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    • 43. 发明授权
    • Formation of metal nanowires for use as variable-range hydrogen sensors
    • 用作可变范围氢传感器的金属纳米线的形成
    • US07104111B2
    • 2006-09-12
    • US10909797
    • 2004-07-30
    • Greg MontyKwok NgMohshi Yang
    • Greg MontyKwok NgMohshi Yang
    • G01N7/00
    • G01N27/127G01N33/005
    • The present invention provides for variable-range hydrogen sensors and methods for making same. Such variable-range hydrogen sensors comprise a series of fabricated Pd—Ag (palladium-silver) nanowires—each wire of the series having a different Ag to Pd ratio—with nanobreakjunctions in them and wherein the nanowires have predefined dimensions and orientation. When the nanowires are exposed to H2, their lattace swells when the H2 concentration reaches a threshold value (unique to that particular ratio of Pd to Ag). This causes the nanobreakjunctions to close leading to a 6–8 orders of magnitude decrease in the resistance along the length of the wire and providing a sensing mechanism for a range of hydrogen concentrations.
    • 本发明提供可变范围氢传感器及其制造方法。 这种可变范围氢传感器包括一系列制备的Pd-Ag(钯 - 银)纳米线 - 该系列中的每根线具有不同的Ag与Pd的比例,并且其中纳米区域结合在一起,并且其中纳米线具有预定义的尺寸和取向。 当纳米线暴露于H 2 O 2时,当H 2 O 2浓度达到阈值(对于特定的Pd与Ag的比率是唯一的)时,它们的晶格膨胀。 这导致纳米划痕结合,导致沿导线长度的电阻降低6-8个数量级,并为一定范围的氢浓度提供感测机制。
    • 45. 发明授权
    • Method of making short channel thin film field effect transistor
    • 制造短沟道薄膜场效应晶体管的方法
    • US4654295A
    • 1987-03-31
    • US557773
    • 1983-12-05
    • Mohshi YangDavid Vesey
    • Mohshi YangDavid Vesey
    • H01L29/78H01L21/033H01L21/306H01L21/336H01L27/12H01L29/786G03F7/16G03F7/26
    • H01L29/78696H01L21/0338H01L29/66757H01L29/66765H01L29/78663H01L29/78684
    • Methods for producing field effect transistors having short current-conduction channels and reduced parasitic capacitance are disclosed. The methods allow the channel length to be substantially less than the minimum feature size of the photolithographic mask if desired, thereby enabling very short channel length transistors to be formed using conventional ten micron photolithography. An exemplary method involves: (a) depositing a thick film of photoresist over a multilayered sandwich structure forming part of the transistor, said structure having a bottom gate electrode, an insulator layer thereover, followed by a layer of deposited semiconductor material and a thin film of etchable conductive material thereover; (b) exposing the photoresist through a mask; (c) wetting the photoresist to cause it to swell before development to create an overhang, if desired; (d) etching the etchable material to undercut a portion of the photoresist, and (e) shadow depositing material on top of the uncovered semiconductor layer beyond the shadow of the undercut and overhanging photoresist, thereby locating said channel, and one of the two current-carrying electrodes of the transistor.
    • 公开了用于制造具有短电流传导通道和减小的寄生电容的场效应晶体管的方法。 如果需要,这些方法允许通道长度显着小于光刻掩模的最小特征尺寸,从而使得能够使用传统的10微米光刻形成非常短的沟道长度的晶体管。 示例性方法包括:(a)在形成晶体管的一部分的多层夹层结构上沉积厚膜的光致抗蚀剂,所述结构具有底栅极电极,绝缘体层,之后是沉积的半导体材料层和薄膜 的可蚀刻导电材料; (b)通过掩模曝光光致抗蚀剂; (c)润湿光致抗蚀剂,使其在显影之前膨胀以产生悬垂,如果需要的话; (d)蚀刻可蚀刻材料以切割一部分光致抗蚀剂,和(e)在未覆盖的半导体层的顶部上的阴影沉积材料超过底切和悬垂的光​​致抗蚀剂的阴影,从而定位所述通道,并且将两个电流之一 - 晶体管的电极。