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51. 发明授权

US5596596A Narrow band excimer laser 失效
标题翻译：窄带准分子激光器
公开(公告)号：US5596596A
公开(公告)日：1997-01-21
申请号：US573593
申请日：1995-12-15
申请人： Osamu Wakabayashi , Masahiko Kowaka , Yukio Kobayashi
发明人： Osamu Wakabayashi , Masahiko Kowaka , Yukio Kobayashi
IPC分类号： G03F7/20 , H01S3/08 , H01S3/1055 , H01S3/225
CPC分类号： G03F7/70025 , H01S3/08009 , H01S3/1055 , H01S3/225
摘要： A narrow-band excimer laser employing a diffraction grating as a wavelength selective element, which is particularly suited for a light source of a reduction projection aligner. The grating used in the narrow-band excimer laser of the invention is so disposed that the ruling direction of the grating is nearly perpendicular to the direction of laser discharge. When a beam expander is used to expand laser beam falling on the beam expander is so disposed that the direction of beam expansion is nearly perpendicular to that of discharge of the laser. Further, when an aperture is to be used in the laser cavity, the aperture is placed so that the longitudinal direction may be parallel to the direction of laser discharge. Moreover, the front mirror of the laser cavity is a cylindrical one, whose mechanical axis is in parallel with the direction of laser discharge. This makes it possible to provide a narrow-band excimer laser having very high efficiency and excellent durability.
摘要翻译：采用衍射光栅作为波长选择元件的窄带准分子激光器，其特别适用于还原投影对准器的光源。在本发明的窄带准分子激光器中使用的光栅被布置成使得光栅的光栅方向几乎垂直于激光放电的方向。当使用光束扩展器来扩展落在光束扩展器上的激光束时，光束扩展的方向几乎垂直于激光放电的方向。此外，当在激光腔中使用孔时，孔被放置成使得纵向方向可以平行于激光放电的方向。此外，激光腔的前镜是圆柱形的，其机械轴与激光放电的方向平行。这使得可以提供非常高的效率和优异的耐久性的窄带准分子激光器。

52. 发明授权

US09570884B2 Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light 有权
标题翻译：激光装置，极紫外光发生系统，激光装置的控制方法以及产生极紫外光的方法
公开(公告)号：US09570884B2
公开(公告)日：2017-02-14
申请号：US13817817
申请日：2012-01-25
申请人： Krzysztof Nowak , Osamu Wakabayashi
发明人： Krzysztof Nowak , Osamu Wakabayashi
IPC分类号： H01S5/06 , B82Y20/00 , G03F7/20 , H01S3/23 , H01S5/062 , H01S3/13 , H01S3/223 , H01S5/065 , H01S5/14 , H01S5/34 , H01S5/40 , H05G2/00
CPC分类号： H01S5/06 , B82Y20/00 , G03F7/70025 , G03F7/70033 , H01S3/1305 , H01S3/2232 , H01S3/2316 , H01S3/235 , H01S3/2375 , H01S5/0612 , H01S5/06216 , H01S5/0622 , H01S5/0653 , H01S5/0654 , H01S5/141 , H01S5/3402 , H01S5/4025 , H05G2/003 , H05G2/005 , H05G2/008
摘要： A laser apparatus may include: a master oscillator configured to output a pulsed laser beam at a repetition rate, the master oscillator including at least one semiconductor laser apparatus; at least one amplifier configured to amplify the pulsed laser beam from the master oscillator, the at least one amplifier being configured to include at least one gain bandwidth; and a controller for controlling a parameter affecting an output wavelength of the pulsed laser beam from the master oscillator such that a wavelength chirping range of the pulsed laser beam from the master oscillator overlaps at least a part of the at least one gain bandwidth.
摘要翻译：激光装置可以包括：主振荡器，其被配置为以重复频率输出脉冲激光束，所述主振荡器包括至少一个半导体激光装置; 至少一个放大器被配置为放大来自所述主振荡器的所述脉冲激光束，所述至少一个放大器被配置为包括至少一个增益带宽; 以及控制器，用于控制影响来自主振荡器的脉冲激光束的输出波长的参数，使得来自主振荡器的脉冲激光束的波长啁啾范围与至少一个增益带宽的至少一部分重叠。

53. 发明授权

US09113540B2 System and method for generating extreme ultraviolet light 有权
公开(公告)号：US09113540B2
公开(公告)日：2015-08-18
申请号：US13492067
申请日：2012-06-08
申请人： Tsukasa Hori , Kouji Kakizaki , Tatsuya Yanagida , Osamu Wakabayashi
发明人： Tsukasa Hori , Kouji Kakizaki , Tatsuya Yanagida , Osamu Wakabayashi
IPC分类号： B82Y10/00 , H05G2/00 , H01S3/10 , H01S3/131 , H01S3/23
CPC分类号： H05G2/008 , H01S3/02 , H01S3/094026 , H01S3/10061 , H01S3/1106 , H01S3/131 , H01S3/1636 , H01S3/1643 , H01S3/2232 , H01S3/2316 , H01S3/2383 , H05G2/003 , H05G2/005
摘要： A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.

54. 发明申请

US20150188274A1 METHOD OF CONTROLLING LASER APPARATUS AND LASER APPARATUS 有权
标题翻译：控制激光装置和激光装置的方法
公开(公告)号：US20150188274A1
公开(公告)日：2015-07-02
申请号：US14579698
申请日：2014-12-22
申请人： Osamu Wakabayashi , Hiroaki Tsushima , Kouji Kakizaki
发明人： Osamu Wakabayashi , Hiroaki Tsushima , Kouji Kakizaki
IPC分类号： H01S3/00 , H01S3/10 , H01S3/034 , H01S3/134 , H01S3/225 , H01S3/036
CPC分类号： H01S3/0014 , H01S3/034 , H01S3/036 , H01S3/10069 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： A method of controlling a laser apparatus may include: exchanging a gain medium in a chamber configured to output a laser beam by exciting the gain medium; first measuring, after the exchanging, pulse energy of a laser beam which is oscillated in the chamber under a specific gas pressure and a specific charge voltage; calculating an approximate expression indicating a relationship between the pulse energy of the laser beam and the gas pressure in the chamber and the charge voltage, or a table representing a correlationship between the pulse energy, the gas pressure and the charge voltage, based on the specific pressure, the specific charge voltage and the pulse energy in the first measuring; storing the approximate expression or the table; second measuring, after the first measuring, pulse energy Er of a laser beam oscillated in the chamber; calculating pulse energy Eec which is supposed to be obtained directly after the exchanging under the gas pressure and the charge voltage in the second measuring based on the approximate expression or the table; calculating a reduction amount ΔEd of pulse energy based on the pulse energy Eec and the pulse energy Er using ΔEd=Eec−Er; and calculating a partial gas exchange amount Q for partial gas exchange in the chamber based on the reduction amount ΔEd of pulse energy.
摘要翻译：控制激光装置的方法可以包括：在配置成通过激励增益介质输出激光束的腔室中交换增益介质; 在交换之后，首先测量在特定气体压力和特定充电电压下在腔室中振荡的激光束的脉冲能量; 计算表示激光束的脉冲能量与腔室中的气体压力与充电电压之间的关系的近似表达式，或表示脉冲能量，气体压力和充电电压之间的相关性的表格，压力，第一次测量中的具体充电电压和脉冲能量; 存储近似表达式或表格; 在第一次测量之后，第二次测量激光束的脉冲能量Er在腔室中振荡; 基于近似表达式或表格，计算在气体压力下的交换和第二测量中的充电电压之间直接获得的脉冲能量Eec; 使用＆Dgr; Ed = Eec-Er计算基于脉冲能量Eec和脉冲能量Er的脉冲能量的减少量＆Dgr; Ed; 并且基于脉冲能量的减少量＆Dgr; Ed计算腔室中部分气体交换的部分气体交换量Q。

55. 发明授权

US08901522B2 Chamber apparatus and extreme ultraviolet light generation system 有权
标题翻译：室内设备和极紫外光发生系统
公开(公告)号：US08901522B2
公开(公告)日：2014-12-02
申请号：US13196311
申请日：2011-08-02
申请人： Yoshifumi Ueno , Shinji Nagai , Osamu Wakabayashi
发明人： Yoshifumi Ueno , Shinji Nagai , Osamu Wakabayashi
IPC分类号： H05G2/00 , G21K5/00 , G03F7/20
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70916 , H05G2/008
摘要： A chamber apparatus used with a laser apparatus may include: a chamber provided with at least one inlet through which a laser beam outputted from the laser apparatus enters the chamber; a target supply unit provided to the chamber for supplying a target material to a predetermined region inside the chamber; a magnetic field generation unit for generating a magnetic field in the predetermined region; and a charged particle collection unit disposed in a direction of a magnetic flux of the magnetic field for collecting a charged particle thereinto, the charged particle being generated when the target material is irradiated with the laser beam inside the chamber and traveling along the magnetic flux.
摘要翻译：与激光装置一起使用的室装置可以包括：设置有至少一个入口的室，从激光装置输出的激光束通过该入口进入室; 目标供给单元，其设置在所述室中，用于将目标材料供应到所述室内的预定区域; 用于在预定区域中产生磁场的磁场产生单元; 以及带电粒子收集单元，其设置在所述磁场的磁通方向上，用于收集带电粒子，所述带电粒子是当所述靶材料被所述腔室内的所述激光束照射并且沿着所述磁通量行进时产生的。

56. 发明授权

US08804778B2 Laser apparatus and extreme ultraviolet light source apparatus 有权
标题翻译：激光设备和极紫外光源设备
公开(公告)号：US08804778B2
公开(公告)日：2014-08-12
申请号：US12580523
申请日：2009-10-16
申请人： Osamu Wakabayashi , Akira Endo , Krzysztof Nowak , Takashi Suganuma , Masato Moriya
发明人： Osamu Wakabayashi , Akira Endo , Krzysztof Nowak , Takashi Suganuma , Masato Moriya
IPC分类号： H01S3/10
CPC分类号： H01S3/2316 , B82Y20/00 , G03F7/70033 , H01S3/0007 , H01S3/107 , H01S3/2232 , H01S3/235 , H01S5/02284 , H01S5/0654 , H01S5/06837 , H01S5/0687 , H01S5/141 , H01S5/3402 , H01S5/4012 , H01S5/4062 , H01S5/4087
摘要： An extreme ultraviolet light source apparatus comprises a laser apparatus having a master oscillator outputting one or more longitudinal-mode-laser lights, an amplifier with a molecular gas as an amplifying agency amplifying a longitudinal-mode laser light of which wavelength is included in one of amplifiable lines, and a controller adjusting the master oscillator so that the wavelength of the longitudinal-mode laser light outputted from the master oscillator is included in one of the amplifiable lines, the laser apparatus being used as a driver laser, wherein the laser apparatus irradiates a target material with a laser light for generating plasma, and the extreme ultraviolet light is emitted from the plasma and outputted from the extreme ultraviolet light source apparatus.
摘要翻译：一种极紫外光源装置包括具有输出一个或多个纵模式激光灯的主振荡器的激光装置，具有分子气体的放大器作为放大器，放大其中包含波长的纵模式激光，以及调节主振荡器的控制器，使得从主振荡器输出的纵模激光的波长包括在可放大线之一中，激光装置用作驱动激光器，其中激光装置照射具有用于产生等离子体的激光的目标材料，并且从等离子体发射极紫外光并从极紫外光源装置输出。

57. 发明授权

US08759804B2 Chamber apparatus and extreme ultraviolet light generation system 有权
标题翻译：室内设备和极紫外光发生系统
公开(公告)号：US08759804B2
公开(公告)日：2014-06-24
申请号：US13122354
申请日：2011-03-11
申请人： Toshihiro Nishisaka , Yukio Watanabe , Tamotsu Abe , Osamu Wakabayashi
发明人： Toshihiro Nishisaka , Yukio Watanabe , Tamotsu Abe , Osamu Wakabayashi
IPC分类号： A61N5/06 , G01J3/10 , H05G2/00
CPC分类号： H05G2/008 , G03B27/54 , G03F7/70033 , G03F7/70175 , G03F7/70916 , H05G2/003
摘要： A chamber apparatus used with an external apparatus having an obscuration region may include: a chamber in which extreme ultraviolet light is generated; a collector mirror provided in the chamber for collecting the extreme ultraviolet light; a support for securing the collector mirror to the chamber; and an output port provided to the chamber for allowing the extreme ultraviolet light collected by the collector mirror to be introduced therethrough into the external apparatus.
摘要翻译：与具有遮蔽区域的外部设备一起使用的室设备可以包括：产生极紫外光的室; 设置在室中的用于收集极紫外光的收集器反射镜; 用于将收集器镜固定到腔室的支撑件; 以及设置到室的输出端口，用于允许由集光镜收集的极紫外光通过其引入外部设备。

58. 发明授权

US08742379B2 Window unit, window device, laser apparatus, and extreme ultraviolet light generation system 有权
标题翻译：窗单元，窗装置，激光装置和极紫外光发生系统
公开(公告)号：US08742379B2
公开(公告)日：2014-06-03
申请号：US13636038
申请日：2011-07-05
申请人： Hidenobu Kameda , Masato Moriya , Osamu Wakabayashi
发明人： Hidenobu Kameda , Masato Moriya , Osamu Wakabayashi
IPC分类号： H01S3/04
CPC分类号： H01S3/0401 , G02B7/008 , H01S3/005 , H01S3/2316 , H05G2/008 , Y10T137/6851
摘要： A window unit may include: a window configured to allow a laser beam to be transmitted therethrough; and a holder for holding the window at a periphery thereof, the holder being provided with a flow channel thereinside configured to allow a fluid to flow.
摘要翻译：窗口单元可以包括：被配置为允许激光束透过其中的窗口; 以及用于在其周边保持窗口的保持器，所述保持器设置有配置成允许流体流动的内部的流动通道。

59. 发明授权

US08710474B2 Extreme ultraviolet light generation apparatus 有权
标题翻译：极紫外光发生装置
公开(公告)号：US08710474B2
公开(公告)日：2014-04-29
申请号：US13532365
申请日：2012-06-25
申请人： Takeshi Kodama , Osamu Wakabayashi
发明人： Takeshi Kodama , Osamu Wakabayashi
IPC分类号： G21K5/00 , G01K5/00 , B41C3/02
CPC分类号： H05G2/008 , H05G2/006
摘要： An apparatus used with an external laser apparatus for generating extreme ultraviolet light includes a target storage unit for storing a target material, a nozzle unit having a through-hole in communication with the interior of the storage unit through which the target material is outputted, an electrode having a through-hole facing the nozzle unit, and a target detector for detecting a target formed of the target material and outputting a detection signal. A direct current voltage adjuster applies and adjusts a direct current between the target material and the electrode, a pressure adjuster applies and adjusts a pressure to the target material through gas, and a controller controls at least one of the direct current voltage adjuster and the pressure adjuster based on the detection signal from the target detector.
摘要翻译：与用于产生极紫外光的外部激光装置一起使用的装置包括用于存储目标材料的目标存储单元，具有与被输送目标材料的存储单元的内部连通的通孔的喷嘴单元，电极，其具有面向喷嘴单元的通孔，以及目标检测器，用于检测由目标材料形成的目标并输出检测信号。直流电压调节器施加并调节目标材料和电极之间的直流电流，压力调节器通过气体施加和调节对目标材料的压力，并且控制器控制至少一个直流电压调节器和压力基于来自目标检测器的检测信号的调节器。

60. 发明授权

US08698113B2 Chamber apparatus and extreme ultraviolet (EUV) light generation apparatus including the chamber apparatus 有权
标题翻译：包括室装置的室内装置和极紫外（EUV）光发生装置
公开(公告)号：US08698113B2
公开(公告)日：2014-04-15
申请号：US13696517
申请日：2011-12-13
申请人： Masato Moriya , Osamu Wakabayashi
发明人： Masato Moriya , Osamu Wakabayashi
IPC分类号： H05G2/00
CPC分类号： G03F7/708 , G03F7/70008 , G03F7/70808 , G03F7/70833
摘要： A chamber apparatus used with a laser apparatus may include a chamber, a beam expanding optical system, and a focusing optical system. The chamber may be provided with at least one inlet, through which a laser beam outputted from the laser apparatus is introduced into the chamber. The beam expanding optical system is configured to expand the laser beam in diameter. The focusing optical system is configured to focus the laser beam that has been expanded in diameter.
摘要翻译：与激光装置一起使用的室装置可以包括室，扩束光学系统和聚焦光学系统。该室可以设置有至少一个入口，激光装置输出的激光束通过该入口被引入腔室。扩束光学系统被配置为直径地扩大激光束。聚焦光学系统被配置为聚焦已经扩大直径的激光束。

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