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    • 57. 发明授权
    • Alignment-tolerant lens structures for acoustic force actuation of cantilevers
    • 用于悬臂的声力驱动的对准容差透镜结构
    • US07467542B2
    • 2008-12-23
    • US11237184
    • 2005-09-28
    • Scott A. Elrod
    • Scott A. Elrod
    • G01B11/30
    • G01Q60/32Y10S977/872
    • In accordance with one aspect of the present invention, a cantilever of a probe-based instrument is deflected by directing a beam of ultrasonic acoustic energy at the cantilever to apply acoustic radiation pressure to the cantilever. The energy is generated by an acoustic actuator. The transmitted beam preferably is focused using a cylindrical lens, providing a beam tightly focused in one dimension and unfocused in a second dimension. In accordance with another aspect of the present invention, a power source such as an RF signal generator is operated so as to spread the spectrum of acoustic radiation on a time scale that is short or comparable to the acoustic roundtrip time. Such a design diminishing the resonance effects and sensitivity to spacing between the cantilever and the acoustic source.
    • 根据本发明的一个方面,通过在悬臂处引导超声波能量束来对基于探针的仪器的悬臂进行偏转,以向悬臂施加声辐射压力。 能量由声学致动器产生。 透射光束优选地使用柱面透镜聚焦,提供在一个维度上紧密聚焦的光束,并且在第二维度上未聚焦。 根据本发明的另一方面,操作诸如RF信号发生器之类的电源,以便将声辐射谱扩展到与声学往返时间相比较短或相当的时间尺度。 这种设计降低了共振效应和对悬臂与声源之间间距的敏感性。