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    • 58. 发明申请
    • TAILORED BIPOLAR TRANSISTOR DOPING PROFILE FOR IMPROVED RELIABILITY
    • 定制的双极晶体管转换配置文件,以提高可靠性
    • US20080217742A1
    • 2008-09-11
    • US11684142
    • 2007-03-09
    • Jeffrey B. JohnsonEdward J. NowakAndreas D. StrickerBenjamin T. Voegeli
    • Jeffrey B. JohnsonEdward J. NowakAndreas D. StrickerBenjamin T. Voegeli
    • H01L29/732
    • H01L29/7322H01L29/0821H01L29/1004H01L29/66272
    • Bipolar transistor device structures that improve bipolar device reliability with little or no negative impact on device performance. In one embodiment, the bipolar device has a collector of first conductivity type material formed in a substrate, a base of a second conductivity type material including an extrinsic base layer and an intrinsic base layer, a raised emitter of a first conductivity type semiconductor material formed on the intrinsic base layer, and, a dielectric material layer separating the intrinsic base region and the raised emitter region, and, a thin “shunt” layer of dopant of second conductivity type material added to the region below the emitter dielectric layer. In a second embodiment, a selectively implanted collector (pedestal implant) is added to the vertical bipolar transistor device to enable a reduction in overall subcollector doping level to improve reliability without sacrificing device performance. These solutions add no additional masking steps and only one additional implantation step.
    • 双极晶体管器件结构,可以很好地改善双极器件的可靠性,对器件性能的影响很小或没有负面影响 在一个实施例中,双极器件具有形成在衬底中的第一导电类型材料的集电体,包括非本征基极层和本征基极层的第二导电类型材料的基极,形成的第一导电类型半导体材料的凸起发射极 在本征基极层上,以及分离本征基极区域和凸起的发射极区域的介电材料层,以及添加到发射极电介质层下方的区域的第二导电型材料的掺杂剂的薄的“分流”层。 在第二实施例中,将选择性注入的集电极(基座注入)添加到垂直双极晶体管器件,以使整体子集电极掺杂水平降低,以提高可靠性而不牺牲器件性能。 这些解决方案不会增加额外的掩蔽步骤和仅一个额外的植入步骤。