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61. 发明授权

US07487661B2 Sensor having free fall self-test capability and method therefor 失效
标题翻译：传感器具有自由落体自检能力及其方法
公开(公告)号：US07487661B2
公开(公告)日：2009-02-10
申请号：US11580419
申请日：2006-10-11
申请人： Akihiro Ueda , Andrew C. McNeil
发明人： Akihiro Ueda , Andrew C. McNeil
IPC分类号： G01P15/125 , G01P21/00
CPC分类号： G01P21/00 , G01P15/0891 , G01P15/125 , G01P15/18 , G01P2015/082 , G01P2015/0831 , G11B19/043
摘要： A transducer (20) includes a movable element (24), a self-test actuator (22), and a sensing element (56, 58). The sensing element (56, 58) detects movement of the movable element (24) from a first position (96) to a second position (102) along an axis perpendicular to a plane of the sensing element (56, 58). The second position (102) results in an output signal (82) that simulates a free fall condition. A method (92) for testing a protection feature of a device (70) having the transducer (20) entails moving the movable element (24) to the first position (102) to produce a negative gravitational force detectable at the sensing element (56, 68), applying a signal (88) to the actuator (22) to move the movable element (24) to the second position (102) by the electrostatic force (100) , and ascertaining an enablement of the protection feature in response to the simulated free fall.
摘要翻译：传感器（20）包括可移动元件（24），自检致动器（22）和感测元件（56,58）。感测元件（56,58）沿着垂直于感测元件（56,58）的平面的轴线检测可动元件（24）从第一位置（96）到第二位置（102）的移动。第二位置（102）产生模拟自由落体状态的输出信号（82）。用于测试具有换能器（20）的装置（70）的保护特征的方法（92）需要将可移动元件（24）移动到第一位置（102）以产生在感测元件（56）处可检测到的负重力，68），通过静电力（100）将信号（88）施加到致动器（22）以将可移动元件（24）移动到第二位置（102），并且确定响应于模拟自由落体。

62. 发明申请

US20080087085A1 Sensor having free fall self-test capability and method therefor 失效
标题翻译：传感器具有自由落体自检能力及其方法
公开(公告)号：US20080087085A1
公开(公告)日：2008-04-17
申请号：US11580419
申请日：2006-10-11
申请人： Akihiro Ueda , Andrew C. McNeil
发明人： Akihiro Ueda , Andrew C. McNeil
IPC分类号： G01P15/125
CPC分类号： G01P21/00 , G01P15/0891 , G01P15/125 , G01P15/18 , G01P2015/082 , G01P2015/0831 , G11B19/043
摘要： A transducer (20) includes a movable element (24), a self-test actuator (22), and a sensing element (56, 58). The sensing element (56, 58) detects movement of the movable element (24) from a first position (96) to a second position (102) along an axis perpendicular to a plane of the sensing element (56, 58). The second position (102) results in an output signal (82) that simulates a free fall condition. A method (92) for testing a protection feature of a device (70) having the transducer (20) entails moving the movable element (24) to the first position (102) to produce a negative gravitational force detectable at the sensing element (56, 68), applying a signal (88) to the actuator (22) to move the movable element (24) to the second position (102) by the electrostatic force (100) , and ascertaining an enablement of the protection feature in response to the simulated free fall.
摘要翻译：传感器（20）包括可移动元件（24），自检致动器（22）和感测元件（56,58）。感测元件（56,58）沿着垂直于感测元件（56,58）的平面的轴线检测可动元件（24）从第一位置（96）到第二位置（102）的移动。第二位置（102）产生模拟自由落体状态的输出信号（82）。用于测试具有换能器（20）的装置（70）的保护特征的方法（92）需要将可移动元件（24）移动到第一位置（102）以产生在感测元件（56）处可检测到的负重力，68），通过静电力（100）将信号（88）施加到致动器（22）以将可移动元件（24）移动到第二位置（102），并且确定响应于模拟自由落体。

63. 发明申请

US20080016964A1 MEMS device and method of reducing stiction in a MEMS device 失效
标题翻译： MEMS器件和减少MEMS器件中的静电的方法
公开(公告)号：US20080016964A1
公开(公告)日：2008-01-24
申请号：US11489789
申请日：2006-07-19
申请人： Daniel N. Koury , Andrew C. McNeil
发明人： Daniel N. Koury , Andrew C. McNeil
IPC分类号： G01P15/125
CPC分类号： G01P15/0802 , B81B3/001 , G01P15/125 , G01P2015/0814
摘要： A MEMS device includes a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring function. The at least one suspension structure has portions that move in tandem when the MEMS device is subject to at least one stimulus in a sensing direction, and further includes at least one link between the portions that move in tandem.
摘要翻译： MEMS器件包括衬底; 悬挂在基板附近的可动块; 以及耦合到所述可移动质量块的至少一个悬架结构，用于执行机械弹簧功能。所述至少一个悬架结构具有当MEMS装置在感测方向上受到至少一个刺激时串联移动的部分，并且还包括在串联移动的部分之间的至少一个连杆。

64. 发明申请

US20080000297A1 MEMS suspension and anchoring design 失效
标题翻译： MEMS悬挂和锚定设计
公开(公告)号：US20080000297A1
公开(公告)日：2008-01-03
申请号：US11479792
申请日：2006-06-30
申请人： Daniel N. Koury , Andrew C. McNeil
发明人： Daniel N. Koury , Andrew C. McNeil
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , B81B3/0094 , B81B2201/0235 , G01C19/5719 , G01P15/08 , G01P15/135 , G01P2015/0814
摘要： A MEMS device that has a sensitivity to a stimulus in at least one sensing direction includes a substrate, a movable mass with corner portions suspended in proximity to the substrate, at least one suspension structure coupled approximately to the corner portions of the movable mass for performing a mechanical spring function, and at least one anchor for coupling the substrate to the at least one suspension structure. The at least one anchor is positioned approximately on a center line in the at least one sensing direction.
摘要翻译：对至少一个感测方向上的刺激具有敏感性的MEMS器件包括基底，具有悬挂在基底附近的拐角部分的可移动物体，至少一个悬挂结构，其大致耦合到可移动块的角部，用于执行机械弹簧功能，以及用于将衬底耦合到至少一个悬挂结构的至少一个锚固件。所述至少一个锚固件大致位于所述至少一个感测方向上的中心线上。

65. 发明授权

US06352874B1 Method of manufacturing a sensor 有权
标题翻译：制造传感器的方法
公开(公告)号：US06352874B1
公开(公告)日：2002-03-05
申请号：US09317734
申请日：1999-05-24
申请人： Andrew C. McNeil , David J. Monk , Bishnu P. Gogoi
发明人： Andrew C. McNeil , David J. Monk , Bishnu P. Gogoi
IPC分类号： H01L2128
CPC分类号： G01L9/0042 , G01L9/0073
摘要： A method of manufacturing a sensor includes forming a first electrode (120, 1120), forming a sacrificial layer (520) over the first electrode, and forming a layer (130) over the sacrificial layer where a second electrode (131, 831) is located in the layer. The method further includes removing the sacrificial layer after forming the layer to form a cavity (140) between the first and second electrodes and then sealing the cavity between the first and second electrodes. The layer is supported over the first electrode by a post (133, 833) in the cavity, and the second electrode is movable relative to the first electrode and is movable in response to a pressure external to the cavity.
摘要翻译：制造传感器的方法包括：形成第一电极（120,1120），在第一电极上形成牺牲层（520），以及在牺牲层上形成层（130），其中第二电极（131,831）为位于层。所述方法还包括在形成所述层之后去除所述牺牲层以在所述第一和第二电极之间形成空腔（140），然后在所述第一和第二电极之间密封空腔。该层通过腔中的柱（133,833）支撑在第一电极上，并且第二电极可相对于第一电极移动，并且可响应于空腔外部的压力而移动。

66. 发明授权

US5461774A Apparatus and method of elastically bowing a base plate 失效
标题翻译：弹性弯曲底板的装置和方法
公开(公告)号：US5461774A
公开(公告)日：1995-10-31
申请号：US217831
申请日：1994-03-25
申请人： Jeffrey G. Holmes , Andrew C. McNeil
发明人： Jeffrey G. Holmes , Andrew C. McNeil
IPC分类号： H01L23/373 , H01L21/48 , H01L23/02 , H01L23/13 , H01L25/07 , H01L25/18 , H05K1/03 , H05K3/00 , H05K3/34 , H01R43/16 , H01B7/34
CPC分类号： H05K3/0061 , H01L21/4878 , H01L23/13 , H01L2924/0002 , H01L2924/3511 , H05K1/0306 , H05K2201/09018 , H05K2203/0405 , H05K3/341 , Y10T29/49144 , Y10T29/49863 , Y10T29/49869 , Y10T29/49968
摘要： An electronic module assembly (10) is constructed by attaching semiconductor die (20, 22) to corresponding ceramic substrates (16, 18). A solder preform (14) is placed between the ceramic substrates and a base plate (12) which in turn is placed on a mounting fixture (26). Steel shims (28-42) are placed around the perimeter between the base plate and the mounting fixture surface. A restraining mechanism (24) passes through the center of the base plate and fastens to the mounting fixture to create a force on the base plate causing it to bow in an elastic manner. The assembly is reflow soldered and cooled with the module assembly restrained in the pre-bow apparatus. The elastic bow compensates for differences in thermal expansion and contraction characteristics between the ceramic substrates and base plate encountered during the reflow and later processes to prevent stresses from developing on the solder bond between materials.
摘要翻译：通过将半导体管芯（20,22）附接到相应的陶瓷衬底（16,18）来构造电子模块组件（10）。焊料预成型件（14）放置在陶瓷基板和底板（12）之间，底板（12）又放置在安装固定件（26）上。钢垫片（28-42）围绕基板和安装夹具表面之间的周边放置。约束机构（24）穿过基板的中心并固定到安装夹具上，以在基板上形成一个力，使其以弹性方式弯曲。将组件回流焊接并冷却，模块组件被限制在前弓装置内。弹性弓补偿在回流期间遇到的陶瓷基板和基板之间的热膨胀和收缩特性的差异，并且后续处理以防止应力在材料之间的焊料接合上发展。

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