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    • 1. 发明专利
    • Adhesive applicator
    • 胶粘剂应用者
    • JP2006026613A
    • 2006-02-02
    • JP2004213561
    • 2004-07-21
    • Masashi Saito正志 斉藤
    • SAITO MASASHI
    • B05C17/00B43M11/06
    • PROBLEM TO BE SOLVED: To improve pasting accuracy by applying an adhesive between side end parts of 2 pieces of paper previously arranged to be placed one upon another as it is to paste 2 pieces of the papers and to improve the workability by facilitating the pasting.
      SOLUTION: The adhesive applicator is provided with a guide means 20 for guiding 2 pieces of the paper K to relatively move in the plane direction of the papers K in a state in which the side edge parts 17 are placed one upon another and a coating means 30 for applying the adhesive N at least on one of the side edge parts 17 in the side edge parts 17 of 2 pieces of the paper K in a moving step. The guide means 20 comprises a pair of opposed guide plates 21 and a supporting part 28 for opening one end 22 of each guide plate 21 and for supporting another end 23 of each guide plate 21 so as to face 2 pieces of the paper K each other between guide plates 21. The coating means 30 is constituted of a holding part 31 provided on the supporting part 28 and for holding the adhesive N to be exposed between the guide plates and between 2 pieces of the paper K.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了通过在预先布置成彼此放置的2张纸的侧端部之间施加粘合剂来提供粘贴精度,因为它是粘贴2张纸,并且通过促进来提高加工性 粘贴。 解决方案:粘合剂施加器设置有引导装置20,用于在侧边缘部分17彼此放置的状态下引导2片纸张K在纸张K的平面方向上相对移动,并且 用于在移动步骤中至少在两片纸K的侧边缘部分17中的一个侧边缘部分17上施加粘合剂N的涂布装置30。 引导装置20包括一对相对的引导板21和用于打开每个引导板21的一个端部22的支撑部分28,并且用于支撑每个引导板21的另一个端部23,以便彼此面对2个纸张K. 涂布装置30由设置在支撑部28上的保持部31构成,用于保持要在导板之间和两片纸K之间露出的粘合剂N.(权利要求: C)2006,JPO&NCIPI
    • 4. 发明授权
    • Plasma processing apparatus and plasma processing method
    • 等离子体处理装置和等离子体处理方法
    • US08741097B2
    • 2014-06-03
    • US12913162
    • 2010-10-27
    • Yohei YamazawaChishio KoshimizuMasashi SaitoKazuki DenpohJun Yamawaku
    • Yohei YamazawaChishio KoshimizuMasashi SaitoKazuki DenpohJun Yamawaku
    • H01L21/306C23C16/00
    • H01J37/3211H01J37/321H01J37/32146H01L21/67109H01L21/6831
    • A plasma processing apparatus includes a processing chamber including a dielectric window; a coil-shaped RF antenna, provided outside the dielectric window; a substrate supporting unit provided in the processing chamber; a processing gas supply unit; an RF power supply unit for supplying an RF power to the RF antenna to generate a plasma of the processing gas by an inductive coupling in the processing chamber, the RF power having an appropriate frequency for RF discharge of the processing gas; a correction coil, provided at a position outside the processing chamber where the correction coil is to be coupled with the RF antenna by an electromagnetic induction, for controlling a plasma density distribution on the substrate in the processing chamber; a switching device provided in a loop of the correction coil; and a switching control unit for on-off controlling the switching device at a desired duty ratio by pulse width modulation.
    • 一种等离子体处理装置,包括:具有电介质窗的处理室; 设置在电介质窗外部的线圈状RF天线; 设置在所述处理室中的基板支撑单元; 处理气体供应单元; RF电源单元,用于向RF天线提供RF功率以通过处理室中的感应耦合产生处理气体的等离子体,所述RF功率具有用于处理气体的RF放电的适当频率; 校正线圈,设置在所述处理室外侧的位置处,所述校正线圈将通过电磁感应与所述RF天线耦合,用于控制所述处理室中的所述衬底上的等离子体密度分布; 设置在所述校正线圈的环路中的开关装置; 以及用于通过脉冲宽度调制以期望的占空比开关控制开关装置的开关控制单元。
    • 6. 发明授权
    • Plasma processing apparatus and plasma processing method
    • 等离子体处理装置和等离子体处理方法
    • US08608903B2
    • 2013-12-17
    • US12913135
    • 2010-10-27
    • Yohei YamazawaChishio KoshimizuMasashi SaitoKazuki DenpohJun YamawakuHachishiro Iizuka
    • Yohei YamazawaChishio KoshimizuMasashi SaitoKazuki DenpohJun YamawakuHachishiro Iizuka
    • H01L21/306C23C16/00
    • H01J37/321H01L21/31116H01L21/31122H01L21/31138
    • A plasma processing apparatus includes: a processing chamber including a dielectric window; a coil-shaped RF antenna, provided outside the dielectric window; a substrate supporting unit, provided in the chamber, for mounting thereon a target substrate; a processing gas supply unit for supplying a processing gas to the chamber; and an RF power supply unit for supplying an RF power to the RF antenna to generate a plasma of the processing gas by an inductive coupling in the chamber. The apparatus further includes a correction coil, provided at a position outside the chamber where the correction coil is to be coupled with the RF antenna by an electromagnetic induction, for controlling a plasma density distribution in the chamber; and an antenna-coil distance control unit for controlling a distance between the RF antenna and the correction coil while supporting the correction coil substantially in parallel with the RF antenna.
    • 一种等离子体处理装置,包括:包括电介质窗的处理室; 设置在电介质窗外部的线圈状RF天线; 基板支撑单元,设置在所述室中,用于在其上安装目标基板; 处理气体供应单元,用于将处理气体供应到所述室; 以及RF电源单元,用于向RF天线提供RF功率,以通过腔室中的感应耦合产生处理气体的等离子体。 该装置还包括校正线圈,其设置在室外的位置处,其中校正线圈将通过电磁感应与RF天线耦合,用于控制腔室中的等离子体密度分布; 以及天线线圈距离控制单元,用于在支撑基本上与RF天线并联的校正线圈的同时控制RF天线和校正线圈之间的距离。
    • 10. 发明申请
    • PLASMA PROCESSING APPARATUS AND PROCESSING GAS SUPPLY STRUCTURE THEREOF
    • 等离子体加工设备及其加工气体供应结构
    • US20110303362A1
    • 2011-12-15
    • US13159585
    • 2011-06-14
    • Masashi SAITO
    • Masashi SAITO
    • C23F1/08H01L21/00
    • H01J37/3244C23C16/45563H01J37/321H01J37/32449H01L21/67069
    • There is provided a plasma processing apparatus for performing a plasma process on a substrate mounted on a mounting table in a processing chamber by generating inductively coupled plasma within the processing chamber by applying a high frequency power to a high frequency antenna. The apparatus includes a multiple number of gas nozzles protruding from a sidewall of the processing chamber toward a center of the processing chamber in a space above the mounting table, and each gas nozzle has a gas discharge hole at a leading end of the gas nozzle in a protruding direction and a gas discharge hole at a sidewall of the gas nozzle. Further, the apparatus includes a rotation device configured to rotate each of the gas nozzles on each central axis of the gas nozzles and each central axis is extended in the protruding direction of each of the gas nozzles.
    • 提供了一种等离子体处理装置,用于通过对高频天线施加高频功率,通过在处理室内产生感应耦合等离子体,在安装在处理室中的安装台上的基板上进行等离子体处理。 该装置包括多个气体喷嘴,其从处理室的侧壁向安装台上方的空间朝向处理室的中心突出,并且每个气体喷嘴在气体喷嘴的前端具有排气孔 突出方向和在气体喷嘴的侧壁处的气体排出孔。 此外,该装置包括旋转装置,其构造成使气体喷嘴的每个中心轴线上的每个气体喷嘴旋转,并且每个中心轴线在每个气体喷嘴的突出方向上延伸。