专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

51. 发明授权

US07109485B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US07109485B2
公开(公告)日：2006-09-19
申请号：US11108731
申请日：2005-04-19
申请人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
发明人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
IPC分类号： H01J37/21
CPC分类号： G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
摘要： It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
摘要翻译：本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器，发射的带电粒子束，以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

52. 发明授权

US07078688B2 Shape measuring device and shape measuring method 有权
标题翻译：形状测量装置和形状测量方法
公开(公告)号：US07078688B2
公开(公告)日：2006-07-18
申请号：US10927536
申请日：2004-08-27
申请人： Masato Kazui , Mitsuji Ikeda , Atsushi Takane
发明人： Masato Kazui , Mitsuji Ikeda , Atsushi Takane
IPC分类号： H01J37/28 , G01N23/203
CPC分类号： G01B15/04 , H01J2237/2816
摘要： This invention is to provide a shape measuring device and a shape measuring method that can accurately measure a cross-sectional shape or a three-dimensional shape of a sample without using matching of characteristics. A shape measuring apparatus comprises a charged particle beam apparatus comprising a processor for measuring detected charged particles signal generated from the sample. The charged particle beam is irradiated to sample at first angle to generate a first signal and second angle to generate second signal. The processor selects a parameter indicating a relation between the first signal and a height of the sample or an inclination angle of the specimen until the first signal which achieves the second signal.
摘要翻译：本发明提供一种形状测量装置和形状测量方法，其可以在不使用特性匹配的情况下精确地测量样品的横截面形状或三维形状。一种形状测量装置包括带电粒子束装置，其包括用于测量从样本产生的检测到的带电粒子信号的处理器。带电粒子束以第一角度照射到样品上以产生第一信号和第二角度以产生第二信号。处理器选择指示第一信号和样本高度之间的关系的参数或样本的倾斜角，直到实现第二信号的第一信号为止。

53. 发明授权

US06936818B2 Charged particle beam apparatus 失效
标题翻译：带电粒子束装置
公开(公告)号：US06936818B2
公开(公告)日：2005-08-30
申请号：US10681116
申请日：2003-10-09
申请人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
发明人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
IPC分类号： G01Q10/00 , G01Q30/04 , G01Q30/02 , H01J37/22 , H01J37/21
CPC分类号： G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
摘要： It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
摘要翻译：本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器，发射的带电粒子束，以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

54. 发明申请

US20050061973A1 Shape measuring device and shape measuring method 有权
标题翻译：形状测量装置和形状测量方法
公开(公告)号：US20050061973A1
公开(公告)日：2005-03-24
申请号：US10927536
申请日：2004-08-27
申请人： Masato Kazui , Mitsuji Ikeda , Atsushi Takane
发明人： Masato Kazui , Mitsuji Ikeda , Atsushi Takane
IPC分类号： G01B15/04 , H01J37/28
CPC分类号： G01B15/04 , H01J2237/2816
摘要： This invention is to provide a shape measuring device and a shape measuring method that can accurately measure a cross-sectional shape or a three-dimensional shape of a sample without using matching of characteristics. A shape measuring apparatus comprises a charged particle beam apparatus comprising a processor for measuring detected charged particles signal generated from the sample. The charged particle beam is irradiated to sample at first angle to generate a first signal and second angle to generate second signal. The processor selects a parameter indicating a relation between the first signal and a height of the sample or an inclination angle of the specimen until the first signal which achieves the second signal.
摘要翻译：本发明提供一种形状测量装置和形状测量方法，其可以在不使用特性匹配的情况下精确地测量样品的横截面形状或三维形状。一种形状测量装置包括带电粒子束装置，其包括用于测量从样本产生的检测到的带电粒子信号的处理器。带电粒子束以第一角度照射到样品上以产生第一信号和第二角度以产生第二信号。处理器选择指示第一信号和样本高度之间的关系的参数或样本的倾斜角，直到实现第二信号的第一信号为止。

55. 发明授权

US06265077B1 Ceramic articles and method for manufacturing the same 失效
标题翻译：陶瓷制品及其制造方法
公开(公告)号：US06265077B1
公开(公告)日：2001-07-24
申请号：US09260941
申请日：1999-03-02
申请人： Mitsuji Ikeda , Masao Nishioka , Naotaka Katoh
发明人： Mitsuji Ikeda , Masao Nishioka , Naotaka Katoh
IPC分类号： B32B904
CPC分类号： C04B41/5059 , C23C16/0236 , C23C16/325 , C23C16/4581 , Y10T428/1414 , Y10T428/1443
摘要： A ceramic article having a base made of an insulating ceramic material, the insulating ceramic material includes a metal element, and a conductive surface layer provided on the base, wherein the conductive surface layer includes carbon atoms as its main component, and wherein the conductive surface layer further includes silicon atoms and atoms of the metal element present in the insulating ceramic material.
摘要翻译：一种陶瓷制品，其具有由绝缘陶瓷材料制成的基底，所述绝缘陶瓷材料包括金属元件和设置在所述基底上的导电表面层，其中所述导电表面层包括碳原子作为其主要成分，并且其中所述导电表面层还包括存在于绝缘陶瓷材料中的金属元素的硅原子和原子。

56. 发明授权

US5410696A Method of processing a program by parallel processing, and a processing unit thereof 失效
标题翻译：通过并行处理处理程序的方法及其处理单元
公开(公告)号：US5410696A
公开(公告)日：1995-04-25
申请号：US32066
申请日：1993-03-16
申请人： Mitsuho Seki , Mitsuji Ikeda , Yoshikazu Kiyoshige
发明人： Mitsuho Seki , Mitsuji Ikeda , Yoshikazu Kiyoshige
IPC分类号： G06F15/16 , G06F9/44 , G06F9/50 , G06F15/177 , G06F9/38
CPC分类号： G06F8/45
摘要： In order to process a program by parallel processing using a plurality of processors, the program is divided into a plurality of partial programs. Then one or more expressions are derived, the or each expression expressing a relationship between the partial programs, such as which can be executed independently and which require the execution of another partial program. The expression or expressions can then be investigated to determine which has a desired characteristic, such as a characteristic corresponding to uniform loading of the processors. The expression can also be varied, to give more options for the selection of the expression with the desired characteristic. Then the partial programs can be distributed to the processors on the basis of the relationship corresponding to the expression which has the desired characteristic. Furthermore, when the partial programs are being executed by the processors, any processor which has completed its processing broadcasts a signal to the other processors, which may then re-assign one or more of their partial programs. In this way, parallel processing can be carried out quickly, with substantially uniform loading of the processors.
摘要翻译：为了通过使用多个处理器的并行处理来处理程序，程序被分成多个部分程序。然后导出一个或多个表达式，该表达式或每个表达式表示部分程序之间的关系，例如哪些可以独立执行，哪些需要执行另一个部分程序。然后可以调查表达式或表达式以确定哪个具有期望的特性，例如对应于处理器的均匀加载的特性。该表达式也可以变化，以给出具有所需特征的表达选择的更多选择。然后，可以基于与具有期望特性的表达式对应的关系将部分程序分配给处理器。此外，当处理器执行部分程序时，已经完成其处理的任何处理器向其他处理器广播信号，然后可以重新分配其部分程序中的一个或多个。以这种方式，可以快速地执行并行处理，同时处理器的加载基本均匀。

57. 发明授权

US5136680A Optical fiber built-in type composite insulator and method for producing the same 失效
标题翻译：光纤内置型复合绝缘子及其制造方法
公开(公告)号：US5136680A
公开(公告)日：1992-08-04
申请号：US719050
申请日：1991-06-21
申请人： Shoji Seike , Koichi Mori , Mitsuji Ikeda , Masayuki Nozaki , Hisakazu Okajima , Hiroyuki Katsukawa , Kazumi Nakanishi , Kenji Doi
发明人： Shoji Seike , Koichi Mori , Mitsuji Ikeda , Masayuki Nozaki , Hisakazu Okajima , Hiroyuki Katsukawa , Kazumi Nakanishi , Kenji Doi
IPC分类号： G02B6/44 , H01B17/00
CPC分类号： G02B6/4417 , G02B6/442 , G02B6/4471 , H01B17/005
摘要： An excellent optical fiber built-in type composite insulator including at least two insulator bodies each having a penetration bore, at least one optical fiber inserted in the penetration bores, and sealing structures for the penetration bores of the insulator bodies and for a joining layer of opposing end surfaces of adjacent insulator bodies, is provided, which effectively prevents leakage of inner silicone grease, bending and breakage of the optical fiber, leakage of electric current along the penetration bores, short circuited trouble, and destruction of the insulator bodies, improves joining strength of the opposing end surfaces of the insulator bodies, and maintains the joining strength for a long period, affords a change of numbers of the insulator bodies, and facilitates the production. A method of producing such composite insulator is also provided.

58. 发明授权

US08953894B2 Pattern matching method and image processing device 有权
标题翻译：模式匹配方法和图像处理装置
公开(公告)号：US08953894B2
公开(公告)日：2015-02-10
申请号：US13122151
申请日：2009-10-02
申请人： Yoshimichi Sato , Mitsuji Ikeda , Fumihiro Sasajima
发明人： Yoshimichi Sato , Mitsuji Ikeda , Fumihiro Sasajima
IPC分类号： G06K9/00 , G06K9/62 , H01J37/28 , G06T7/00 , H01J37/22
CPC分类号： H01J37/28 , G06K9/00127 , G06K2209/403 , G06T7/74 , G06T2207/10061 , G06T2207/30148 , H01J37/222 , H01J2237/24592
摘要： A pattern matching method for a scanning electron microscope comprises a step of performing pattern matching of only an upper layer pattern between an image (101) in which a pattern consisting of plural layers is represented and a template (104) in which the upper layer pattern of the plural layer pattern is selectively represented, thereby identifying the position of the pattern consisting of the plural layers. Then, information about the upper layer pattern is subtracted from the image (101), thus extracting shape information (108) about the lower layer pattern. Consequently, stable positioning or selective information extraction on a certain layer is enabled regardless of the state of the depths of a pattern formed in three dimensions or of the charge state of a sample.
摘要翻译：用于扫描电子显微镜的图案匹配方法包括在表示由多个层组成的图案的图像（101）和仅具有上层图案的模板（104）之间执行仅上层图案的图案匹配的步骤，选择性地表示多层图案，由此识别由多层组成的图案的位置。然后，从图像（101）中减去关于上层图案的信息，从而提取关于下层图案的形状信息（108）。因此，无论在三维或样品的充电状态中形成的图案的深度的状态如何，都能够使特定层上的稳定定位或选择性信息提取。

59. 发明授权

US08200006B2 Image processing apparatus for analysis of pattern matching failure 有权
标题翻译：用于分析图案匹配故障的图像处理装置
公开(公告)号：US08200006B2
公开(公告)日：2012-06-12
申请号：US12434786
申请日：2009-05-04
申请人： Mitsuji Ikeda , Tatsuya Maeda , Osamu Nasu , Fumihiro Sasajima
发明人： Mitsuji Ikeda , Tatsuya Maeda , Osamu Nasu , Fumihiro Sasajima
IPC分类号： G09K9/00
CPC分类号： G06T7/001 , G01N21/95607 , G06T2207/30148
摘要： Information indicating the reason for a failure of template matching is provided. Difference information between a first image, which is referred to as a template, and a third image that is selected by the operator from a second image and that is larger than the template is displayed.
摘要翻译：提供指示模板匹配失败的原因的信息。显示被称为模板的第一图像与操作者从第二图像选择并且大于模板的第三图像之间的差异信息。

60. 发明申请

US20110262043A1 PATTERN MATCHING METHOD AND IMAGE PROCESSING DEVICE 有权
标题翻译：图案匹配方法和图像处理装置
公开(公告)号：US20110262043A1
公开(公告)日：2011-10-27
申请号：US13122151
申请日：2009-10-02
申请人： Yoshimichi Sato , Mitsuji Ikeda , Fumihiro Sasajima
发明人： Yoshimichi Sato , Mitsuji Ikeda , Fumihiro Sasajima
IPC分类号： G06K9/62
CPC分类号： H01J37/28 , G06K9/00127 , G06K2209/403 , G06T7/74 , G06T2207/10061 , G06T2207/30148 , H01J37/222 , H01J2237/24592
摘要： A pattern matching method for a scanning electron microscope comprises a step of performing pattern matching of only an upper layer pattern between an image (101) in which a pattern consisting of plural layers is represented and a template (104) in which the upper layer pattern of the plural layer pattern is selectively represented, thereby identifying the position of the pattern consisting of the plural layers. Then, information about the upper layer pattern is subtracted from the image (101), thus extracting shape information (108) about the lower layer pattern. Consequently, stable positioning or selective information extraction on a certain layer is enabled regardless of the state of the depths of a pattern formed in three dimensions or of the charge state of a sample.
摘要翻译：用于扫描电子显微镜的图案匹配方法包括在表示由多个层组成的图案的图像（101）和仅具有上层图案的模板（104）之间执行仅上层图案的图案匹配的步骤，选择性地表示多层图案，由此识别由多层组成的图案的位置。然后，从图像（101）中减去关于上层图案的信息，从而提取关于下层图案的形状信息（108）。因此，无论在三维或样品的充电状态中形成的图案的深度的状态如何，都能够使特定层上的稳定定位或选择性信息提取。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式