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    • 52. 发明申请
    • Defect inspection method, defect inspection apparatus, and computer readable storage medium
    • 缺陷检查方法,缺陷检查装置和计算机可读存储介质
    • US20070188832A1
    • 2007-08-16
    • US11698049
    • 2007-01-26
    • Makoto HayakawaHiroshi Tomita
    • Makoto HayakawaHiroshi Tomita
    • H04N1/00
    • G01N21/9501
    • In the present invention, an image pickup device moving by drive of a drive unit picks up an image of a substrate on a mounting table. The drive unit is controlled by a driving signal from a first controller. The driving signal outputted to the first controller is outputted also to a second controller, so that the second controller controls the image pickup device based on the driving signal. The movement of the image pickup device itself is synchronized with the image pickup by the image pickup device. According to the present invention, at the time when the mounting table mounting the substrate thereon and the image pickup device are relatively moved to capture the image of the substrate, a precise image without image distortion can be captured for accurate inspection.
    • 在本发明中,通过驱动单元的驱动移动的图像拾取装置在安装台上拾取基板的图像。 驱动单元由来自第一控制器的驱动信号控制。 输出到第一控制器的驱动信号也输出到第二控制器,使得第二控制器基于驱动信号控制图像拾取装置。 图像拾取装置本身的移动与图像拾取装置的图像拾取同步。 根据本发明,当安装基板的安装台和图像拾取装置相对移动以捕获基板的图像时,可以捕获没有图像失真的精确图像以进行精确的检查。