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    • 43. 发明授权
    • Charged-particle-beam mapping projection-optical systems and methods for adjusting same
    • 带电粒子束映射投影光学系统及其调整方法
    • US07064339B2
    • 2006-06-20
    • US10816467
    • 2004-03-31
    • Hiroshi NishimuraNaoto KiharaKinya KatoToru TakagiAkihiro GotoJunji IkedaKazuya Okamoto
    • Hiroshi NishimuraNaoto KiharaKinya KatoToru TakagiAkihiro GotoJunji IkedaKazuya Okamoto
    • G01N21/00G21K7/00
    • H01J37/26G01N23/225H01J37/1471H01J37/226H01J37/265H01J2237/0492H01J2237/057H01J2237/1501H01J2237/2482H01J2237/2538H01J2237/262H01J2237/2806H01J2237/2817H01J2237/282H01J2237/2823H01J2237/2826H01J2237/30438
    • Charged-particle-beam (CPB) mapping projection-optical systems and adjustment methods for such systems are disclosed that can be performed quickly and accurately. In a typical system, an irradiation beam is emitted from a source, passes through an irradiation-optical system, and enters a Wien filter (“E×B”). Upon passing through the E×B, the irradiation beam passes through an objective-optical system and is incident on an object surface. Such impingement generates an observation beam that returns through the objective-optical system and the E×B in a different direction to a detector via an imaging-optical system. An adjustment-beam source emits an adjustment beam used for adjusting and aligning the position of, e.g., the object surface and/or the Wien's condition of the E×B. The adjustment beam can be off-axis relative to the objective-optical system. For such adjusting and aligning, fiducial marks (situated, e.g., in the plane of the object surface) can be used that are optimized for the CPB-optical system and the off-axis optical system. Desirably, the image formed on the detector when electrical voltage and current are not applied to the E×B is in the same position as the image formed on the detector when electrical voltage and current are applied to the E×B. Also provided are “evaluation charts” for use in such alignments that do not require adjustment of the optical axis of the irradiation-optical system, and from which the kinetic-energy distribution of the emitted adjustment beam is stable.
    • 公开了可以快速且准确地执行这种系统的带电粒子束(CPB)映射投影光学系统和调整方法。 在典型的系统中,照射光束从光源发出,通过照射光学系统,并进入维恩滤光片(“ExB”)。 当通过ExB时,照射光束通过物镜光学系统并且入射到物体表面上。 这种冲击产生观察光束,该观察光束经由成像光学系统通过物镜 - 光学系统和ExB以不同的方向返回到检测器。 调整光束源发射用于调整和对准例如物体表面的位置和/或ExB的维恩状态的调节光束。 调节光束可以相对于物镜光学系统偏轴。 对于这种调整和对准,可以使用为CPB光学系统和离轴光学系统优化的基准标记(例如位于物体表面的平面中)。 理想地,当电压和电流未施加到ExB时,在检测器上形成的图像与当将电压和电流施加到ExB时形成在检测器上的图像位于相同的位置。 还提供了用于这种对准的“评估图”,其不需要调整照射光学系统的光轴,并且发射的调节光束的动能分布从该对准是稳定的。
    • 48. 发明授权
    • Projection exposure apparatus
    • 投影曝光装置
    • US5900926A
    • 1999-05-04
    • US725255
    • 1996-10-04
    • Kinya Kato
    • Kinya Kato
    • G03B13/36G02B7/28G03F7/20G03F7/207H01L21/027G03B27/52
    • G03F7/70225G03F7/70275G03F7/70358G03F7/70883G03F7/70891
    • A projection exposure apparatus performs focus adjustment to correct variations in the focal position of a projection optical system which are caused by absorption of exposure light by a refraction system in the projection optical system. The projection optical system arranged in this projection exposure apparatus includes a refraction system having a positive refracting power, and a reflecting mirror positioned to be coaxial with the refraction system. The projection exposure apparatus includes a photodetection device for detecting light, of light emitted from an illumination optical system and transmitted through a first substrate, which is transmitted through the reflecting mirror, and an adjustment device for adjusting the in-focus state between the first substrate, a second substrate, and the projection optical system in accordance with an output from the photodetection device.
    • 投影曝光装置进行聚焦调整,以校正由投影光学系统中的折射系统吸收曝光所引起的投影光学系统的焦点位置的变化。 布置在该投影曝光装置中的投影光学系统包括具有正折射率的折射系统和与折射系统同轴的反射镜。 投影曝光装置包括:光检测装置,用于检测从照明光学系统发射的光,并透射通过反射镜的第一基板;以及调节装置,用于调节第一基板之间的对焦状态 ,第二基板和根据来自光检测装置的输出的投影光学系统。
    • 49. 发明授权
    • Alignment method, projection exposure method, and projection exposure
apparatus
    • 对准方法,投影曝光方法和投影曝光装置
    • US5850279A
    • 1998-12-15
    • US619981
    • 1996-03-20
    • Kei NaraMasaki KatoKinya KatoTsuyoshi Narabe
    • Kei NaraMasaki KatoKinya KatoTsuyoshi Narabe
    • G03F7/20G03F9/00H01L21/027G03B27/42G01B11/00
    • G03F7/70275G03F7/70358G03F9/70
    • Disclosed is a projection exposure method for transferring a pattern formed on a mask onto a photosensitive substrate through a projection optical system. A light beam having a first wavelength for exposure is radiated through the projection optical system onto a first mark area including a fiducial mark on a fiducial plate installed on a substrate stage, reflected light from the first mark area is detected to obtain a position of the fiducial mark. A light beam having a second wavelength to which the photosensitive substrate is not photosensitive is radiated through the projection optical system onto the first mark area, reflected light from the first mark area is detected to obtain a position of the fiducial mark. A positional discrepancy of the fiducial mark caused by the difference in wavelength between the first and second wavelengths is previously calculated on the basis of results of the detection. The light beam having the second wavelength is radiated through the projection optical system onto an alignment mark on the photosensitive substrate, reflected light therefrom is detected to obtain a position of the photosensitive substrate under the light beam having the second wavelength. A positional discrepancy of the photosensitive substrate is corrected on the basis of a result of the detection and the calculation, and thus positional alignment for the photosensitive substrate is performed, followed by actual exposure.
    • 公开了一种投影曝光方法,用于通过投影光学系统将形成在掩模上的图案转印到感光基板上。 将具有用于曝光的第一波长的光束通过投影光学系统辐射到安装在基板台上的基准板上的包括基准标记的第一标记区域上,检测来自第一标记区域的反射光, 基准标记。 具有感光基片不感光的第二波长的光束通过投影光学系统辐射到第一标记区域上,检测来自第一标记区域的反射光以获得基准标记的位置。 基于检测结果预先计算由第一和第二波长之间的波长差导致的基准标记的位置偏差。 具有第二波长的光束通过投影光学系统辐射到感光基板上的对准标记上,检测其反射光,以获得具有第二波长的光束下的感光基板的位置。 基于检测和计算的结果校正感光性基板的位置偏差,由此进行感光性基板的位置对准,然后实际曝光。