会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 49. 发明授权
    • Deep trench decoupling capacitor
    • 深沟槽去耦电容
    • US08492816B2
    • 2013-07-23
    • US12685156
    • 2010-01-11
    • James S. NakosEdmund J. SprogisAnthony K. Stamper
    • James S. NakosEdmund J. SprogisAnthony K. Stamper
    • H01L27/108H01L29/94
    • H01L28/40H01L29/66181H01L29/945
    • Solutions for forming a silicided deep trench decoupling capacitor are disclosed. In one aspect, a semiconductor structure includes a trench capacitor within a silicon substrate, the trench capacitor including: an outer trench extending into the silicon substrate; a dielectric liner layer in contact with the outer trench; a doped polysilicon layer over the dielectric liner layer, the doped polysilicon layer forming an inner trench within the outer trench; and a silicide layer over a portion of the doped polysilicon layer, the silicide layer separating at least a portion of the contact from at least a portion of the doped polysilicon layer; and a contact having a lower surface abutting the trench capacitor, a portion of the lower surface not abutting the silicide layer.
    • 公开了用于形成硅化深沟槽去耦电容器的解决方案。 一方面,半导体结构在硅衬底内包括沟槽电容器,所述沟槽电容器包括:延伸到硅衬底中的外沟槽; 介电衬垫层,与所述外沟槽接触; 所述掺杂多晶硅层在所述外部沟槽内形成内部沟槽; 以及在所述掺杂多晶硅层的一部分上的硅化物层,所述硅化物层将所述接触的至少一部分与所述掺杂多晶硅层的至少一部分分离; 以及具有与所述沟槽电容器邻接的下表面的接触件,所述下表面的一部分不邻接所述硅化物层。