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    • 50. 发明申请
    • LASER PATTERNING PROCESS FOR BACK CONTACT THROUGH-HOLES FORMATION PROCESS FOR SOLAR CELL FABRICATION
    • 用于太阳能电池制造的反接触式激光加工方法
    • US20140213015A1
    • 2014-07-31
    • US13750026
    • 2013-01-25
    • Jeffrey L. FranklinYi Zheng
    • Jeffrey L. FranklinYi Zheng
    • H01L31/18
    • H01L31/022425H01L31/068Y02E10/547
    • Embodiments of the invention contemplate formation of a high efficiency solar cell utilizing a laser patterning process to form openings in a passivation layer while maintaining good film properties of the passivation layer on a surface of a solar cell substrate. In one embodiment, a method of forming an opening in a passivation layer on a back surface of a solar cell substrate includes transferring a substrate having a passivation layer formed on a back surface of a substrate into a laser patterning apparatus, the substrate having a first type of doping atom on the back surface of the substrate and a second type of doping atom on a front surface of the substrate, providing laser radiation generated by the laser patterning apparatus from the front surface transmitting through the substrate to the passivation layer disposed on the back surface of the substrate, and forming openings in the passivation layer.
    • 本发明的实施方案考虑使用激光图案化工艺来形成高效率的太阳能电池,以在钝化层中形成开口,同时保持太阳能电池基板的表面上的钝化层的良好的膜特性。 在一个实施例中,在太阳能电池基板的背面上的钝化层中形成开口的方法包括将形成在基板的背面上的钝化层的基板转印到激光图案形成装置中,所述基板具有第一 在衬底的背面上的掺杂原子的类型和在衬底的前表面上的第二类型的掺杂原子,提供由激光图案形成装置产生的激光辐射从透过衬底的前表面到设置在衬底上的钝化层 并且在钝化层中形成开口。