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    • 51. 发明申请
    • METHOD FOR CONTROLLING CHARGING OF SAMPLE AND SCANNING ELECTRON MICROSCOPE
    • 用于控制样品和扫描电子显微镜充电的方法
    • US20110139981A1
    • 2011-06-16
    • US13059537
    • 2009-08-08
    • Ritsuo FukayaNobuhiro OkaiKoki MiyaharaZhigang Wang
    • Ritsuo FukayaNobuhiro OkaiKoki MiyaharaZhigang Wang
    • G01N23/225G01N23/00
    • H01J37/026H01J37/09H01J37/15H01J37/28H01J2237/0041H01J2237/0045H01J2237/0458
    • An object of the present invention is to provide a scanning electron microscope aiming at making it possible to control the quantity of electrons generated by collision of electrons emitted from a sample with other members, and a sample charging control method using the control of electron quantity. To achieve the object, a scanning electron microscope including a plurality of apertures through which an electron beam can pass and a mechanism for switching the apertures for the electron beam, and a method for controlling sample charging by switching the apertures are proposed. The plurality of apertures are at least two apertures. Portions respectively having different secondary electron emission efficiencies are provided on peripheral portions of the at least two apertures on a side opposed to the sample. The quantity of electrons generated by collision of electrons emitted from the sample can be controlled by switching the apertures.
    • 本发明的目的是提供一种扫描电子显微镜,其目的在于可以控制从样品与其他部件发射的电子的碰撞产生的电子的量,以及使用电子量的控制的样品充电控制方法。 为了实现该目的,提出了一种扫描电子显微镜,其包括电子束可以通过的多个孔,以及用于切换电子束的孔的机构,以及通过切换孔来控制样品充电的方法。 多个孔是至少两个孔。 分别具有不同二次电子发射效率的部分设置在与样品相对的一侧上的至少两个孔的周边部分上。 可以通过切换孔来控制从样品发射的电子的碰撞产生的电子的量。
    • 52. 发明授权
    • Method for acquiring spectrum shape of a gain flattening filter in an optical amplifier
    • 用于获取光放大器中的增益平坦化滤波器的光谱形状的方法
    • US07940452B2
    • 2011-05-10
    • US12195864
    • 2008-08-21
    • Zhigang WangAihua Yu
    • Zhigang WangAihua Yu
    • H04B10/17H04B10/12
    • H01S3/06754H01S3/0014H01S3/1616H01S2301/04
    • A method for acquiring spectrum shape of a gain flattening filter of a doped optical fiber amplifier comprises the steps of: measuring spectrum shapes at two gain point (H, L) of the doped optical fiber with invariable fiber length respectively; and acquiring various gain spectrums of the doped optical fiber with various fiber length and various population inversion level according to an expression: ErGain(λ,x,L′)=[ErLGain(λ)+[ErHGain(λ)−ErLGain(λ)]*x]*L′, Wherein Gain(λ) refers to the spectral function of gain, x is Δ′inv/Δinv which refers to change of population inversion level, and L′ is set as proportion of doped fiber length. Gain spectrums of the doped optical fiber with various fiber length can be acquired by measuring spectrum shapes at two gain point (H, L) of the doped optical fiber in invariable fiber length and applying change rule of gain spectrum of the doped optical fiber in different population inversion level, which improves the flexibility for design of amplifier.
    • 一种用于获取掺杂光纤放大器的增益平坦滤波器的光谱形状的方法,包括以下步骤:分别测量具有不变光纤长度的掺杂光纤的两个增益点(H,L)处的光谱形状; 根据以下表达式获得具有各种光纤长度和各种总体反转电平的掺杂光纤的各种增益光谱:ErGain(λ,x,L')= [ErLGain(λ)+ [ErHGain(λ)-ErLGain(λ) ] * x] * L',其中增益(λ)是指增益的光谱函数,x是&Dgr; inv /&Dgr; inv,其是指群体反转级别的变化,L'被设置为掺杂光纤的比例 长度。 通过以不变的光纤长度测量掺杂光纤的两个增益点(H,L)处的光谱形状,并将掺杂光纤的增益光谱的变化规则应用于不同的光纤中,可以获得具有各种光纤长度的掺杂光纤的增益谱 人口反演水平提高了放大器设计的灵活性。
    • 53. 发明授权
    • Charged particle beam irradiation system
    • 带电粒子束照射系统
    • US07851756B2
    • 2010-12-14
    • US12182709
    • 2008-07-30
    • Ritsuo FukayaZhigang Wang
    • Ritsuo FukayaZhigang Wang
    • G01K1/08H01J3/14H01J3/26
    • H01J37/28H01J37/026H01J37/147H01J37/265H01J2237/0044
    • It is to prevent an image drift from occurring caused by a specimen being charged when observing the specimen including an insulating material.A first scan is performed in a predetermined direction on scanning line and in a predetermined sequential direction of scanning lines and a second scan is performed in a scanning direction different from the predetermined scanning direction and in a sequential direction different from the predetermined sequential direction. An image may be created by repeating the process of executing the second scan after executing the first scan and by requiring the arithmetic average of the frames obtained by the second scans. An image may be created by averaging arithmetically at least one frame obtained by the first scan and at least one frame obtained by the second scan.
    • 这是为了防止在观察包括绝缘材料的试样时由试样充电引起的图像漂移。 在扫描线和扫描线的预定顺序方向上沿预定方向执行第一扫描,并且在与预定扫描方向不同的扫描方向上和沿与预定顺序方向不同的顺序方向上执行第二扫描。 可以通过在执行第一次扫描之后重​​复执行第二扫描的处理并且要求通过第二扫描获得的帧的算术平均来创建图像。 可以通过对由第一扫描获得的至少一帧和通过第二扫描获得的至少一帧进行算术平均来创建图像。
    • 59. 发明申请
    • Memory cell with reduced DIBL and Vss resistance
    • 具有降低的DIBL和Vss电阻的存储单元
    • US20060035431A1
    • 2006-02-16
    • US10915771
    • 2004-08-11
    • Shenqing FangKuo-Tung ChangPavel FastenkoZhigang Wang
    • Shenqing FangKuo-Tung ChangPavel FastenkoZhigang Wang
    • H01L21/336
    • H01L29/66825
    • According to one exemplary embodiment, a method for fabricating a floating gate memory cell on substrate comprises a step of forming a spacer adjacent to a source sidewall of a stacked gate structure, where the stacked gate structure is situated over a channel region in substrate. The method further comprises forming a high energy implant doped region adjacent to the spacer in the source region of substrate. The method further comprises forming a recess in a source region of the substrate, where the recess has a sidewall, a bottom, and a depth, and where the sidewall of the recess is situated adjacent to a source of the floating gate memory cell. According to this exemplary embodiment, the spacer causes the source to have a reduced lateral straggle and diffusion in the channel region, which causes a reduction in drain induced barrier lowering (DIBL) in the floating gate memory cell.
    • 根据一个示例性实施例,用于在衬底上制造浮动栅极存储器单元的方法包括形成与层叠栅极结构的源极侧壁相邻的间隔物的步骤,其中堆叠的栅极结构位于衬底中的沟道区域之上。 该方法还包括在衬底的源区中形成与间隔物相邻的高能注入掺杂区。 该方法还包括在衬底的源极区域中形成凹部,其中凹部具有侧壁,底部和深度,并且凹部的侧壁位于与浮动栅极存储单元的源极相邻的位置。 根据该示例性实施例,间隔件导致源极在通道区域中具有减小的横向偏移和扩散,这导致浮动栅极存储单元中的漏极感应势垒降低(DIBL)的减小。
    • 60. 发明授权
    • Method for producing a low defect homogeneous oxynitride
    • 低缺陷均匀氮氧化物的制造方法
    • US06991987B1
    • 2006-01-31
    • US10306382
    • 2002-11-27
    • Xin GuoNian YangZhigang Wang
    • Xin GuoNian YangZhigang Wang
    • H01L21/8247
    • H01L21/28273C23C16/0218C23C16/0227C23C16/308H01L21/3144
    • A process technology effectuates production of low defect homogeneous oxynitride, which can be applied in tunneling dielectrics with high dielectric constants and low barrier heights for flash memory devices, and as gate oxide for ultra-thin logic devices. The process technology involves varying the oxygen content in a the homogeneous oxynitride film comprising a part of the flash memory device, which effectively increases the dielectric constant of the oxynitride film and lowers its barrier height. In one such process, a controlled co-flow of N2O is introduced into a CVD deposition process. This process effectuates production of a oxynitride film with uniform distributions of nitrogen and oxygen throughout.
    • 一种工艺技术可以实现低缺陷均匀氮氧化物的生产,其可以应用于具有高介电常数的隧道电介质和用于闪存器件的低屏障高度,以及用作超薄逻辑器件的栅极氧化物。 该工艺技术涉及改变包括闪存器件的一部分的均匀氮氧化物膜中的氧含量,其有效地增加氧氮化物膜的介电常数并降低其势垒高度。 在一种这样的方法中,将N 2 O 2的受控共流引入到CVD沉积工艺中。 该方法实现了氮气和氧气的均匀分布的氮氧化物膜的生产。