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    • 41. 发明授权
    • Processing method for conservation of processing gases
    • 处理气体的保存处理方法
    • US07628931B2
    • 2009-12-08
    • US11197434
    • 2005-08-05
    • Masashi SaitoYusuke HirayamaItsuko SakaiTokuhisa Ohiwa
    • Masashi SaitoYusuke HirayamaItsuko SakaiTokuhisa Ohiwa
    • H01L21/00C23C14/00C23C16/00
    • H01L21/31116H01J37/3244H01J37/32449H01J37/32834H01L21/67069H01L21/76802H01L21/76897
    • In order to facilitate control of a circulating gas, in a processing apparatus 100 having a showerhead 200 for supplying a processing gas into a processing chamber via a plurality of gas supply holes, a turbo pump 120 for evacuating the processing gas from the processing chamber 110 and a circulating gas piping 150 for returning at least a portion (circulating gas Q2) of the exhaust gas evacuated from the processing chamber by the turbo pump to the showerhead, the showerhead is provided with a primary gas supply system that supplies a primary gas Q1 supplied from a gas source 140 into the processing chamber via a plurality of primary gas outlet holes h1 and a circulating gas supply system that supplies the circulating gas into the processing chamber via a plurality of circulating gas supply holes h2, with the primary gas supply system and the circulating gas supply system constituted as systems independent of each other. Since the primary gas and the circulating gas are allowed to become mixed only in the processing chamber, the circulating gas can be controlled with a greater degree of ease without having to implement pressure control.
    • 为了便于循环气体的控制,在具有用于经由多个气体供给孔向处理室供给处理气体的喷淋头200的处理装置100中,用于从处理室110排出处理气体的涡轮泵120 以及循环气体管道150,用于使由涡轮泵将从处理室排出的废气的至少一部分(循环气体Q2)返回到喷头,循环气体管道150设置有主气体供给系统, 从气体源140经由多个主要气体出口孔h1和循环气体供给系统从气体源140供给到处理室,循环气体供给系统通过多个循环气体供给孔h2将循环气体供给到处理室,主气体供给系统 循环气体供给系统构成为彼此独立的系统。 由于一次气体和循环气体只能在处理室中混合,所以可以更容易地控制循环气体,而无需实施压力控制。
    • 42. 发明授权
    • Non-contact position sensor
    • 非接触式位置传感器
    • US07219563B2
    • 2007-05-22
    • US10910418
    • 2004-08-04
    • Masashi Saito
    • Masashi Saito
    • G01L3/02
    • G01D5/24452G01D3/0365G01D5/145G01D5/2448G01D5/24485G01D5/2449
    • A non-contact position sensor having improved rotational angle measuring accuracy is provided.A magnet is attached To a rotating shaft. An angle sensor element detects magnetic field changes generated from the magnet due to rotation of the rotating shaft. A signal processor, on the basis of a temperature detected by a temperature sensor, corrects variance between the sensors including the sensor element, the signal processor, and the magnet by correcting an amplitude value and/or an offset value of a signal or variance due to time of the amplitude value. The sensor element 1 outputs the first and second outputs v1 and v2 and the signal processor obtains the temperature coefficients of the amplitude values of the output v1 and output v2, or the temperature coefficients of the offset values, or the coefficients of variance due to time of the amplitude values, obtains the ratio of the first and second outputs corrected by these coefficients, and calculates the angle using the corrected ratio.
    • 提供了具有改进的旋转角度测量精度的非接触位置传感器。 磁铁附着在旋转轴上。 角度传感器元件检测由于旋转轴的旋转而从磁体产生的磁场变化。 信号处理器基于由温度传感器检测到的温度,通过校正信号的幅度值和/或信号的偏移值或方差来校正包括传感器元件,信号处理器和磁体的传感器之间的差异 到振幅值的时间。 传感器元件1输出第一和第二输出v 1和v 2,并且信号处理器获得输出v 1和输出v 2的振幅值的温度系数或偏移值的温度系数,或者系数 得到由这些系数修正的第一和第二输出的比例,并且使用校正的比率来计算角度。
    • 43. 发明申请
    • Processing method for conservation of processing gases
    • 处理气体的保存处理方法
    • US20050279731A1
    • 2005-12-22
    • US11197434
    • 2005-08-05
    • Masashi SaitoYusuke HirayamaItsuko SakaiTokuhisa Ohiwa
    • Masashi SaitoYusuke HirayamaItsuko SakaiTokuhisa Ohiwa
    • H01L21/3065B44C1/22H01L21/00
    • H01L21/31116H01J37/3244H01J37/32449H01J37/32834H01L21/67069H01L21/76802H01L21/76897
    • In order to facilitate control of a circulating gas, in a processing apparatus 100 having a showerhead 200 for supplying a processing gas into a processing chamber via a plurality of gas supply holes, a turbo pump 120 for evacuating the processing gas from the processing chamber 110 and a circulating gas piping 150 for returning at least a portion (circulating gas Q2) of the exhaust gas evacuated from the processing chamber by the turbo pump to the showerhead, the showerhead is provided with a primary gas supply system that supplies a primary gas Q1 supplied from a gas source 140 into the processing chamber via a plurality of primary gas outlet holes h1 and a circulating gas supply system that supplies the circulating gas into the processing chamber via a plurality of circulating gas supply holes h2, with the primary gas supply system and the circulating gas supply system constituted as systems independent of each other. Since the primary gas and the circulating gas are allowed to become mixed only in the processing chamber, the circulating gas can be controlled with a greater degree of ease without having to implement pressure control.
    • 为了便于循环气体的控制,在具有用于经由多个气体供给孔向处理室供给处理气体的喷淋头200的处理装置100中,用于从处理室110排出处理气体的涡轮泵120 以及循环气体管道150,用于将由涡轮泵从处理室排出的废气的至少一部分(循环气体Q 2)返回到喷头,循环气体管道150设置有主气体供给系统, Q 1经由多个主气体出口孔h 1和循环气体供给系统从气体源140供给到处理室,循环气体供给系统通过多个循环气体供给孔h 2将循环气体供给到处理室, 主要供气系统和循环供气系统构成为彼此独立的系统。 由于一次气体和循环气体只能在处理室中混合,所以可以更容易地控制循环气体,而无需实施压力控制。
    • 44. 发明授权
    • Electronic still camera
    • 电子静物相机
    • US06900842B2
    • 2005-05-31
    • US09813527
    • 2001-03-21
    • Masashi SaitoYasutoshi Fujii
    • Masashi SaitoYasutoshi Fujii
    • G03B13/36G02B7/28G02B7/32G02B7/36G03B13/14G03B15/05G03B17/20G03B19/02H04N5/232
    • G02B7/28G02B7/32H04N5/23212
    • An electronic still camera, comprises a lens to form an image of a subject; a distant measuring section to measure a distance to a subject and to output a distance signal; an image capturing focusing section having a driving section to shift the lens within a scanning range determined based on the distance signal, an image capturing element to output an image signal of the image of the subject and a detecting section to detect a focusing point of the lens based on the image signal; and a light measuring section to measure a luminance of the subject and to output a luminance signal. The image capturing focusing section changes the scanning range of the lens in accordance with the luminance signal measured by the light measuring section.
    • 一种电子静态照相机,包括用于形成被摄物体的图像的透镜; 远程测量部分,用于测量到被摄体的距离并输出距离信号; 图像拍摄聚焦部分,具有驱动部分,用于在基于距离信号确定的扫描范围内移动透镜;图像捕获元件,用于输出被摄体图像的图像信号;以及检测部分, 透镜基于图像信号; 以及光测量部分,用于测量被摄体的亮度并输出亮度信号。 图像捕获聚焦部根据由光测量部测量的亮度信号来改变透镜的扫描范围。
    • 47. 发明授权
    • Terminal for a cable and method for mounting a terminal
    • 电缆端子和端子安装方法
    • US06372990B1
    • 2002-04-16
    • US09567692
    • 2000-05-09
    • Masashi SaitoTakashi KoideMasahiko Aoyama
    • Masashi SaitoTakashi KoideMasahiko Aoyama
    • H02G1502
    • H01R9/0518H01R9/0515
    • A terminal is provided for stable mounting at a predetermined position of the leading end of a coaxial cable. The terminal 1 has rear side formed with a barrel 7 to be crimped into connection with the coaxial cable 2. A cover 11 is integrally provided before the barrel 7 for covering an exposed section of a core 3 of the coaxial cable 2. An embossed positioning portion 12 is formed between the barrel 7 and the cover 11. When the terminal 1 is mounted on a stripped end of the cable 2, the front end of a folded section 5A contacts a locking edge 12C of the positioning portion 12, thereby restricting any further insertion of the coaxial cable 2. Thus, the terminal 1 can be automatically positioned on the coaxial cable 2 with respect to the longitudinal direction of the coaxial cable 2.
    • 提供端子,用于稳定地安装在同轴电缆的前端的预定位置处。 端子1具有形成有筒体7的后侧,以与同轴电缆2连接。盖11一体地设置在筒体7之前,用于覆盖同轴电缆2的芯部3的暴露部分。压花定位 部分12形成在筒体7和盖子11之间。当端子1安装在电缆2的剥离端上时,折叠部分5A的前端接触定位部分12的锁定边缘12C,从而限制任何 进一步插入同轴电缆2.因此,终端1可以相对于同轴电缆2的纵向自动定位在同轴电缆2上。
    • 48. 发明授权
    • Shielding terminal
    • 屏蔽端子
    • US06200162B1
    • 2001-03-13
    • US09443801
    • 1999-11-19
    • Masahiko AoyamaMasashi SaitoTakashi Koide
    • Masahiko AoyamaMasashi SaitoTakashi Koide
    • H01R0905
    • H01R4/184H01R9/0518H01R43/04
    • An inner terminal 11 is accommodated in an accommodating portion 20 of an outer terminal 12 via a dielectric element 13. A core 2 of a shielded cable 1 is fastened to an inner fastening portion 18 of the inner terminal 11 outside the outer terminal 12, and then the inner terminal 11 is inserted into the dielectric element 13. A braided wire 4 is folded back around an end of a sheath 5, and an outer fastening portion 22 of the outer terminal 12 is fastened to a folded portion 4A thereof. A covering wall portion 21 in which only the upper surface is open is provided between the accommodating portion 20 and the outer fastening portion 22 of the outer terminal 12, and the inner fastening portion 18 is located in the covering wall portion 21. Upon the completion of crimping, the shielding terminal 10 is fixed by inserting the cover 14 into the opening 21A of the covering wall portion 21 and thereby elastically holding the outer fastening portion 22 by holding pieces 39 of a clip portion 37 from opposite lateral sides. As a result, the core 2 has its fastened portion and a portion near it covered on four sides by conductive members.
    • 内部端子11经由电介质元件13容纳在外部端子12的容纳部20中。屏蔽电缆1的芯2被紧固到外部端子12外部的内部端子11的内部紧固部18,并且 然后将内部端子11插入到电介质元件13中。编织线4围绕护套5的一端折回,并且外部端子12的外部紧固部分22紧固到其折叠部分4A。 在容纳部20和外部端子12的外部紧固部22之间设置只有上表面开口的覆盖壁部21,内侧紧固部18位于覆盖壁部21内。完成后 通过将盖14插入到覆盖壁部21的开口21A中而固定屏蔽端子10,从而通过从相对的侧面保持夹持部37的片39来弹性地保持外部紧固部22。 结果,芯2具有其紧固部分,并且靠近它的部分被导电构件四面覆盖。
    • 50. 发明授权
    • Ring trip circuit having a simple trip detecting circuit of a high
response speed
    • 环路跳闸电路具有高响应速度的简单跳闸检测电路
    • US5712910A
    • 1998-01-27
    • US686729
    • 1996-07-26
    • Masashi Saito
    • Masashi Saito
    • H04M3/02H04M3/22H04M19/02H04M1/00
    • H04M19/026H04M3/2272
    • In a ring trip circuit, a trip detecting circuit includes a low pass filter connected to opposite ends of a first resistor detecting an AC ringing signal, a diode bridge connected to an output of the low pass filter, a first series circuit connected to an output of the diode bridge and composed of a Zener diode and a light emitting diode of a first photocoupler, so that a phototransistor of the first photocoupler outputs a trip detection signal to a circuit which can be driven with a different power supply. A zero-crossing point detecting circuit has a second series circuit connected to the opposite ends of the first resistor and composed of a second resistor, a second Zener diode and a light emitting diode of a second photocoupler, so that a phototransistor of the second photocoupler outputs a zero-crossing point detection signal to a circuit which can be driven with a different power supply. A ringing signal supplying relay control circuit receives the trip detection signal and the zero-crossing point detection signal, for generating a switching signal at a zero-crossing point of the AC ringing signal.
    • 在环路跳闸电路中,跳闸检测电路包括连接到检测交流振铃信号的第一电阻器的相对端的低通滤波器,连接到低通滤波器的输出的二极管电桥,连接到输出端的第一串联电路 并由第一光电耦合器的齐纳二极管和发光二极管组成,使得第一光电耦合器的光电晶体管将跳闸检测信号输出到可以用不同电源驱动的电路。 过零点检测电路具有连接到第一电阻器的相对端的第二串联电路,由第二电阻器,第二齐纳二极管和第二光电耦合器的发光二极管组成,使得第二光电耦合器的光电晶体管 向可用不同电源驱动的电路输出过零点检测信号。 振铃信号供给继电器控制电路接收跳闸检测信号和过零点检测信号,用于在交流振铃信号的过零点产生切换信号。