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51. 发明授权

US08525143B2 Method and system of using nanotube fabrics as joule heating elements for memories and other applications 有权
标题翻译：使用纳米管织物作为焦耳加热元件的方法和系统用于存储器和其他应用
公开(公告)号：US08525143B2
公开(公告)日：2013-09-03
申请号：US12066053
申请日：2006-09-06
申请人： Jonathan W. Ward , Thomas Rueckes , Mitchell Meinhold , Brent M. Segal
发明人： Jonathan W. Ward , Thomas Rueckes , Mitchell Meinhold , Brent M. Segal
IPC分类号： H01L45/00
CPC分类号： H01L45/1286 , B82Y10/00 , G11C13/0004 , G11C13/025 , G11C2213/81 , H01L27/2436 , H01L45/06 , H01L45/1226 , H01L45/1233 , H01L45/144
摘要： Methods and systems of using nanotube elements as joule heating elements for memories and other applications. Under one aspect, a method includes providing an electrical stimulus, regulated by a drive circuit, through a nanotube element in order to heat an adjacent article. Further, a detection circuit electrically gauges the state of the article. The article heated by the nanotube element is, in preferred embodiments, a phase changing material, hi memory applications, the invention may be used as a small-scale CRAM capable of employing small amounts of current to induce rapid, large temperature changes in a chalcogenide material. Under various embodiments of the disclosed invention, the nanotube element is composed of a non-woven nanotube fabric which is either suspended from supports and positioned adjacent to the phase change material or is disposed on a substrate and in direct contact with the phase change material. A plurality of designs using various geometric orientations of nanotube fabrics, phase change materials, and drive and detection circuitry is disclosed. Additionally, methods of fabricating nanotube heat emitters are disclosed.
摘要翻译：使用纳米管元件作为焦耳加热元件用于存储器和其他应用的方法和系统。在一个方面，一种方法包括通过纳米管元件提供由驱动电路调节的电刺激，以加热邻近的物品。此外，检测电路电测量物品的状态。在优选实施例中，由纳米管元件加热的物品是相变材料。在记忆应用中，本发明可以用作能够使用少量电流以在硫族化物中快速，大的温度变化的小规模CRAM 材料。在所公开的发明的各种实施例中，纳米管元件由无纺布纳米管织物组成，该无纺布纳米管织物从支撑物悬挂并且邻近相变材料定位，或者设置在基底上并与相变材料直接接触。公开了使用纳米管织物，相变材料以及驱动和检测电路的各种几何取向的多个设计。另外，公开了制造纳米管热发射体的方法。

52. 发明授权

US08471238B2 Light emitters using nanotubes and methods of making same 有权
标题翻译：使用纳米管的发光体及其制作方法
公开(公告)号：US08471238B2
公开(公告)日：2013-06-25
申请号：US11227468
申请日：2005-09-15
申请人： Jonathan W. Ward , Mitchell Meinhold , Claude L. Bertin , Benjamin Schlatka , Brent M. Segal , Thomas Ruckes
发明人： Jonathan W. Ward , Mitchell Meinhold , Claude L. Bertin , Benjamin Schlatka , Brent M. Segal , Thomas Ruckes
IPC分类号： H01L29/06
CPC分类号： H01K1/04 , B82Y10/00 , B82Y20/00 , H01L51/0048 , H01L51/0052
摘要： Light emitters using nanotubes and methods of making same. A light emitter includes a nanotube article in electrical communication with a first and a second contact, a substrate having a predefined region with a relatively low thermal conductivity said region in predefined physical relation to said nanotube article; and a stimulus circuit in electrical communication with the first and second contacts. The stimulus circuit provides electrical stimulation sufficient to induce light emission from the nanotube article in the proximity of the predefined region. The predefined region is a channel formed in the substrate or a region of material with relatively low thermal conductivity. The light emitter can be integrated with semiconductor circuits including CMOS circuits. The light emitter can be integrated into optical driver circuits (on- and off-chip drivers) and opto-isolators.
摘要翻译：使用纳米管的发光体及其制作方法。光发射器包括与第一和第二接触电连通的纳米管制品，具有预定区域的基底，所述预定区域具有相对于所述纳米管制品预定的物理关系的相对低导热性的所述区域; 以及与第一和第二触点电连通的激励电路。刺激电路提供足以在预定区域附近从纳米管制品引发光发射的电刺激。预定区域是形成在衬底中的通道或具有相对较低热导率的材料区域。光发射器可以与包括CMOS电路的半导体电路集成。光发射器可以集成到光驱动器电路（片上和片外驱动器）和光隔离器中。

53. 发明授权

US08405189B1 Carbon nanotube (CNT) capacitors and devices integrated with CNT capacitors 有权
标题翻译：碳纳米管（CNT）电容器和与CNT电容集成的器件
公开(公告)号：US08405189B1
公开(公告)日：2013-03-26
申请号：US12946834
申请日：2010-11-15
申请人： Jonathan W. Ward , Quoc X. Ngo
发明人： Jonathan W. Ward , Quoc X. Ngo
IPC分类号： H01L21/02
CPC分类号： H01G4/33 , B82Y10/00 , H01G4/002 , H01G4/08 , H01L28/40 , H01L51/0048
摘要： An example of a carbon nanotube capacitor may include (i) a carbon nanotube film having carbon nanotubes and voids with dielectric material, (ii) conductive contacts and (iii) a dielectric layer. The carbon nanotube film may switch from a conductive state to a non-conductive state when a voltage is applied by creating an electrical break within the carbon nanotube film and providing a first conductive region and a second conductive region within the carbon nanotube film. The electrical break may separate the first conductive region from the second conductive region. The first and second conductive regions may store charge. An integrated device may include one or more transistors and one or more carbon nanotube capacitors. A method of making a carbon nanotube capacitor is also disclosed.
摘要翻译：碳纳米管电容器的实例可以包括（i）具有碳纳米管的碳纳米管膜和具有电介质材料的空隙，（ii）导电触点和（iii）电介质层。当通过在碳纳米管膜内产生电断裂并且在碳纳米管膜内提供第一导电区域和第二导电区域施加电压时，碳纳米管膜可以从导电状态切换到非导通状态。电断裂可以将第一导电区域与第二导电区域分离。第一和第二导电区域可以存储电荷。集成器件可以包括一个或多个晶体管和一个或多个碳纳米管电容器。还公开了制造碳纳米管电容器的方法。

54. 发明授权

US08366999B2 Nanotube fabric-based sensor systems and methods of making same 有权
标题翻译：基于纳米管织物的传感器系统及其制造方法
公开(公告)号：US08366999B2
公开(公告)日：2013-02-05
申请号：US12065857
申请日：2006-09-06
申请人： Jonathan W. Ward , Brent M. Segal
发明人： Jonathan W. Ward , Brent M. Segal
IPC分类号： G01N21/00 , H01L27/14
CPC分类号： G01N21/65 , B82Y15/00
摘要： Under one aspect, a system (100) for sensing the presense of an analyte in a fluid includes a nanotube sensor element including a plurality of nanotubes and positioned for exposure to a fluid; an optical source capable of generating optical radiation (102), the radiation having a source frequency and a fluence selected to generate a nonlinear optical response by the nanotube sensor element; an optical detector (110) capable of measuring the nonlinear optical response by the nanotube sensor element; and logic in electrical communications with the optical detector to sense the presense of an analyte in the fluid based on the nonlinear optical response measured by the optical detector.
摘要翻译：在一个方面，用于感测流体中分析物的脱色的系统（100）包括纳米管传感器元件，其包括多个纳米管并定位成暴露于流体; 能够产生光辐射（102）的光源，所述辐射具有选择的源频率和能量密度，以通过纳米管传感器元件产生非线性光学响应; 能够测量纳米管传感器元件的非线性光学响应的光学检测器（110）; 以及与光学检测器进行电通信的逻辑，以基于由光学检测器测量的非线性光学响应来感测流体中分析物的突出。

55. 发明授权

US08134220B2 Two-terminal nanotube devices including a nanotube bridge and methods of making same 有权
标题翻译：包括纳米管桥的两端纳米管装置及其制造方法
公开(公告)号：US08134220B2
公开(公告)日：2012-03-13
申请号：US12139910
申请日：2008-06-16
申请人： H. Montgomery Manning , Thomas Rueckes , Jonathan W. Ward , Brent M. Segal
发明人： H. Montgomery Manning , Thomas Rueckes , Jonathan W. Ward , Brent M. Segal
IPC分类号： G11C11/00 , H01L23/52 , H01L21/02
CPC分类号： H01L51/0591 , B82Y10/00 , G11C13/025 , H01L51/0048 , Y10S977/943
摘要： Nanotube switching devices having nanotube bridges are disclosed. Two-terminal nanotube switches include conductive terminals extending up from a substrate and defining a void in the substrate. Nantoube articles are suspended over the void or form a bottom surface of a void. The nanotube articles are arranged to permanently contact at least a portion of the conductive terminals. An electrical stimulus circuit in communication with the conductive terminals is used to generate and apply selected waveforms to induce a change in resistance of the device between relatively high and low resistance values. Relatively high and relatively low resistance values correspond to states of the device. A single conductive terminal and a interconnect line may be used. The nanotube article may comprise a patterned region of nanotube fabric, having an active region with a relatively high or relatively low resistance value. Methods of making each device are disclosed.
摘要翻译：公开了具有纳米管桥的纳米管开关器件。两端纳米管开关包括从衬底向上延伸并且在衬底中限定空隙的导电端子。纳米管制品悬浮在空隙上或形成空隙的底部表面。纳米管制品布置成永久地接触导电端子的至少一部分。使用与导电端子连通的电刺激电路来产生并施加所选择的波形以引起器件在较高和较低电阻值之间的电阻变化。相对较高且相对较低的电阻值对应于器件的状态。可以使用单个导电端子和互连线。纳米管制品可以包括具有相对较高或相对低的电阻值的有源区的纳米管织物的图案化区域。公开了制造每个装置的方法。

56. 发明授权

US08044388B2 Method of forming a carbon nanotube-based contact to semiconductor 有权
标题翻译：形成与半导体的碳纳米管基接触的方法
公开(公告)号：US08044388B2
公开(公告)日：2011-10-25
申请号：US12506878
申请日：2009-07-21
申请人： Jonathan W. Ward , Benjamin Schlatka , Mitchell Meinhold , Robert F. Smith , Brent M. Segal
发明人： Jonathan W. Ward , Benjamin Schlatka , Mitchell Meinhold , Robert F. Smith , Brent M. Segal
IPC分类号： H01L35/24
CPC分类号： H01L33/40 , B82Y20/00 , H01L21/28575 , H01L29/2003 , H01L29/417 , H01L29/452 , H01L33/32 , Y10S438/924 , Y10T428/30 , Y10T428/31678
摘要： Manufacturers encounter limitations in forming low resistance ohmic electrical contact to semiconductor material P-type Gallium Nitride (p-GaN), commonly used in photonic applications, such that the contact is highly transparent to the light emission of the device. Carbon nanotubes (CNTs) can address this problem due to their combined metallic and semiconducting characteristics in conjunction with the fact that a fabric of CNTs has high optical transparency. The physical structure of the contact scheme is broken down into three components, a) the GaN, b) an interface material and c) the metallic conductor. The role of the interface material is to make suitable contact to both the GaN and the metal so that the GaN, in turn, will make good electrical contact to the metallic conductor that interfaces the device to external circuitry. A method of fabricating contact to GaN using CNTs and metal while maintaining protection of the GaN surface is provided.
摘要翻译：制造商在与通常用于光子应用的半导体材料P型氮化镓（p-GaN）形成低电阻欧姆电接触方面遇到限制，使得接触对器件的发光是高度透明的。碳纳米管（CNT）由于其组合的金属和半导体特性以及CNT的织物具有高的光学透明度的事实，可以解决这个问题。接触方案的物理结构分为三个部分：a）GaN，b）界面材料和c）金属导体。界面材料的作用是使GaN和金属两者适当地接触，这样GaN又将与将器件与外部电路接口的金属导体进行良好的电接触。提供了一种使用CNT和金属制造与GaN接触的方法，同时保持了GaN表面的保护。

57. 发明授权

US07927992B2 Carbon nanotubes for the selective transfer of heat from electronics 有权
标题翻译：用于从电子器件选择性转移热量的碳纳米管
公开(公告)号：US07927992B2
公开(公告)日：2011-04-19
申请号：US12066063
申请日：2006-09-05
申请人： Jonathan W. Ward , Claude L. Bertin , Brent M. Segal
发明人： Jonathan W. Ward , Claude L. Bertin , Brent M. Segal
IPC分类号： H01L21/20
CPC分类号： H01L23/373 , H01L23/433 , H01L24/28 , H01L24/31 , H01L2224/0554 , H01L2224/05568 , H01L2224/05573 , H01L2224/16 , H01L2224/73253 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01074 , H01L2924/01079 , H01L2924/01082 , H01L2924/1306 , H01L2924/14 , Y10S977/80 , H01L2924/00 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： Under one aspect, a method of cooling a circuit element includes providing a thermal reservoir having a temperature lower than an operating temperature of the circuit element; and providing a nanotube article in thermal contact with the circuit element and with the reservoir, the nanotube article including a non-woven fabric of nanotubes in contact with other nanotubes to define a plurality of thermal pathways along the article, the nanotube article having a nanotube density and a shape selected such that the nanotube article is capable of transferring heat from the circuit element to the thermal reservoir.
摘要翻译：在一个方面，冷却电路元件的方法包括提供具有低于电路元件的工作温度的温度的热存储器; 并且提供与所述电路元件和所述储存器热接触的纳米管制品，所述纳米管制品包括与其它纳米管接触的纳米管的无纺织物以限定沿着所述制品的多个热路径，所述纳米管制品具有纳米管密度和形状，使得纳米管制品能够将热量从电路元件传递到热储存器。

58. 发明授权

US07839615B2 Nanotube ESD protective devices and corresponding nonvolatile and volatile nanotube switches 有权
标题翻译：纳米管ESD保护装置和相应的非易失性和挥发性纳米管开关
公开(公告)号：US07839615B2
公开(公告)日：2010-11-23
申请号：US12509993
申请日：2009-07-27
申请人： Claude L. Bertin , Brent M. Segal , Thomas Rueckes , Jonathan W. Ward
发明人： Claude L. Bertin , Brent M. Segal , Thomas Rueckes , Jonathan W. Ward
IPC分类号： H02H9/00
CPC分类号： H01L23/62 , B82Y10/00 , G11C13/025 , G11C17/16 , G11C17/165 , G11C23/00 , G11C2213/17 , H01H1/0094 , H01L23/60 , H01L27/0248 , H01L27/0251 , H01L51/0048 , H01L2224/16 , H01L2924/01019 , H01L2924/0102 , H01L2924/01025 , H01L2924/01046 , H01L2924/01066 , H01L2924/01068 , H01L2924/01077 , H01L2924/01079 , H01L2924/09701 , H01L2924/12044 , H01L2924/19103 , H01L2924/19104 , H01L2924/19105 , H01L2924/3011 , H05K1/0259 , Y10T29/49105 , Y10T29/49117 , Y10T29/49124 , Y10T29/49204
摘要： Nanotube ESD protective devices and corresponding nonvolatile and volatile nanotube switches. An electrostatic discharge (ESD) protection circuit for protecting a protected circuit is coupled to an input pad. The ESD circuit includes a nanotube switch electrically having a control. The switch is coupled to the protected circuit and to a discharge path. The nanotube switch is controllable, in response to electrical stimulation of the control, between a de-activated state and an activated state. The activated state creates a current path so that a signal on the input pad flows to the discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit. The nanotube switch, the input pad, and the protected circuit may be on a semiconductor chip. The nanotube switch may be on a chip carrier. The deactivated and activated states may be volatile or non-volatile depending on the embodiment. The ESD circuit may be repeatedly programmed between the activated and deactivated states so as to repeatedly activate and deactivate ESD protection of the protected circuit. The nanotube switch provides protection based on the magnitude of the signal on the input pad.
摘要翻译：纳米管ESD保护装置和相应的非易失性和挥发性纳米管开关。用于保护受保护电路的静电放电（ESD）保护电路耦合到输入焊盘。 ESD电路包括电子控制的纳米管开关。开关耦合到保护电路和放电路径。纳米管开关可以响应于控制的电刺激而被控制在去激活状态和激活状态之间。激活状态产生电流路径，使得输入焊盘上的信号流到放电路径，使输入焊盘处的信号保持在受保护电路的预定可操作范围内。纳米管开关，输入焊盘和受保护电路可以在半导体芯片上。纳米管开关可以在芯片载体上。根据实施例，去激活状态和激活状态可以是易失性的或非易失性的。可以在激活和去激活状态之间重复地编程ESD电路，以便重复激活和去激活受保护电路的ESD保护。纳米管开关基于输入焊盘上的信号幅度提供保护。

59. 发明申请

US20100147657A1 NANOTUBE ESD PROTECTIVE DEVICES AND CORRESPONDING NONVOLATILE AND VOLATILE NANOTUBE SWITCHES 审中-公开
标题翻译： NANOTUBE ESD保护器件和相应的非易失性和易失性纳米管开关
公开(公告)号：US20100147657A1
公开(公告)日：2010-06-17
申请号：US12537651
申请日：2009-08-07
申请人： Rahul Sen , Ramesh Sivarajan , Thomas Rueckes , Jonathan W. Ward
发明人： Rahul Sen , Ramesh Sivarajan , Thomas Rueckes , Jonathan W. Ward
IPC分类号： H01H59/00
CPC分类号： H01L23/60 , B82Y10/00 , G11C13/025 , G11C17/16 , G11C17/165 , G11C23/00 , G11C2213/17 , H01H1/0094 , H01L23/62 , H01L24/16 , H01L27/0248 , H01L27/0251 , H01L51/0048 , H01L2224/131 , H01L2224/16 , H01L2924/0001 , H01L2924/01012 , H01L2924/01019 , H01L2924/0102 , H01L2924/01025 , H01L2924/01046 , H01L2924/01066 , H01L2924/01077 , H01L2924/01079 , H01L2924/09701 , H01L2924/12043 , H01L2924/12044 , H01L2924/19041 , H01L2924/19043 , H01L2924/19103 , H01L2924/19104 , H01L2924/30105 , H05K1/0259 , H01L2924/014 , H01L2224/13099 , H01L2924/00
摘要： Device design methods for use with non-volatile nanotube switches are disclosed. In a first aspect of the present disclosure, a plurality of nonconductive nanoparticles is adhered to a nanotube element such as to provide an isolation barrier from a control electrode and further provide a switching gap above that element. In a second aspect of the present disclosure, conductive nanoparticles are dispersed and adhered to either a control electrode or to a nanotube element positioned over said electrode element such that the interface area (that is, the area of the nanotube element which comes into contact with the control electrode) is minimized. In a third aspect of the present disclosure, a monolayer network of nonconductive nanotubes is used to provide an isolation barrier between a control electrode and a nanotube element. Voids or spaces in said monolayer network further provides switching gaps.
摘要翻译：公开了用于非挥发性纳米管开关的器件设计方法。在本公开的第一方面，多个非导电纳米颗粒粘附到纳米管元件，以便提供与控制电极的隔离屏障，并且还提供高于该元件的切换间隙。在本公开的第二方面中，导电纳米颗粒被分散并粘附到位于所述电极元件上方的控制电极或纳米管元件上，使得界面面积（即，纳米管元件的与控制电极）最小化。在本公开的第三方面中，使用非导电纳米管的单层网络来提供控制电极和纳米管元件之间的隔离屏障。所述单层网络中的空隙或空隙进一步提供切换间隙。

60. 发明申请

US20100012927A1 DEVICES HAVING VERTICALLY-DISPOSED NANOFABRIC ARTICLES AND METHODS OF MAKING THE SAME 有权
标题翻译：具有垂直处理的纳米制品的装置及其制造方法
公开(公告)号：US20100012927A1
公开(公告)日：2010-01-21
申请号：US11526364
申请日：2006-09-25
申请人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
发明人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
IPC分类号： H01L29/84 , H01L51/30
CPC分类号： G11C23/00 , B82Y10/00 , G11C13/025 , G11C2213/16 , G11C2213/81 , H01H1/0094 , H01L21/76838 , H01L27/10 , Y10S977/724 , Y10S977/742 , Y10S977/796 , Y10S977/856 , Y10S977/888 , Y10S977/943 , Y10T428/24893 , Y10T428/24917
摘要： Electro-mechanical switches and memory cells using vertically-oriented nanofabric articles and methods of making the same. Under one aspect, a nanotube device includes a substantially horizontal substrate having a vertically oriented feature; and a nanotube film substantially conforming to a horizontal feature of the substrate and also to at least the vertically oriented feature. Under another aspect, an electromechanical device includes a structure having a major horizontal surface and a channel formed therein, the channel having first and second wall electrodes defining at least a portion of first and second vertical walls of the channel; first and second nanotube articles vertically suspended in the channel and in spaced relation to a corresponding first and second wall electrode, and electromechanically deflectable in a horizontal direction toward or away from the corresponding first and second wall electrode in response to electrical stimulation.
摘要翻译：使用垂直取向的纳米制品的机电开关和存储单元及其制造方法。在一个方面，纳米管装置包括具有垂直取向特征的基本水平的基底; 以及基本上符合衬底的水平特征以及至少垂直取向的特征的纳米管膜。在另一方面，机电装置包括具有主要水平表面和形成在其中的通道的结构，所述通道具有限定通道的第一和第二垂直壁的至少一部分的第一和第二壁电极; 垂直悬挂在通道中并且与对应的第一和第二壁电极间隔开的第一和第二纳米管制品，并且响应于电刺激而在水平方向上以机电方式偏向或远离对应的第一和第二壁电极。

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