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    • 53. 发明授权
    • Probe card apparatus and electrical contact probe having curved or sloping blade profile
    • 探头卡装置和具有弯曲或倾斜刀片轮廓的电接触探针
    • US06842023B2
    • 2005-01-11
    • US10257334
    • 2001-01-15
    • Minoru YoshidaSeiichi Ohashi
    • Minoru YoshidaSeiichi Ohashi
    • G01R1/067G01R1/073H01L21/66G01R31/02
    • G01R1/06738
    • A probe (1A) has a cutting blade portion (2) at a tip end that is brought into contact with a pad electrode (5). The cutting blade has a cutting edge that is in a plane parallel to the direction of sliding of the blade over a pad electrode, when the edge is brought into contact with the electrode. The cutting edge (2a) has a sloping or curved shape that comes closer to the electrode from the front side to the rear side of the blade along the direction of sliding. Thus, as the cutting edge (2a) cuts into an insulating coating (7) formed on the surface of the electrode, the probe ensures satisfactory electrical conduction between the probe (1A) and the electrode because it cuts through the coating without causing swarfs.
    • 探针(1A)在尖端具有与焊盘电极(5)接触的切割刀片部分(2)。 切割刀片具有切割边缘(2a),该边缘(2a)在边缘与电极接触时处于平行于刀片电极滑动方向的平面中。 切割刃(2a)具有倾斜或弯曲的形状,其沿着滑动方向从刀片的前侧到后侧更靠近电极。 因此,当切割边缘(2a)切入形成在电极表面上的绝缘涂层(7)时,探针确保了探针(1A)和电极之间的令人满意的电传导,因为它切割穿过涂层而不产生切屑。
    • 55. 发明授权
    • Automatic water supply system
    • 自动给水系统
    • US06805147B2
    • 2004-10-19
    • US10169761
    • 2002-07-19
    • Takaharu YoshiokaMinoru Yoshida
    • Takaharu YoshiokaMinoru Yoshida
    • F16K3112
    • A01G27/003Y10T137/189
    • An automatic water supply system capable of cultivating a plant in a state as proximate to be natural as possible and robustly and capable of eliminating waste of water, which is an automatic water supply system in which at least deficiency of water of an object of water supply is detected by a water content sensor, a first predetermined time period is measured by a first timer portion in accordance with the detection, when sufficiency of water is not detected by the water content sensor within the first predetermined time period, water is supplied by water supply means and when sufficiency of water is detected within the first predetermined time period, the first timer portion is initialized. According to the automatic water supply system, it is preferable that water is stopped from being supplied after elapse of a second predetermined time period measured separately or water is stopped from being supplied when a measured value of a flow rate meter installed at a water path reaches a previously determined flow rate value after starting to supply water.
    • 一种自动供水系统,其能够将处于尽可能接近的状态的植物培养成能够自然且鲁棒地并且能够消除作为自来水供应系统的水的浪费,其中供水对象的水至少不足 由含水量传感器检测到,当第一预定时间段内的水分传感器没有检测到水的充足性时,通过第一计时器部分测量第一预定时间段,水由水供应 供给装置,并且当在第一预定时间段内检测到足够的水时,初始化第一计时器部分。 根据自动供水系统,当安装在水路上的流量计的测量值达到时,优选在经过分别测量的第二预定时间段或停止供水之后停止供水 开始供水后预先确定的流量值。
    • 57. 发明授权
    • Image forming apparatus
    • 图像形成装置
    • US06785486B2
    • 2004-08-31
    • US10289204
    • 2002-11-07
    • Minoru YoshidaTakao Izumi
    • Minoru YoshidaTakao Izumi
    • G03G1516
    • G03G15/168G03G15/6529
    • A image forming apparatus comprising a cleaning blade for cleaning a conveying belt or an intermediate transfer body, and a lubricating agent coating mechanism for coating a lubricating agent on the surface of the conveying belt or the intermediate transfer body, wherein detection is made whether a conveying belt, an intermediate transfer body belt or a cleaning blade is a new article, and the lubricating agent coating mechanism is operated to coat the lubricating agent on the surface of the conveying belt or the intermediate transfer body. Further, detection is made of installation temperature and humidity of the image forming apparatus, and in case of under-prescribed environments, the lubricating agent coating mechanism is operated to coat the lubricating agent on the surface of the conveying belt or the intermediate transfer body. Thereby, the cleaning performance is improved, and the blade burring is prevented.
    • 一种图像形成装置,包括用于清洁输送带或中间转印体的清洁刮板和用于在输送带或中间转印体的表面上涂布润滑剂的润滑剂涂布机构,其中检测是否输送 皮带,中间转印体带或清洁刮板是新的制品,并且润滑剂涂覆机构被操作以在输送带或中间转印体的表面上涂覆润滑剂。 此外,检测图像形成装置的安装温度和湿度,并且在不足规定的环境的情况下,润滑剂涂覆机构被操作以在输送带或中间转印体的表面上涂覆润滑剂。 由此,提高了清洗性能,并且防止了叶片翻边。
    • 58. 发明授权
    • Method and apparatus for inspecting defects of a specimen
    • 用于检查样本缺陷的方法和装置
    • US06721047B2
    • 2004-04-13
    • US09944858
    • 2001-08-31
    • Atsushi ShimodaSachio UtoMinoru YoshidaShunji MaedaToshihiko Nakata
    • Atsushi ShimodaSachio UtoMinoru YoshidaShunji MaedaToshihiko Nakata
    • G01N2100
    • G01N21/95684
    • The object of the invention is to provide high-sensitivity detection of fine patterns on a transparent inter-layer insulative film and defects on the same layer. Detection is performed with lower-layer patterns and defects on the same layer defocused, thus allowing detection of just the defects from the process that is intended for inspection. An inspection apparatus for a specimen on which a plurality of patterns intended to have identical shapes are arranged in a uniform manner includes: an imaging optical system with a relationship between illumination wavelength and objective lens numerical aperture that provides a resolution of no more than 0.18 microns, or preferably no more than 0.13 microns; an opto-electric converter disposed at an imaging position of the imaging optical system; an auto-focus optical system formed with an optical path disposed separate from the imaging optical system, with illumination applied at an incident angle of at least 85 degrees, preferably at least 88 degrees; means for adjusting a focal position of the imaging optical system based on a detection signal from the auto-focus optical system; and means for processing electronic signals from the opto-electrical converter.
    • 本发明的目的是提供在透明层间绝缘膜上的精细图案的高灵敏度检测和同一层上的缺陷。 以相同层上的较低层图案和缺陷进行检测,散焦,从而允许仅检测来自用于检查的过程的缺陷。 用于其上具有相同形状的多个图案的样本的检查装置以均匀的方式布置包括:具有提供不超过0.18微米的分辨率的照明波长和物镜数值孔径之间的关系的成像光学系统 ,或优选不超过0.13微米; 设置在成像光学系统的成像位置处的光电转换器; 形成有与成像光学系统分开设置的光路的自动聚焦光学系统,其入射角至少为85度,优选为至少88度; 用于基于来自所述自动聚焦光学系统的检测信号调整所述成像光学系统的焦点位置的装置; 以及用于处理来自光电转换器的电子信号的装置。