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51. 发明专利

JPH10161046A OPTICAL WAVEGUIDE TYPE OPTICAL SWITCH AND ITS PRODUCING METHOD 失效
公开(公告)号：JPH10161046A
公开(公告)日：1998-06-19
申请号：JP32162296
申请日：1996-12-02
申请人： HITACHI LTD
发明人： HORINO MASAYA , SATOU KAZUYASU , HARADA TAKESHI , AKASHI TERUHISA , MURANISHI MASARU , KOMATSU AYAFUMI
IPC分类号： G02B26/08
摘要： PROBLEM TO BE SOLVED: To suppress the warping of a substrate and to prevent the deterioration of optical coupling efficiency so as to obtain a switch by means of a low cost with small insertion loss by forming an optical waveguide path by means of an organic material. SOLUTION: The switch consists of an SUS 304 substrate 8, a cantilever 9 which is formed in the hollow part of the SUS 304 substrate 8 in a mobile state and where a tip is connected, a mobile side optical waveguide 2 formed on the cantilever 9, driving mechanism consisting of a magnetic film 3 and an electromagnetic actuator 4, a fixed side optical waveguide 6 receiving an optical signal from the mobile side optical waveguide 2, an input fiber 1 making light incident to the mobile side optical waveguide 2 and an output side optical fiber 5 taking-out the optical signal from the fixed side optical waveguide 6. The optical waveguide paths 2 and 6 are formed by the organic material in an optical waveguide type optical switch with this kinds of configuration. In the optical switch, the contact part of a connecting member and the substrate is projected from an organic material layer in the both of the connecting members of the optical waveguides 2 and 6 and also the substrate at a position where the connecting members are brought into contact at the time of changing-over an optical path.

52. 发明专利

JPH09259467A INFORMATION RECORDING MEDIUM, MASTER DISK AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH09259467A
公开(公告)日：1997-10-03
申请号：JP6248196
申请日：1996-03-19
申请人： HITACHI LTD
发明人： MURANISHI MASARU , SATOU KAZUYASU , SAEGUSA SHOZO , HORINO MASAYA
IPC分类号： G11B5/73 , G11B5/82 , G11B5/84 , G11B7/24 , G11B7/26 , G11B11/10 , G11B11/105 , G11B23/00
摘要： PROBLEM TO BE SOLVED: To reduce the manufacturing error of a recording track generated at the time of manufacturing an information recording medium or a master disk by constituting a disk-shaped substrate so that thin films are laminated in the radial direction of the disk. SOLUTION: The information recording medium 1 is provided with a cylindrical or disk like core 2 at the center and constituted so that two kinds of thin films 3, 4 are spirally deposited. Further, the thin film 3 is recessed against the thin film 4 at the sight on the cross section nearly perpendicular to a center shaft of the core 2, and a recording film 5 is formed on the surface. Thus, the spiral or concentric structure is manufactured, and by cutting it by the surface perpendicular to the center shaft, the spiral the concentric circle appeared on the section is used as the recording track.

53. 发明专利

JPH05315400A BONDER FOR ELECTRONIC CIRCUIT DEVICE 失效
公开(公告)号：JPH05315400A
公开(公告)日：1993-11-26
申请号：JP11916592
申请日：1992-05-12
申请人： HITACHI LTD
发明人： SAKATA TOMOAKI , ODAJIMA HITOSHI , TANAKA KATSUHISA , MURASE TOMOHIKO , SATO RYOHEI , NISHIKAWA TORU , KONO AKIOMI , HORINO MASAYA , HAYASHIDA TETSUYA , SAWARA KUNIZO
IPC分类号： H01L21/60
摘要： PURPOSE:To improve reliability and producibility of solder bonding of an electronic circuit device which is bonded without using flux by providing a loader part, an unloader part and each treatment chamber with a carrier means which can receive a part and a tray from a preceding process and deliver them to a following process. CONSTITUTION:A loader part 1 which supplies a tray whereon a plurality of parts to be bonded are mounted at a unit of each tray and a surface cleaning chamber 2 which is held varuum, removes a coatiang of a surface of the parts to be bonded of each part and carries them to a following process are provided. An alignment chamber 3 is also provided which pressurizes and joints a position detection part which detects position relation of a bonding part of each part and the bonding part of each part charged with a specified pressure of nonoxidizing atmosphere after alignment and carries the jointed parts to a following process. An unloader part 5 for carrying out the jointed parts and load lock chambers 6, 7, 8 for matching atmosphere between parts are provided.

54. 发明专利

JPH04162342A CONTROL SYSTEM FOR IONLESS ETCHING DEVICE 失效
公开(公告)号：JPH04162342A
公开(公告)日：1992-06-05
申请号：JP28725590
申请日：1990-10-26
申请人： HITACHI ELECTR ENG , HITACHI LTD
发明人： UMETSU HIROSHI , KONO AKIOMI , SATO NOBUKATSU , HORINO MASAYA
IPC分类号： H01L21/302 , H01J37/305
摘要： PURPOSE:To perform an etching process relating to a workpiece in a stable condition by detecting a current value flowing in an atom source gun, and adjusting a supply amount of argon gas or a degree of vacuum in a vacuum chamber so that this current value obtains a reference current value. CONSTITUTION:In an atom source gun 2, high voltage is applied to an electrode to activate an argon atom while supplying argon gas to a gun main unit 2a, and an Ar beam is irradiated from an opening part for beam irradiation of the argon toward a workpiece 5, set up on a sample bed 3, to perform etching of a surface of the workpiece 5. In order to control acceleration and an irradiation amount of the Ar beam, irradiated from the atom source gun 2, so as to always obtain a fixed value, a current of the atom source gun 2 is monitored, and when a value of this current is changed, a supply amount of argon gas, supplied to the gun main unit 2a, or a vacuum pressure in a vacuum chamber 1 is controlled. In this way, the workpiece 5 can be worked in a stable condition.

55. 发明专利

JPH04160357A QUANTITATIVELY MEASURING APPARATUS FOR PARTIAL PRESSURE OF GAS 失效
公开(公告)号：JPH04160357A
公开(公告)日：1992-06-03
申请号：JP28425890
申请日：1990-10-24
申请人： HITACHI LTD
发明人： KONO AKIOMI , HORINO MASAYA , KANAMARU MASATOSHI , SAWARA KUNIZO
IPC分类号： G01L21/30 , C23C14/54 , G01N27/62 , H01J49/42
摘要： PURPOSE:To calibrate a quadruplex electrode mass analyser using gas of known concn. by setting an analyzing chamber and a piping system to the background of an ultrahigh vacuum region. CONSTITUTION:At first, an analyzing chamber 2 and respective pipings are evacuated up to an ultrahigh vacuum region (10 Torr or less) before analysis. Next a valve 9 is opened and gas of known concn. is introduced into the analyzing chamber 2 from a standard gas cylinder 3 until the pressure in the analyzing chamber 2 due to an ionizing vacuum meter 10 becomes 1X10 Torr. A quadruplex electrode analyser (QMS) 4 is operated to measure the partial pressures of the respective gases in the standard gas. After the pressure in the analyzing chamber 2 reaches the level of 10 Torr, a valve 12 is opened and the residual gas in the pipings is discharged until the ionizing vacuum meter 13 shows the level of 10 Torr. Thereafter, the gas in a container 1 is introduced into the analyzing chamber 2 to set the pressure in the analyzing chamber 2 to 1X10 Torr. Then, the gas is analyzed by the QMS 4 and the analyzed result is calibrated on the basis of a previously calculated correction factor by a personal computer 7.

56. 发明专利

JP2006127963A Light distribution control device 审中-公开
标题翻译：光分配控制装置
公开(公告)号：JP2006127963A
公开(公告)日：2006-05-18
申请号：JP2004316031
申请日：2004-10-29
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： NANBA IRIZOU , SATO KAZUTAKA , HORINO MASAYA , MOJI TATSUHIKO , OSUMI KEN
IPC分类号： F21S8/10 , F21V14/02
CPC分类号： B60Q1/08 , F21S41/675
摘要： PROBLEM TO BE SOLVED: To provide a vehicular lighting fixture wherein many light distribution patterns can be set without enlarging the whole of the lighting fixture.
SOLUTION: To form this light distribution control device, a beam to connect a movable substrate to a middle frame is perpendicular to a beam to connect the middle frame to an outer frame, the beam to connect the movable substrate to the middle frame and the beam to connect the middle frame to the outer frame are twisted and deformed, and the movable substrate is each independently rocked in two axial directions with respect to the outer frame in order to set an optional distribution pattern.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够在不扩大整个照明器具的情况下设置许多配光图案的车辆照明器具。解决方案：为了形成该配光控制装置，将可移动基板连接到中间框架的光束垂直于光束以将中间框架连接到外框架，该光束将可移动基板连接到中间框架并且将中间框架连接到外框架的梁被扭曲和变形，并且可移动基板相对于外框架在两个轴向方向上独立地摇摆，以便设置可选的分配图案。版权所有（C）2006，JPO＆NCIPI

57. 发明专利

JP2005275422A Optical switch 审中-公开
标题翻译：光开关
公开(公告)号：JP2005275422A
公开(公告)日：2005-10-06
申请号：JP2005146136
申请日：2005-05-19
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： HORINO MASAYA , SATO KAZUYASU , AIDA YASUO
IPC分类号： G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide a mechanical optical switch which can be manufactured only by a simple 2-dimensional assembling process. SOLUTION: In the optical switch, optical fibers and positioning pins are previously fixed by blocks and these are enclosed in a cleavage-type airtight case. Moreover, the optical fibers and the positioning pins are previously fixed by the blocks and these are enclosed in divided airtight cases whose insides are flat, by using spacers. Further, a driving force generating member whose coil is arranged along the longitudinal direction of the optical fibers is installed at the outside of an airtight base and an airtight cover. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种只能通过简单的二维组装工艺制造的机械光学开关。
解决方案：在光开关中，光纤和定位销预先通过块固定，并将其封闭在裂缝型密封外壳中。此外，光纤和定位销预先由块固定，并且通过使用间隔件将它们封闭在其内部平坦的分开的气密壳中。此外，沿着光纤的长度方向配置线圈的驱动力产生部件安装在气密基部和气密罩的外侧。版权所有（C）2006，JPO＆NCIPI

58. 发明专利

JP2004302427A Optical switch and optical switching system 审中-公开
公开(公告)号：JP2004302427A
公开(公告)日：2004-10-28
申请号：JP2003402364
申请日：2003-12-02
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： KAZAMA ATSUSHI , FUKUDA KAZUYUKI , HORINO MASAYA , ITO YASUHIRO
IPC分类号： G02B26/08 , B81B7/04
摘要： PROBLEM TO BE SOLVED: To reduce size and thickness of a three-dimensional optical matrix switch that uses a micro mirror array. SOLUTION: The optical switch is equipped with: a collimator array that has a plurality of collimators to be communicated with optical fibers; a mirror array that has a plurality of movable mirrors with which the light from the first collimator of the collimator array is optically communicated; a first mirror with which the light from the mirror of the mirror array is optically communicated; a second mirror with which the light from the first mirror is optically communicated; and the second collimator of the collimator array, with which the light from the second mirror is communicated. The optical switch is characterized in that the light from the second mirror is designed to be in optical communication with the second collimator through the first mirror and the mirror array. COPYRIGHT: (C)2005,JPO&NCIPI

59. 发明专利

JP2003043386A Optical switching system, and method for aligning of optical axis 审中-公开
标题翻译：光学切换系统和光轴对准方法
公开(公告)号：JP2003043386A
公开(公告)日：2003-02-13
申请号：JP2001235963
申请日：2001-08-03
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： ISHIKAWA TADAAKI , HORINO MASAYA
IPC分类号： G02B26/08 , H04B10/07 , H04B10/27 , H04B10/29 , H04B10/02
摘要： PROBLEM TO BE SOLVED: To provide a space connection type optical switching system, using a reflector which achieves reduction of optical loss, by optimally adjusting the optimum state of the reflector, and to provide a method for aligning the optical axis. SOLUTION: The optical switching system is provided with a first reflector 2a which can control an attitude for directing input light, a second reflector 2b which is disposed opposite to the first reflector and carries out an output by reflecting light reflected by the first reflector, and a means 5 to control each attitude of the first and second reflectors and to adjust the attitude of the controlled first and second reflectors. The optical switching system (a) generates a reference beam, the wavelength of which is substantially different from the input light, (b) reflects the generated reference beam by the first and second reflectors with the input light, (c) selectively branches the reference beam from reflected light to detect light intensity, and controls the attitude of the first and second reflectors, so that the intensity of the input light is maximized.
摘要翻译：要解决的问题：为了提供一种空间连接型光开关系统，通过最佳地调整反射器的最佳状态，使用通过实现光损耗降低的反射器，并提供一种使光轴对准的方法。解决方案：光开关系统设置有可控制用于引导输入光的姿态的第一反射器2a，与第一反射器相对设置的第二反射器2b，并且通过反射由第一反射器反射的光来执行输出，以及用于控制第一和第二反射器的每个姿态并调节受控的第一和第二反射器的姿态的装置5。光开关系统（a）产生一个参考光束，其波长基本上不同于输入光，（b）用输入光反射由第一和第二反射器产生的参考光束，（c）选择性地分支参考光来自反射光的光束以检测光强度，并且控制第一和第二反射器的姿态，使得输入光的强度最大化。

60. 发明专利

JP2003035875A Optical switch 审中-公开
标题翻译：光开关
公开(公告)号：JP2003035875A
公开(公告)日：2003-02-07
申请号：JP2001222399
申请日：2001-07-24
申请人： Hitachi Ltd , Hitachi Metals Ltd , 日立金属株式会社 , 株式会社日立製作所
发明人： HORINO MASAYA
IPC分类号： G02B26/08 , B81B3/00
摘要： PROBLEM TO BE SOLVED: To provide an optical switch which does not change its state in spite of the occurrence of a service interruption and curtails electric power consumption during holding of the state.
SOLUTION: The position of a reflector plate placed in a movable state in an optical changing over section is set near the reflector plate or on a substrate near the reflector plate and a soft magnetic material is disposed on an opposite substrate or near the reflector plate, by which the optical switch is so constituted as to maintain the changing over position by the timing forces of attraction of a permanent magnet after the movement of the reflector plate.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种不会改变其状态的光开关，尽管发生服务中断，并且在保持状态期间抑制了电力消耗。解决方案：设置在反射板附近的反射板或反射板附近的基板上，在相反的基板上或反射板附近设置柔性磁性材料，通过该光开关构成为通过在反射板移动之后永久磁铁吸引的定时力来保持位置的变化。

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