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    • 51. 发明申请
    • Acceleration sensor
    • 加速度传感器
    • US20060086185A1
    • 2006-04-27
    • US11105586
    • 2005-04-14
    • Hiroshi TanakaHiroshi IshikawaKenji NagataMasaaki OnoTsutomu MiyashitaSumio YamadaNobuko Ono
    • Hiroshi TanakaHiroshi IshikawaKenji NagataMasaaki OnoTsutomu MiyashitaSumio YamadaNobuko Ono
    • G01P15/125G01P15/00
    • B81B7/0048B81B3/0072B81B2201/0235G01D11/30G01P1/023G01P15/0802G01P15/123G01P15/18G01P2015/0842
    • An acceleration sensor with reduced noise that resolves the problem of stress arising from a difference in thermal expansion coefficients is provided. The acceleration sensor detects acceleration in three-axis directions in a three-dimensional coordinate system, and includes a frame having four sides that is integrally formed by a semiconductor substrate; a weight portion that is positioned within the frame; and four beam portions, corresponding with each of the four sides, one end of which is connected to the weight portion to support the weight portion and the other end of which is connected to the center of the corresponding side of the four sides, wherein a detection element that detects flexure of the beam portions that corresponds to the acceleration acting on the weight portion is formed on each of the four beam portions; a pair of joint portions that are formed with a gap there between are formed on each of the four sides of the frame; and the gap between the pair of joint portions formed on one side has a predetermined length with the center of the one side as the point of symmetry.
    • 提供了一种降低噪声的加速度传感器,其解决了由热膨胀系数差引起的应力问题。 加速度传感器在三维坐标系中检测三轴方向的加速度,并且包括具有由半导体基板一体形成的四个侧面的框架; 位于框架内的重物部分; 以及四个梁部分,其对应于四个侧面中的每一个,其一端连接到配重部分,以支撑重物部分,另一端连接到四个侧面的相应侧部的中心,其中, 在所述四个梁部分中的每一个上形成检测对应于作用在所述配重部分上的加速度的梁部分的挠曲的检测元件; 在框架的四个侧面上形成有形成有间隙的一对接合部, 在一侧形成的一对接合部之间的间隙以一侧的中心为对称点,具有规定的长度。
    • 58. 发明授权
    • Stress detection method for sensor device with multiple axis sensor and sensor device employing this method
    • 采用这种方法的多轴传感器和传感器装置的传感器装置的应力检测方法
    • US07320253B2
    • 2008-01-22
    • US11073944
    • 2005-03-08
    • Toshio HanazawaMasaaki OnoTsutomu MiyashitaHiroshi TokunagaHiroshi Ishikawa
    • Toshio HanazawaMasaaki OnoTsutomu MiyashitaHiroshi TokunagaHiroshi Ishikawa
    • G01P15/125
    • G01P15/123G01P15/18G01P21/00G01P2015/084
    • The present invention provides the stress detection method for force sensor device with multiple axis sensor device and force sensor device employing this method, whose installation angle is arbitrary. The stress detection method includes, first and second force sensors whose detection axes are orthogonal to each other. When the detection axis of first force sensor forms angle θ with direction of detected stress Ax, and the stress component of direction perpendicular to direction of the detected stress Ax is Az, output Apx of the axis direction of first force sensor is found as Apx=αx (Ax×cos θ+Az×sin θ), and output Apz of the axis direction of the second force sensor is found as Apz=αz (Ax×sin θ+Az×cos θ), and, when αx and αz are detection sensitivity coefficients of first and second force sensors respectively, the detection sensitivity coefficient αz of second force sensor is set as αz=αx tan θ, and the detected stress Ax is found as Ax=(Apx−Apz)/αx(cos θ−tan θ×sin θ).
    • 本发明提供了具有多轴传感器装置的力传感器装置和采用该方法的力传感器装置的应力检测方法,其安装角度是任意的。 应力检测方法包括检测轴彼此正交的第一和第二力传感器。 当第一力传感器的检测轴与检测到的应力Ax的方向形成角度θ,并且垂直于检测应力的方向的方向的应力分量为Az时,第一力传感器的轴方向的输出Apx被发现为Apx = (Axxcosθ+Azxsinθ),第二力传感器的轴方向的输出Apz被找到为Apz =αz(Axxsinθ+Azxcosθ) ,并且当αx和αz分别是第一和第二力传感器的检测灵敏度系数时,第二和第二力传感器的检测灵敏度系数αz 力传感器被设置为α =α×tanθθ,并且检测到的应力Ax被发现为Ax =(Apx-Apz)/α SUB>(cosθ-tan角蛋白θ)。