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    • 10. 发明申请
    • Acceleration sensor
    • 加速度传感器
    • US20060086185A1
    • 2006-04-27
    • US11105586
    • 2005-04-14
    • Hiroshi TanakaHiroshi IshikawaKenji NagataMasaaki OnoTsutomu MiyashitaSumio YamadaNobuko Ono
    • Hiroshi TanakaHiroshi IshikawaKenji NagataMasaaki OnoTsutomu MiyashitaSumio YamadaNobuko Ono
    • G01P15/125G01P15/00
    • B81B7/0048B81B3/0072B81B2201/0235G01D11/30G01P1/023G01P15/0802G01P15/123G01P15/18G01P2015/0842
    • An acceleration sensor with reduced noise that resolves the problem of stress arising from a difference in thermal expansion coefficients is provided. The acceleration sensor detects acceleration in three-axis directions in a three-dimensional coordinate system, and includes a frame having four sides that is integrally formed by a semiconductor substrate; a weight portion that is positioned within the frame; and four beam portions, corresponding with each of the four sides, one end of which is connected to the weight portion to support the weight portion and the other end of which is connected to the center of the corresponding side of the four sides, wherein a detection element that detects flexure of the beam portions that corresponds to the acceleration acting on the weight portion is formed on each of the four beam portions; a pair of joint portions that are formed with a gap there between are formed on each of the four sides of the frame; and the gap between the pair of joint portions formed on one side has a predetermined length with the center of the one side as the point of symmetry.
    • 提供了一种降低噪声的加速度传感器,其解决了由热膨胀系数差引起的应力问题。 加速度传感器在三维坐标系中检测三轴方向的加速度,并且包括具有由半导体基板一体形成的四个侧面的框架; 位于框架内的重物部分; 以及四个梁部分,其对应于四个侧面中的每一个,其一端连接到配重部分,以支撑重物部分,另一端连接到四个侧面的相应侧部的中心,其中, 在所述四个梁部分中的每一个上形成检测对应于作用在所述配重部分上的加速度的梁部分的挠曲的检测元件; 在框架的四个侧面上形成有形成有间隙的一对接合部, 在一侧形成的一对接合部之间的间隙以一侧的中心为对称点,具有规定的长度。