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    • 43. 发明授权
    • Semiconductor device having a multilayer interconnection structure
    • 具有多层互连结构的半导体器件
    • US08299619B2
    • 2012-10-30
    • US13015594
    • 2011-01-28
    • Kenichi WatanabeTomoji NakamuraSatoshi Otsuka
    • Kenichi WatanabeTomoji NakamuraSatoshi Otsuka
    • H01L29/40
    • H01L23/481H01L23/522H01L23/5226H01L23/528H01L23/53238H01L23/5329H01L23/53295H01L2924/0002H01L2924/00
    • A semiconductor device has a multilayer interconnection structure, wherein the multilayer interconnection structure comprises at least a first interconnection layer and a second interconnection layer formed over the first interconnection layer, the first interconnection layer comprises a first conductor pattern embedded in a first interlayer insulation film and constituting a part of an interconnection pattern and a second, another interconnection pattern embedded in the first interlayer insulation film, the second interconnection layer comprises a third conductor pattern embedded in a second interlayer insulation film and constituting a part of said interconnection pattern, the third conductor pattern has an extension part in a part thereof so as to extend in a layer identical to the third conductor pattern, the third conductor pattern being electrically connected to the first conductor pattern at a first region of the extension part via a first via plug, the extension part making a contact with the second conductor pattern at a second region further away from, or closer to the third conductor pattern with regard to the first region via a second via-plug of a diameter smaller than the first via-plug, the extension part of the third conductor pattern, the first via-plug and the second via-plug form, together with the second interlayer insulation film, a dual damascene structure.
    • 半导体器件具有多层互连结构,其中所述多层互连结构至少包括形成在所述第一互连层上的第一互连层和第二互连层,所述第一互连层包括嵌入在第一层间绝缘膜中的第一导体图案, 构成互连图案的一部分和嵌入第一层间绝缘膜中的第二另一互连图案,第二互连层包括嵌入第二层间绝缘膜中并构成所述互连图案的一部分的第三导体图案,第三导体 图案的一部分具有延伸部分,以在与第三导体图案相同的层中延伸,第三导体图案经由第一通孔插头在延伸部分的第一区域处电连接到第一导体图案, 扩展部分制作ac 通过直径小于第一通孔插头的第二通孔插头,在相对于第一区域进一步远离或接近第三导体图案的第二区域处与第二导体图案接合,第三导体图案的延伸部分 导体图案,第一通孔塞和第二通孔塞形式与第二层间绝缘膜一起是双镶嵌结构。
    • 44. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07939913B2
    • 2011-05-10
    • US12564989
    • 2009-09-23
    • Kenichi WatanabeNobuhiro MisawaSatoshi Otsuka
    • Kenichi WatanabeNobuhiro MisawaSatoshi Otsuka
    • H01L23/544H01L29/06H01L21/768H01L21/78
    • H01L23/562H01L23/3192H01L23/564H01L24/05H01L2224/02166H01L2224/05567H01L2924/00014H01L2924/0002H01L2924/12044H01L2224/05552
    • A semiconductor device includes a substrate; a layered body formed on the substrate and including a multilayer interconnection structure, the layered body including multiple interlayer insulating films stacked in layers, the interlayer insulating films being lower in dielectric constant than a SiO2 film; a moisture resistant ring extending continuously in the layered body so as to surround a device region where an active element is formed; a protection groove part formed continuously along and outside the moisture resistant ring in the layered body so as to expose the surface of the substrate; a protection film continuously covering the upper surface of the layered body except an electrode pad on the multilayer interconnection structure, and the sidewall and bottom surfaces of the protection groove part; and an interface film including Si and C as principal components and formed between the protection film and the sidewall surfaces of the protection groove part.
    • 半导体器件包括衬底; 层叠体,其形成在所述基板上并且包括多层互连结构,所述层叠体包括层叠的多层层间绝缘膜,所述层间绝缘膜的介电常数比SiO 2膜低; 在层叠体中连续延伸以防止形成有源元件的器件区域的防潮环; 保护槽部,其在层叠体中的防湿环的外侧连续地形成,以露出基板的表面; 除了多层互连结构上的电极焊盘以及保护槽部分的侧壁和底表面之外,连续地覆盖层叠体的上表面的保护膜; 以及形成在保护膜与保护槽部的侧壁面之间的作为主要成分的Si和C的界面膜。
    • 45. 发明授权
    • Method and apparatus for removably holding medical device
    • 用于可拆卸地保持医疗装置的方法和装置
    • US07904206B2
    • 2011-03-08
    • US11042945
    • 2005-01-24
    • Keiji ShiodaSatoshi OtsukaMasaaki UedaKazuhito Nakanishi
    • Keiji ShiodaSatoshi OtsukaMasaaki UedaKazuhito Nakanishi
    • G05B19/18G05B19/04
    • A61B34/75A61B34/74A61B90/50A61B2017/00367A61B2090/0801
    • An apparatus for holding a medical device has an arm unit equipped with, for example, a polyarticular arm, which holds the medical device such as endoscope movably in the space. Additionally to a determination unit and a controller, the holding apparatus has an operation unit equipped with a plurality of operation members with which an operator's operation causes the arm unit to be moved spatially. The determination unit determines whether or not operator's operations at the plurality of operation members corresponds to an improper state deviating from a properly operated state in which at least two predetermined operation members have been operated within a predetermined period of time which is set to measure simultaneity for operations. If it is determined that the operation is in the improper state, the controller prohibits the arm unit from moving. As long as the operation is proper, the arm unit can be moved.
    • 用于保持医疗装置的装置具有装备有例如多关节臂的手臂单元,其将诸如内窥镜的医疗装置可移动地保持在该空间中。 除了确定单元和控制器之外,保持装置具有操作单元,该操作单元配备有操作者的操作使得臂单元在空间上移动的多个操作构件。 确定单元确定多个操作构件中的操作者的操作是否对应于在预定时间段内已经操作至少两个预定操作构件的适当操作状态偏离的不正确状态,该预定时间段被设置为测量同时性 作业。 如果确定操作处于不正常状态,则控制器禁止臂单元移动。 只要操作正确,可以移动手臂单元。