹部。在平坦化步骤中，通过干蚀刻除去记录层上方的非磁性材料的过量部分，使记录层和非磁性材料的表面平坦化。设定处理条件，以便在平坦化步骤中，相对于干蚀刻，记录层的蚀刻速率基本上使非磁性材料的蚀刻速率相等。

62. 发明授权

US07362528B2 Magnetic recording medium 失效
标题翻译：磁记录介质
公开(公告)号：US07362528B2
公开(公告)日：2008-04-22
申请号：US10998594
申请日：2004-11-30
申请人： Makoto Moriya , Takahiro Suwa
发明人： Makoto Moriya , Takahiro Suwa
IPC分类号： G11B5/09
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/5965 , G11B5/74 , G11B5/743 , G11B5/82
摘要： A data track area and a servo pattern area are formed on a magnetic recording medium by embedding a nonmagnetic material inside concaves in a plurality of types of convex/concave patterns formed of a magnetic material on a substrate. The servo pattern area includes a plurality of types of first functional areas, in which control signals for disk access are recorded during manufacturing using the convex/concave patterns, and a second functional area, in which a convex/concave pattern of a different type to the convex/concave patterns of the respective first functional areas is formed and in which the nonmagnetic material is embedded so that an average height within the second functional area is substantially equal to an average height in the data track area.
摘要翻译：在磁记录介质上形成数据磁道区域和伺服图案区域，通过在基板上由磁性材料形成的多种类型的凸/凹图形嵌入凹陷内的非磁性材料。伺服图案区域包括多个类型的第一功能区域，其中在使用凸/凹图案的制造期间记录用于盘访问的控制信号，以及第二功能区域，其中不同类型的凸/凹图案形成各个第一功能区域的凸/凹图案，并且嵌入非磁性材料，使得第二功能区域内的平均高度基本上等于数据轨道区域中的平均高度。

63. 发明授权

US07300595B2 Method for filling concave portions of concavo-convex pattern and method for manufacturing magnetic recording medium 失效
标题翻译：填充凹凸图案的凹部的方法和制造磁记录介质的方法
公开(公告)号：US07300595B2
公开(公告)日：2007-11-27
申请号：US11015670
申请日：2004-12-20
申请人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
发明人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
IPC分类号： B44C1/22
CPC分类号： G11B5/855
摘要： A method for filling concave portions of a concavo-convex pattern by which the concave portions of the concavo-convex pattern can be filled to flatten the surface with reliability, and a method for manufacturing a magnetic recording medium by which a magnetic recording medium having a magnetic recording layer of concavo-convex pattern with a sufficiently flat surface can be manufactured efficiently. A filler for filling the concave portions is deposited over the surface of an object to be processed, the object being provided with a concavo-convex pattern. A cladding is further deposited over the filler. Then, an excess part of the filler and the cladding above the surface of the object are removed for flattening, by using a dry etching method having a lower etching rate to the cladding than to the filler.
摘要翻译：用于填充凹凸图案的凹部的方法，通过该凹凸图案填充凹凸图案的凹部以可靠地使表面平坦化的方法，以及制造磁记录介质的方法，通过该方法具有可以有效地制造具有足够平坦表面的凹凸图案的磁记录层。用于填充凹部的填充剂沉积在待处理物体的表面上，该物体具有凹凸图案。在填料上进一步沉积包层。然后，通过使用对填料具有较低蚀刻速率的干式蚀刻方法，除去填充物的多余部分和物体表面上方的包层以进行平坦化。

64. 发明授权

US07223439B2 Method for manufacturing magnetic recording medium and magnetic recording medium 失效
标题翻译：磁记录介质和磁记录介质的制造方法
公开(公告)号：US07223439B2
公开(公告)日：2007-05-29
申请号：US10805434
申请日：2004-03-22
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori
IPC分类号： B05D5/12
CPC分类号： G11B5/855 , G11B5/8408
摘要： A magnetic recording medium and a method for manufacturing the same are provided, which provide high surface recording density and high recording/reading performance. The magnetic recording medium is manufactured by forming an intermediate protective layer between a continuous recording layer and a first mask layer, dividing the continuous recording layer to form divided recording elements, and then removing the first mask layer while leaving the intermediate protective layer on the top of the divided recording elements. Further, gaps between the divided recording elements are filled with a non-magnetic material before removing the first mask layer.
摘要翻译：提供一种提供高表面记录密度和高记录/读取性能的磁记录介质及其制造方法。通过在连续记录层和第一掩模层之间形成中间保护层，分割连续记录层以形成分割的记录元件，然后在将中间保护层留在顶部的同时除去第一掩模层来制造磁记录介质的分割记录元素。此外，在去除第一掩模层之前，用非磁性材料填充划分的记录元件之间的间隙。

65. 发明授权

US07166318B2 Production method and production apparatus for magnetic recording medium 失效
标题翻译：磁记录介质的制造方法和制造装置
公开(公告)号：US07166318B2
公开(公告)日：2007-01-23
申请号：US10791712
申请日：2004-03-04
申请人： Kazuhiro Hattori , Mitsuru Takai , Takahiro Suwa
发明人： Kazuhiro Hattori , Mitsuru Takai , Takahiro Suwa
IPC分类号： B05D5/12
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/74 , G11B5/743 , G11B5/851 , G11B11/10582
摘要： A production method and a production apparatus for a magnetic recording medium, which enable the efficient production of a discrete type magnetic recording medium, while reliably preventing any deterioration of the partitioned recording elements. The magnetic recording medium production apparatus includes: recording layer processing device, which by forming a plurality of grooves, with a spacing therebetween in a planar direction, in an intermediate product of a magnetic recording medium comprising a continuous recording layer, partitions the continuous recording layer into a plurality of partitioned recording elements; non-magnetic body filling device for filling the grooves between the partitioned recording elements with a non-magnetic body; smoothing device for smoothing the surface of the partitioned recording elements and the non-magnetic body; protective layer formation device for forming a protective layer on the partitioned recording elements and the non-magnetic body; and vacuum retention device which houses the recording layer processing device, the non-magnetic body filling device, the smoothing device, and the protective layer formation device, and maintains the environment surrounding the intermediate product in a state of vacuum.
摘要翻译：一种用于磁记录介质的制造方法和制造装置，其能够有效地生产离散型磁记录介质，同时可靠地防止分隔的记录元件的任何劣化。磁记录介质制造装置包括：记录层处理装置，其在包括连续记录层的磁记录介质的中间产物中，在平面方向上以间隔形成多个凹槽，分隔连续记录层分成多个划分的记录元件; 非磁性体填充装置，用于用非磁性体填充分隔的记录元件之间的凹槽; 平滑装置，用于使划分的记录元件和非磁性体的表面平滑; 用于在分隔的记录元件和非磁性体上形成保护层的保护层形成装置; 以及容纳记录层处理装置，非磁性体填充装置，平滑装置和保护层形成装置的真空保持装置，并且在真空状态下保持围绕中间产品的环境。

66. 发明申请

US20060183004A1 Magnetic recording medium, magnetic recording and reproducing apparatus, and manufacturing method of magnetic recording medium 失效
标题翻译：磁记录介质，磁记录和重放装置以及磁记录介质的制造方法
公开(公告)号：US20060183004A1
公开(公告)日：2006-08-17
申请号：US11352376
申请日：2006-02-13
申请人： Kazuhiro Hattori , Takahiro Suwa
发明人： Kazuhiro Hattori , Takahiro Suwa
IPC分类号： G11B5/187 , G11B5/127 , H05K3/02 , G11B5/65
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49155
摘要： A magnetic recording medium is provided which includes a recording layer formed in a concavo-convex pattern including recording elements formed as convex portions, provides a good flying performance of a magnetic head, and has high reliability. A magnetic recording and reproducing apparatus including that magnetic recording medium and a manufacturing method of that magnetic recording medium are also provided. The magnetic recording medium includes: the recording layer formed in a predetermined concavo-convex pattern over a substrate, the recording elements being formed as convex portions of the concavo-convex pattern; filling elements with which concave portions between the recording elements are filled; a conductive film which has a smaller electric resistivity than the filling elements and is formed over the filling elements; and a protective layer which covers the recording elements and the filling elements and is in contact with an upper surface of the conductive film.
摘要翻译：提供一种磁记录介质，其包括形成为凹凸图案的记录层，其包括形成为凸部的记录元件，提供了良好的磁头飞行性能，并且具有高可靠性。还提供了包括该磁记录介质和该磁记录介质的制造方法的磁记录和重放装置。磁记录介质包括：在衬底上以预定的凹凸图案形成的记录层，记录元件形成为凹凸图案的凸部; 用于填充记录元件之间的凹部的填充元件; 导电膜，其具有比填充元件更小的电阻率，并形成在填充元件上; 以及覆盖记录元件和填充元件并与导电膜的上表面接触的保护层。

67. 发明申请

US20060062135A1 Information recording medium, recording/reproducing apparatus, and stamper 失效
标题翻译：信息记录介质，记录/再现装置和压模
公开(公告)号：US20060062135A1
公开(公告)日：2006-03-23
申请号：US11214813
申请日：2005-08-31
申请人： Yoshikazu Soeno , Takahiro Suwa
发明人： Yoshikazu Soeno , Takahiro Suwa
IPC分类号： G11B7/24
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/743 , G11B5/82
摘要： On an information recording medium, a data track pattern and a servo pattern composed of a concave/convex pattern including a plurality of convex parts are formed on at least one surface of a substrate and respective concave parts in the concave/convex pattern are filled with non-magnetic material. In the concave/convex pattern that constructs the servo pattern, a unit convex part length along a direction of rotation of the substrate and a unit concave part length along the direction of rotation are set so that the ratio of the unit convex part length to the unit concave part length decreases from an inner periphery to an outer periphery of the information recording medium.
摘要翻译：在信息记录介质上，在基板的至少一个表面上形成数据轨道图案和由包括多个凸部的凹凸图案构成的伺服图案，并且凹凸图案中的各个凹部填充有非磁性材料。在构成伺服图案的凹凸图案中，沿着基板的旋转方向的单位凸部长度和沿着旋转方向的单位凹部长度被设定为使得单位凸部长度与单位凹部长度从信息记录介质的内周向外周减小。

68. 发明申请

US20050196650A1 Magnetic recording medium 失效
标题翻译：磁记录介质
公开(公告)号：US20050196650A1
公开(公告)日：2005-09-08
申请号：US11065142
申请日：2005-02-24
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
IPC分类号： G11B5/65 , G11B5/82
CPC分类号： G11B5/855 , Y10T428/24355 , Y10T428/24479 , Y10T428/24488 , Y10T428/24537 , Y10T428/2457
摘要： A magnetic recording medium includes at least a disk substrate 1, a magnetic recording layer 5 formed with a predetermined concavo-convex pattern on the disk substrate 1, and a non-magnetic layer 6 formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer 5 or the non-magnetic layer 6. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width (W1 or W2) is made smaller than width W5 of each convex portion of the magnetic recording layer 5 or width W6 of each concave portion where the non-magnetic layer 6 is formed.
摘要翻译：磁记录介质至少包括盘基板1，在盘基板1上形成有预定的凹凸图案的磁记录层5以及形成在凹凸图案的凹部中的非磁性层6。在磁记录层5或非磁性层6上形成由非磁性材料形成的凸形。每个凸形形成为例如上表面宽度（W 1或W 2）的山形）被制成小于磁记录层5的每个凸部的宽度W 5或形成非磁性层6的每个凹部的宽度W 6。

69. 发明申请

US20050186357A1 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US20050186357A1
公开(公告)日：2005-08-25
申请号：US11059487
申请日：2005-02-17
申请人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
发明人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
IPC分类号： G11B5/84 , G11B5/851 , G11B5/855 , H01F1/00 , H01F41/32
CPC分类号： G11B5/855 , G11B5/851 , H01F41/32
摘要： A method for manufacturing a magnetic recording medium is provided, by which a magnetic recording medium having a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and high recording and reproducing precision is efficiently manufactured. In a non-magnetic material filling step, a non-magnetic material is deposited over a recording layer formed in a predetermined concavo-convex pattern over a substrate to fill concave portions of the concavo-convex pattern with the non-magnetic material. In a flattening step, an excess part of the non-magnetic material above the recording layer is removed by dry etching, to flatten surfaces of the recording layer and the non-magnetic material. Processing conditions are set so as to substantially equalize an etching rate of the non-magnetic material with an etching rate of the recording layer with respect to the dry etching in the flattening step.
摘要翻译：提供了一种用于制造磁记录介质的方法，通过该方法，有效地制造具有以凹凸图案形成的记录层，足够平坦表面和高记录和再现精度的磁记录介质。在非磁性材料填充步骤中，非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，以用非磁性材料填充凹凸图案的凹部。在平坦化步骤中，通过干蚀刻除去记录层上方的非磁性材料的过量部分，使记录层和非磁性材料的表面平坦化。设定处理条件，以便在平坦化步骤中，相对于干蚀刻，记录层的蚀刻速率基本上使非磁性材料的蚀刻速率相等。

70. 发明申请

US20050086795A1 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US20050086795A1
公开(公告)日：2005-04-28
申请号：US10972325
申请日：2004-10-26
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： G11B5/127 , G11B5/84 , G11B5/855
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
摘要翻译：一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率用于形成较低的非磁性膜。

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