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    • 52. 发明授权
    • Resist pattern forming method
    • 抗蚀图案形成方法
    • US07780366B2
    • 2010-08-24
    • US11831622
    • 2007-07-31
    • Kunie OgataKoki NishimukoHiroshi TomitaYoshio KimuraRyouichi UemuraMichio Tanaka
    • Kunie OgataKoki NishimukoHiroshi TomitaYoshio KimuraRyouichi UemuraMichio Tanaka
    • G03D5/00G03B27/32
    • H01L21/67253G03F7/162G03F7/3021H01L21/6715
    • A resist pattern forming method using a coating and developing apparatus and an aligner being connected thereto which are controlled to form a resist film on a surface of a substrate with a base film and a base pattern formed thereon, followed by inspecting at least one of a plurality of measurement items selected from: reflection ratio and film thickness of the base film and the resist film, line width after a development, an accuracy that the base pattern matches with a resist pattern, a defect on the surface after the development, etc. A parameter subject to amendment is selected based on corresponding data of each measurement item, such as the film thickness of the resist and the line width after the development, and amendment of the parameter is performed. This results in a reduced workload of an operator, and the appropriate amendment can be performed.
    • 使用涂覆和显影装置和对准器连接的抗蚀剂图案形成方法被控制以在其上形成有基膜和基底图案的基板的表面上形成抗蚀剂膜,然后检查至少一个 选自以下的多个测量项目:基膜和抗蚀剂膜的反射率和膜厚度,显影后的线宽度,基底图案与抗蚀剂图案匹配的精度,显影后的表面上的缺陷等。 基于每个测量项目的对应数据(例如抗蚀剂的膜厚度和显影后的线宽度)来选择修改参数,并且修改参数。 这导致操作者的工作量减少,并且可以执行适当的修改。
    • 53. 发明申请
    • SUBSTRATE PROCESSING SYSTEM AND METHOD OF CONTROLLING THE SAME
    • 基板处理系统及其控制方法
    • US20100116293A1
    • 2010-05-13
    • US12690747
    • 2010-01-20
    • Yoshio KimuraTakahiro Okubo
    • Yoshio KimuraTakahiro Okubo
    • B08B3/02
    • H01L21/67178H01L21/67184H01L21/6719
    • A process system includes a plurality of processing modules each processing a substrate with a process liquid. There is disposed a dispensing mechanism that dispenses the process liquid to the vertically arranged modules. The dispensing mechanism is provided with a process liquid supply source, and pumps corresponding to the respective processing modules. Each pump temporarily stores therein the process liquid which has been pressure-fed through a riser piping from the process liquid supply source by a pressing apparatus, and delivers the process liquid from an outlet. There are disposed nozzles each having a discharge port and discharging the process liquid to the corresponding processing module. Delivery pipings connecting the outlets of the pumps with the discharge ports of the corresponding nozzles have identical length to each other.
    • 处理系统包括多个处理模块,每个处理模块用处理液处理衬底。 设置了将处理液体分配给垂直排列的模块的分配机构。 分配机构设置有处理液体供应源和对应于各个处理模块的泵。 每个泵临时存储已经通过加压装置从处理液体供给源通过提升管道进给的处理液体,并且从出口输送处理液体。 设有各自具有排出口并且将处理液体排出到相应的处理模块的喷嘴。 将泵的出口与相应喷嘴的排出口连接的输送管道彼此具有相同的长度。
    • 60. 发明授权
    • Thermophotovoltaic electric power generating apparatus and power generating method thereof
    • 热电发电装置及其发电方法
    • US06768049B2
    • 2004-07-27
    • US10114468
    • 2002-04-03
    • Hideki NakayamaYoshio KimuraKiyohito Murata
    • Hideki NakayamaYoshio KimuraKiyohito Murata
    • H01L31058
    • H02S10/30
    • A thermophotovoltaic power generating apparatus that heats an emitter by a combustion gas produced by fuel and air, and converts light radiated from the emitter into electric power by using photoelectric conversion elements. An air pipe is disposed in an internal hollow portion of the emitter, and a combustion gas supplier for supplying the combustion gas toward the emitter is disposed outside the emitter. The photoelectric conversion elements that receive radiated light are disposed further outside of the emitter. Therefore, residual heat of the combustion gas that has heated the emitter is utilized to heat the air needed for the combustion of fuel, and light radiated from the heated emitter is received by the photoelectric conversion elements. Thus, electric power generating efficiency can be improved.
    • 一种通过燃料和空气产生的燃烧气体对发射体进行加热并且通过使用光电转换元件将从发射极辐射的光转换成电力的热光伏发电装置。 空气管设置在发射器的内部中空部分中,并且用于将燃烧气体朝向发射器供应的燃烧气体供应器设置在发射器的外部。 接收辐射光的光电转换元件设置在发射极的外侧。 因此,利用加热发射体的燃烧气体的余热来加热燃料燃烧所需的空气,并且由加热的发射体辐射的光被光电转换元件接收。 因此,能够提高发电效率。