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    • 42. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20080283945A1
    • 2008-11-20
    • US12121736
    • 2008-05-15
    • Takashi KobayashiShuntaro Machida
    • Takashi KobayashiShuntaro Machida
    • H01L29/84H01L41/083
    • B06B1/0292G01N29/2406
    • A lower electrode is formed over a semiconductor substrate via an insulator film, first and second insulator films are formed to cover the lower electrode, an upper electrode is formed over the second insulator film, third to fifth insulator films are formed to cover the upper electrode and a void is formed between the first and second insulator films between the lower and upper electrodes. An ultrasonic transducer comprises the lower electrode, the first insulator film, the void, the second insulator film and the upper electrode. A portion of the first insulator film contacting with the lower electrode is made of silicon oxide, a portion of the second insulator film contacting with the upper electrode is made of silicon oxide and the first or second insulator film includes a silicon nitride film positioned between the upper and lower electrodes and not in contact with the upper and lower electrodes.
    • 通过绝缘膜在半导体衬底上形成下电极,形成第一和第二绝缘膜以覆盖下电极,在第二绝缘膜上方形成上电极,形成第三至第五绝缘膜以覆盖上电极 并且在下电极和上电极之间的第一和第二绝缘膜之间形成空隙。 超声换能器包括下电极,第一绝缘膜,空隙,第二绝缘膜和上电极。 与下部电极接触的第一绝缘膜的一部分由氧化硅构成,与上部电极接触的第二绝缘膜的一部分由氧化硅构成,第一或第二绝缘膜包括位于 上下电极并不与上电极和下电极接触。
    • 50. 发明申请
    • Ultrasonic probe and ultrasonic diagnostic device
    • 超声波探头和超声波诊断装置
    • US20060173310A1
    • 2006-08-03
    • US10563086
    • 2004-07-02
    • Satoshi TamanoAkibiko HanaokaHideki OkazakiTakashi KobayashiSachie Yoshida
    • Satoshi TamanoAkibiko HanaokaHideki OkazakiTakashi KobayashiSachie Yoshida
    • A61B8/12
    • A61B8/12A61B8/4488
    • In an ultrasonic probe including an insert section which is to be inserted into a body cavity organ of a subject and a handle section which is coupled with the insert section, a plurality of vibrator elements (104) are disposed at a tip end of the insert section over the entire 360 degree circumference thereof and in the handle section, a connection change over switch (105) is disposed which successively changes over the electrical connection of a predetermined number of the vibrator elements among the plurality of the vibrator elements to be connected with a predetermined number of ultrasonic wave transmission and reception channels (701,702) in an ultrasonic diagnostic apparatus main body for transmitting and receiving ultrasonic wave signals. Accordingly, an ultrasonic probe which permits to collect ultrasonic wave images including tomograms and blood flow images of high quality without positional irregularity over the entire circumference of the insert section of the ultrasonic probe and to display the same, and an ultrasonic diagnostic apparatus using the same are obtained.
    • 在包括插入到被检体的体腔器官的插入部和与插入部结合的手柄部的超声波探头中,多个振动元件(104)设置在插入物的前端 在其整个360度圆周上,并且在把手部分中,设置连接切换开关(105),其连续地切换要连接的多个振动器元件中的预定数量的振动器元件的电连接 超声波诊断装置主体中的预定数量的超声波发送接收通道(701,702),用于发送和接收超声波信号。 因此,超声波探头能够在超声波探头的插入部的整个圆周上收集包括高质量的超声波图像而不具有位置不规则的超声波图像,并且显示该超声波探头,以及使用其的超声波诊断装置 获得。