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1. 发明专利

JPH04162342A CONTROL SYSTEM FOR IONLESS ETCHING DEVICE 失效
公开(公告)号：JPH04162342A
公开(公告)日：1992-06-05
申请号：JP28725590
申请日：1990-10-26
申请人： HITACHI ELECTR ENG , HITACHI LTD
发明人： UMETSU HIROSHI , KONO AKIOMI , SATO NOBUKATSU , HORINO MASAYA
IPC分类号： H01L21/302 , H01J37/305
摘要： PURPOSE:To perform an etching process relating to a workpiece in a stable condition by detecting a current value flowing in an atom source gun, and adjusting a supply amount of argon gas or a degree of vacuum in a vacuum chamber so that this current value obtains a reference current value. CONSTITUTION:In an atom source gun 2, high voltage is applied to an electrode to activate an argon atom while supplying argon gas to a gun main unit 2a, and an Ar beam is irradiated from an opening part for beam irradiation of the argon toward a workpiece 5, set up on a sample bed 3, to perform etching of a surface of the workpiece 5. In order to control acceleration and an irradiation amount of the Ar beam, irradiated from the atom source gun 2, so as to always obtain a fixed value, a current of the atom source gun 2 is monitored, and when a value of this current is changed, a supply amount of argon gas, supplied to the gun main unit 2a, or a vacuum pressure in a vacuum chamber 1 is controlled. In this way, the workpiece 5 can be worked in a stable condition.

2. 发明专利

JPH0616472B2 失效
公开(公告)号：JPH0616472B2
公开(公告)日：1994-03-02
申请号：JP12798087
申请日：1987-05-27
申请人： HITACHI ELECTR ENG
发明人： SATO NOBUKATSU , KIMURA EIJI
IPC分类号： H01G13/00 , H05K13/02

3. 发明专利

JPH03170244A POSITIONING DEVICE FOR ELECTRIC PART 失效
公开(公告)号：JPH03170244A
公开(公告)日：1991-07-23
申请号：JP30762889
申请日：1989-11-29
申请人： HITACHI ELECTR ENG
发明人： SATO NOBUKATSU , MINEO HITOSHI
IPC分类号： B23Q3/18 , H01C17/00 , H01G13/00
摘要： PURPOSE:To position a lot of electronic parts simultaneously and yet correctly by providing two positioning plates arranged with their superposition and composing it so as to position the electronic parts with at least one of the positioning plate of these positioning plates being slided. CONSTITUTION:One of positioning plates, for example, a lead pin 1c is set up on a positioning plate 10 of a storing side and the positioning plate 20 equipped with the opening 23 for storing a main body part 1a is arranged with its superposition thereon in this state. Thereafter, these both positioning plates 10, 20 or one thereof is slided. Accordingly an electronic part 1 abuts at two points on the end wall of the opening 23 of the positioning plate 20 and the lead pin 1c becomes to abut on the end wall of the opening 11 of another positioning plate 10. Consequently, each electronic part 1 becomes to be interposed between both positioning plates 10 and 20 and positioned simultaneously and yet surely.

4. 发明专利

JPS6339743A SPINDLE LOCATING DEVICE 失效
公开(公告)号：JPS6339743A
公开(公告)日：1988-02-20
申请号：JP17983586
申请日：1986-08-01
申请人： HITACHI ELECTR ENG
发明人： SATO NOBUKATSU , YUYAMA KIMIHARU , YASUIKE YOSHITOMO
IPC分类号： B23P19/00
摘要： PURPOSE:To have spindle location in the rotational direction by furnishing a sensor to know change in the height between a rib and an air passage in a spindle, and installing an insert piece to be inserted in a screw hole provided in said rib. CONSTITUTION:When a motor 11 rotates a spindle 1, a sensor 13 facing it senses change in the height of the air passage 1a and rib 1b. When this sensor 13 has sensed any change in the height from the air passage 1a to the rib 1b, the motor 11 is stopped. Thereafter an arm 15 is sunk by a cylinder 18, so that an insert piece 14 fixed to this arm 15 will be fitted to the screw hole. This ensures precise location of spindle 1 in its rotational direction even though the motor 11 has inferior accuracy to a certain degree.

5. 发明专利

JPS6310362A ASSEMBLING DEVICE FOR ANNULAR MEMBER 失效
公开(公告)号：JPS6310362A
公开(公告)日：1988-01-16
申请号：JP15268386
申请日：1986-07-01
申请人： HITACHI ELECTR ENG
发明人： SATO NOBUKATSU , YUYAMA KIMIHARU , YASUIKE YOSHITOMO
IPC分类号： G11B17/038 , B25J15/06 , G11B17/028
摘要： PURPOSE:To load an annular member smoothly, without fail and in a non- contacting condition to a rotating shaft by holding a sucking member in the same shaft condition as the rotating shaft with a positioning member and inserting the annular member to the rotating shaft. CONSTITUTION:When the coincidence of the shaft line of a positioning member 8 and a spindle 2 is executed, the shaft line of a holding cylinder 10 fitted on the outer surface of a cylinder part 16 in the positioning member 8 through a roller 26 is also coincident to the shaft line of the spindle 2, and a magnetic disk 1 supported at a sucking member 9 connected to the holding cylinder 10 comes to be also the condition concentric to the spindle 2. When an assembling handler 4 continues to descend in this condition, the holding cylinder 10 is fitted to the spindle 2. Thus, a magnetic disk 1 supported at the sucking member 9 provided at the tip of the holding cylinder 10 is inserted into the spindle 2 smoothly and without fail. The magnetic disk 1 keeps the condition concentric to the spindle 2, and therefore, it will not contact with the spindle 2.

6. 发明专利

JPS62291200A APPARATUS FOR FIXING ELECTRONIC CIRCUIT BOARD 失效
公开(公告)号：JPS62291200A
公开(公告)日：1987-12-17
申请号：JP13393086
申请日：1986-06-11
申请人： HITACHI ELECTR ENG
发明人： SATO NOBUKATSU
IPC分类号： B23P19/00 , H05K3/00 , H05K13/04

7. 发明专利

JPH0373065B2 失效
公开(公告)号：JPH0373065B2
公开(公告)日：1991-11-20
申请号：JP15268386
申请日：1986-07-01
申请人： HITACHI ELECTR ENG
发明人： SATO NOBUKATSU , YUYAMA KIMIHARU , YASUIKE YOSHITOMO
IPC分类号： G11B17/038 , B25J15/06 , G11B17/028

8. 发明专利

JPH02145235A LINEAR TRANSFER DEVICE FOR WORK MECHANISM 失效
公开(公告)号：JPH02145235A
公开(公告)日：1990-06-04
申请号：JP29816288
申请日：1988-11-28
申请人： HITACHI ELECTR ENG
发明人： HASHIMOTO JUNICHI , SATO NOBUKATSU
IPC分类号： B23Q11/08 , B25J9/02 , F16H25/24
摘要： PURPOSE:To isolate the space between a reciprocating driving means and work space by interpolating a movable block and the reciprocating driving means thereof inside a booth having a linear groove at the wall part, providing in series a link part to the work mechanism on the movable block and fitting a cover belt at the lower face side of the linear groove. CONSTITUTION:When a motor is actuated, a movable block 10 is moved by following it up and the work mechanism linked to the block 10 is moved. At this time, guide rollers 23 - 25 roll a cover belt 21 according to the movement of the movable block 10 and no cover belt 21 stands in the way of the movement of the block 10. The work mechanism is provided outside a booth 1 by the link part 10a of the block 10, so the booth 1 inside and work space are isolated. Even if wear-out powders are generated between a screw 13 and ball nut while under feeding of the block 10 by the rotation of the ball screw 13, the space inside the booth 1 is not expanded besides the booth 1 inside and work space being isolated, so there is no danger of the wear-out powders, etc., coming into the work space.

9. 发明专利

JPH0275524A TRANSPORT AND TRANSFER-LOADING DEVICE FOR ELECTRONIC COMPONENTS 失效
公开(公告)号：JPH0275524A
公开(公告)日：1990-03-15
申请号：JP22459788
申请日：1988-09-09
申请人： HITACHI ELECTR ENG
发明人： SATO NOBUKATSU
IPC分类号： B65G47/86 , H01G13/00 , H01L23/48 , H05K13/02
摘要： PURPOSE:To perform smooth and high speed transport and processing work of electronic components by disposing a magnet for attracting electronic components at the position where a main body of a rotary transport table is placed and disposing a transfer-loading claw capable of reciprocal rotatary movements by a specified angle at a meeting position between transport work table. CONSTITUTION:A work 1 is transported in a condition stably attracted with a magnet 31 or 33 either on a 2nd rotary transport table 15 or a 3rd transport table 16. Also when the work 1 is transfer-loaded with a transfer-loading claw 34, the work 1 is attracted with a magnet disposed on the transfer-loading claw 34. Therefore, the transfer-loading is also performed in a stabilized manner. As a result, no jamming or the like nor danage due to collision of the work against other members is caused even if the rotary tables 15, 16 are rotated at high speeds during the transport. As a result, processing is accelerated and efficiency is improved.

10. 发明专利

JPS63293812A INSPECTION AND TAPING DEVICE FOR ELECTRONIC PARTS 失效
公开(公告)号：JPS63293812A
公开(公告)日：1988-11-30
申请号：JP12798087
申请日：1987-05-27
申请人： HITACHI ELECTR ENG
发明人： SATO NOBUKATSU , KIMURA EIJI
IPC分类号： H01G13/00 , H05K13/02
摘要： PURPOSE:To contrive speeding-up in inspection and taping works by a method wherein, after a defective product has been removed by conducting an inspection on a work in a temporary taping state, the temporary taping body is separated using a movable block means, and then a main taping operation is conducted. CONSTITUTION:A taping work is conducted on a plurality of works 1 using a pinching tape 2 to be used for temporary taping, and it is conveyed by a conveying means. The works 1 on which a temporary taping work is conducted are inspected by the work inspecting means 20 provided on a conveying route. The work 1, on which a decision is given as a defective product after inspection, is cut off subsequently by a defective product-cutting part. After the defective product has been removed, the good works 1 are fed to a temporary-taping-body isolating part, and the pin 48 attached to a movable block 46 is inserted into the punch hole 4 of the work pinching tape 2. Then, the movable block 46 is shifted in the direction separating from the works 1, and the works 1 are removed from the tape 2. Subsequently, the separated works 1 are sent to a taping part, and a taping work is conducted using a taping material.

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