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    • 42. 发明授权
    • Electric power steering system
    • 电动助力转向系统
    • US5027915A
    • 1991-07-02
    • US289737
    • 1988-12-27
    • Shuuetsu SuzukiMichitaka TeradaAkio HashimotoHiroshi Naito
    • Shuuetsu SuzukiMichitaka TeradaAkio HashimotoHiroshi Naito
    • B62D5/04
    • B62D5/0463B62D5/0439B62D5/0478Y10T477/30
    • An electric power steering system includes a steering torque detecting device for detecting a steering torque applied between an input shaft connected to a steering wheel and an output shaft connected to a steering gear in response to an elastic deformation of an elastic member connecting the input shaft with the output shaft, an electric motor whose rotation is controlled by a control signal from a control device in response to a detecting signal from the steering torque detecting device, and a clutch device interposed between the electric motor and the output shaft and controlling an intermittent transmission of the rotation of the electric motor to the output shaft in response to the elastic deformation of the elastic member. Thereby, it is possible to improve the safety performance, the reliability and the steering wheel feeling of an electric power steering system.
    • 电动助力转向系统包括转向转矩检测装置,用于响应于连接输入轴的弹性构件的弹性变形,检测施加在连接到方向盘的输入轴与连接到舵机的输出轴之间的转向扭矩, 输出轴,响应于来自转向转矩检测装置的检测信号的来自控制装置的控制信号的旋转的电动机和插入在电动机和输出轴之间的离合器装置,并且控制间歇变速器 响应于弹性构件的弹性变形,电动机旋转到输出轴。 由此,可以提高电动助力转向系统的安全性能,可靠性和方向盘感觉。
    • 43. 发明授权
    • Torque detecting device
    • 扭矩检测装置
    • US4865143A
    • 1989-09-12
    • US152282
    • 1988-02-04
    • Akio HashimotoHiroshi Naito
    • Akio HashimotoHiroshi Naito
    • B62D5/04B62D6/10G01L3/14G01L5/22
    • G01L5/221B62D6/10G01L3/1457
    • A torque detecting device, which is typically used for detecting a steering torque in a motor vehicle, includes a mechanism for converting the torque applied to an input shaft to an axial force between the input shaft and an output shaft. A slider is fitted about the output shaft movably axially along the output shaft and rotatably about its own axis with the output shaft. The axial movement of the slider is electrically detected. An elastic body is provided for returning the input shaft to its neutral position. The converting mechanism has a pin extending through the input shaft at right angles thereto and having two ends projecting therefrom. A pair of slits each having a pair of ends are formed in the output shaft. Each of the ends of the pin is located in one of the slits engageably with either end thereof. A bearing is secured to one end of the pin. A spiral groove is formed in the slider and one end of the pin extends into the groove to dispose the bearing therein.
    • 通常用于检测机动车辆中的转向扭矩的扭矩检测装置包括用于将施加到输入轴的扭矩转换为输入轴和输出轴之间的轴向力的机构。 滑块以输出轴的方式可轴向地安装在输出轴上,并以其自身的轴线与输出轴一起旋转。 电动检测滑块的轴向移动。 提供弹性体用于使输入轴返回其中立位置。 转换机构具有一个销,其直角延伸穿过输入轴并具有从其突出的两个端部。 在输出轴上形成有一对端部的一对狭缝。 销的每个端部位于与其任一端可接合的一个狭缝中。 轴承固定在销的一端。 螺旋槽形成在滑块中,销的一端延伸到凹槽中以将轴承置于其中。
    • 44. 发明授权
    • Electric power steering apparatus
    • 电动助力转向装置
    • US4798253A
    • 1989-01-17
    • US77187
    • 1987-07-21
    • Hiroshi Naito
    • Hiroshi Naito
    • B62D5/04B62D6/10
    • B62D5/0412B62D6/10
    • An electric power steering apparatus comprising an axial conversion mechanism includes a slider for converting the relative rotation between an input shaft and an output shaft to an axial deviation. A first sensing unit senses axial deviation of the slider. It includes a lever with a torque sensing element fixed thereto with the lever fixed at one end and supported at the other end by the slider. A second sensing unit senses the direction of rotation, or the direction and torque of rotation, of a steering wheel. A controller compares the output signals from the first and second sensing units and controls the direction and torque of rotation of an electric motor which contributes to the steering force. The comparison value between the signals from the first and second sensing units is used to stop the motor when the comparison value is outside a predetermined range.
    • 包括轴向转换机构的电动助力转向装置包括用于将输入轴和输出轴之间的相对转动转换为轴向偏差的滑块。 第一感测单元感测滑块的轴向偏差。 它包括具有固定在其上的扭矩感测元件的杠杆,其中杠杆固定在一端并在另一端由滑块支撑。 第二感测单元感测方向盘的旋转方向或旋转的方向和转矩。 控制器比较来自第一和第二感测单元的输出信号,并且控制有助于转向力的电动机的旋转方向和转矩。 当比较值在预定范围之外时,来自第一和第二感测单元的信号之间的比较值用于停止电动机。
    • 47. 发明授权
    • Magnetic sensor and manufacturing method therefor
    • 磁传感器及其制造方法
    • US08178361B2
    • 2012-05-15
    • US10584666
    • 2006-03-15
    • Hiroshi NaitoHideki SatoYukio WakuiMasayoshi Omura
    • Hiroshi NaitoHideki SatoYukio WakuiMasayoshi Omura
    • H01L21/00G01R33/09
    • H01L27/22B82Y25/00G01R33/09G01R33/093H01L43/12Y10T29/4902Y10T29/49075
    • There is provided a small-size magnetic sensor for detecting the intensity of a magnetic field in three axial directions, in which a plurality of giant magnetoresistive elements are formed on a single semiconductor substrate. A thick film is formed on the semiconductor substrate; giant magnetoresistive elements forming an X-axis sensor and a Y-axis sensor are formed on a planar surface thereof; and giant magnetoresistive elements forming a Z-axis sensor are formed using slopes of channels formed in the thick film. Regarding the channel formation, it is possible to use the reactive ion etching and high-density plasma CVD methods. In addition, an insulating film is formed between the thick film and passivation film and is used as an etching stopper. Each of the slopes of the channels can be constituted of a first slope and a second slope, so that a magneto-sensitive element is formed on the second slope having a larger inclination angle. In order to optimize the slope shape and inclination with respect to each channel, it is possible to form a dummy slope that does not directly relate to the formation of the giant magnetoresistive elements.
    • 提供了一种用于检测三个轴向上的磁场强度的小型磁传感器,其中在单个半导体衬底上形成多个巨磁电阻元件。 在半导体衬底上形成厚膜; 在其平面上形成形成X轴传感器和Y轴传感器的巨磁阻元件; 并且使用形成在厚膜中的通道的斜面形成形成Z轴传感器的巨磁阻元件。 关于通道形成,可以使用反应离子蚀刻和高密度等离子体CVD方法。 此外,在厚膜和钝化膜之间形成绝缘膜,并用作蚀刻停止层。 通道的每个斜面可以由第一斜面和第二斜面构成,使得在具有较大倾斜角的第二斜面上形成磁敏元件。 为了优化相对于每个通道的斜率形状和倾斜度,可以形成与形成巨磁阻元件没有直接关系的虚拟斜率。
    • 48. 发明授权
    • Semiconductor device having step-wise connection structures for thin film elements
    • 具有用于薄膜元件的逐步连接结构的半导体器件
    • US07728423B2
    • 2010-06-01
    • US11657007
    • 2007-01-24
    • Hiroshi Naito
    • Hiroshi Naito
    • H01L23/12
    • H01L21/7684H01L21/76801H01L21/76804H01L21/76819H01L21/78H01L23/564H01L23/585H01L2924/0002H01L2924/00
    • A plurality of IC regions are formed on a semiconductor wafer, which is cut into individual chips incorporating ICs, wherein wiring layers and insulating layers are sequentially formed on a silicon substrate. In order to reduce height differences between ICs and scribing lines, a planar insulating layer is formed to cover the overall surface with respect to ICs, seal rings, and scribing lines. In order to avoid occurrence of breaks and failures in ICs, openings are formed to partially etch insulating layers in a step-like manner so that walls thereof are each slanted by prescribed angles ranging from 20° to 80°. For example, a first opening is formed with respect to a thin-film element section, and a second opening is formed with respect to an external-terminal connection pad.
    • 在半导体晶片上形成多个IC区域,该半导体晶片被切割成具有IC的单个芯片,其中布线层和绝缘层依次形成在硅衬底上。 为了减少IC和划刻线之间的高度差异,形成平面绝缘层以覆盖相对于IC,密封环和划线的整个表面。 为了避免IC中的断裂和故障的发生,形成开口部分地以阶梯状方式蚀刻绝缘层,使得其壁各自倾斜20°至80°的规定角度。 例如,相对于薄膜元件部形成第一开口,并且相对于外部端子连接焊盘形成第二开口。
    • 49. 发明申请
    • SEMICONDUCTOR WAFER AND MANUFACTURING METHOD THEREFOR
    • 半导体晶圆及其制造方法
    • US20090042355A1
    • 2009-02-12
    • US12253881
    • 2008-10-17
    • Hiroshi Naito
    • Hiroshi Naito
    • H01L21/76
    • H01L21/7684H01L21/76801H01L21/76804H01L21/76819H01L21/78H01L23/564H01L23/585H01L2924/0002H01L2924/00
    • A plurality of IC regions are formed on a semiconductor wafer, which is cut into individual chips incorporating ICs, wherein wiring layers and insulating layers are sequentially formed on a silicon substrate. In order to reduce height differences between ICs and scribing lines, a planar insulating layer is formed to cover the overall surface with respect to ICs, seal rings, and scribing lines. In order to avoid occurrence of breaks and failures in ICs, openings are formed to partially etch insulating layers in a step-like manner so that walls thereof are each slanted by prescribed angles ranging from 20° to 80°. For example, a first opening is formed with respect to a thin-film element section, and a second opening is formed with respect to an external-terminal connection pad.
    • 在半导体晶片上形成多个IC区域,该半导体晶片被切割成具有IC的单个芯片,其中布线层和绝缘层依次形成在硅衬底上。 为了减少IC和划刻线之间的高度差异,形成平面绝缘层以覆盖相对于IC,密封环和划线的整个表面。 为了避免IC中的断裂和故障的发生,形成开口部分地以阶梯状方式蚀刻绝缘层,使得其壁各自倾斜20°至80°的规定角度。 例如,相对于薄膜元件部形成第一开口,并且相对于外部端子连接焊盘形成第二开口。
    • 50. 发明申请
    • Three-Axis Magnetic Sensor and Method for Manufacturing the Same
    • 三轴磁传感器及其制造方法
    • US20090027048A1
    • 2009-01-29
    • US11908549
    • 2006-03-17
    • Hideki SatoMasayoshi OmuraHiroshi NaitoToshiyuki OohashiYukio WakuiChihiro Osuga
    • Hideki SatoMasayoshi OmuraHiroshi NaitoToshiyuki OohashiYukio WakuiChihiro Osuga
    • G01R33/09G01R3/00
    • H01L27/22B82Y25/00G01R33/09G01R33/093Y10T29/49002Y10T29/4902
    • In the three-axis magnetic sensor of the present invention, a plurality of magnetoresistive effect element bars are connected in series by means of bias magnets to constitute magnetoresistive effect elements, and magnetoresistive effect elements of the X-axis sensor and those of the Y-axis sensor are formed on a flat surface parallel to the flat surface of the substrate. The sensitivity direction of magnetization is a direction vertical to the longitudinal direction of each of the magnetoresistive effect element bars, and magnetoresistive effect elements of the X-axis sensor and those of the Y-axis sensor are formed in such a way that the magnetization directions are orthogonal to each other. Further, magnetoresistive effect elements of the Z-axis sensor are formed on a tilted surface of the projection projected from the flat surface of the substrate in such a way that the magnetization direction is inside the tilted surface. The Z-axis sensor is provided in such a way that the sensitivity direction is vertical to the longitudinal direction of the magnetoresistive effect element bar.
    • 在本发明的三轴磁传感器中,多个磁阻效应元件棒通过偏置磁铁串联连接,构成磁阻效应元件,X轴传感器和Y轴传感器的磁阻效应元件, 轴传感器形成在平行于基板的平坦表面的平坦表面上。 磁化的灵敏度方向是垂直于每个磁阻效应元件棒的纵向的方向,并且X轴传感器和Y轴传感器的磁阻效应元件以这样的方式形成,使得磁化方向 彼此正交。 此外,Z轴传感器的磁阻效应元件形成在从基板的平坦表面突出的突起的倾斜表面上,使得磁化方向在倾斜表面内。 Z轴传感器以灵敏度方向垂直于磁阻效应元件棒的纵向的方式设置。