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    • 42. 发明授权
    • Directed effusive beam atomic layer epitaxy system and method
    • 导向射流原子层外延系统及方法
    • US5316793A
    • 1994-05-31
    • US919685
    • 1992-07-27
    • Robert M. WallaceBruce E. Gnade
    • Robert M. WallaceBruce E. Gnade
    • B01J19/00C23C16/44C23C16/455C30B25/02C30B25/14H01L21/205C23C16/00
    • C23C16/45544C23C16/45517C30B25/14
    • A system and method for epitaxial growth of high purity materials on an atomic or molecular layer by layer basis wherein a substrate is placed in an evacuated chamber which is evacuated to a pressure of less than about 10.sup.-9 Torr and predetermined amounts of predetermined precursor gases are injected into the chamber from a location in the chamber closely adjacent the substrate to form the atomic or molecular layer at the surface of the substrate while maintaining the pressure at less than about 10.sup.-9 Torr in the chamber in regions thereof distant from the substrate. The precursor gases are provided from a plurality of tanks containing the precursor gases therein under predetermined pressure and predetermined ones of the tanks are opened to the chamber for predetermined time periods while maintaining the pressure in the tanks. A dose limiting structure is provided for directing predetermined amounts of the precursor gases principally at the substrate with a dose limiting directional structure.
    • 一种用于以原子或分子层为基础外延生长高纯度材料的系统和方法,其中将衬底放置在抽真空至小于约10-9乇的压力的预抽真空室中,并将预定量的预定前体气体 从与基板紧邻的室中的位置注入室中,以在基板的表面处形成原子层或分子层,同时在远离基板的区域中将室内的压力维持在小于约10-9乇 。 前体气体由预定压力下容纳其中的前体气体的多个容器提供,并且预定的这些罐在腔室中保持预定的时间段同时保持在罐中的压力。 提供了剂量限制结构,用于以剂量限制的方向结构主要在衬底上引导预定量的前体气体。
    • 44. 发明申请
    • SYNTHESIZING GRAPHENE FROM METAL-CARBON SOLUTIONS USING ION IMPLANTATION
    • 使用离子植入法合成来自金属碳解决方案的石墨
    • US20100224851A1
    • 2010-09-09
    • US12706116
    • 2010-02-16
    • Luigi ColomboRobert M. WallaceRodney S. Ruoff
    • Luigi ColomboRobert M. WallaceRodney S. Ruoff
    • H01L29/15C04B35/536H01L21/20
    • H01L21/02612H01L21/02527
    • A method and semiconductor device for synthesizing graphene using ion implantation of carbon. Carbon is implanted in a metal using ion implantation. After the carbon is distributed in the metal, the metal is annealed and cooled in order to precipitate the carbon from the metal to form a layer of graphene on the surface of the metal. The metal/graphene surface is then transferred to a dielectric layer in such a manner that the graphene layer is placed on top of the dielectric layer. The metal layer is then removed. Alternatively, recessed regions are patterned and etched in a dielectric layer located on a substrate. Metal is later formed in these recessed regions. Carbon is then implanted into the metal using ion implantation. The metal may then be annealed and cooled in order to precipitate the carbon from the metal to form a layer of graphene on the metal's surface.
    • 一种使用碳的离子注入合成石墨烯的方法和半导体器件。 使用离子注入将碳注入金属中。 在碳分布在金属中之后,对金属进行退火和冷却,以便从金属沉淀碳以在金属表面上形成一层石墨烯。 然后将金属/石墨烯表面转移到电介质层,使得石墨烯层被放置在电介质层的顶部上。 然后去除金属层。 或者,将凹陷区域图案化并蚀刻在位于基底上的电介质层中。 金属后来形成在这些凹陷区域。 然后使用离子注入将碳注入到金属中。 然后可以对金属进行退火和冷却,以便从金属沉淀碳以在金属表面上形成一层石墨烯。
    • 46. 发明授权
    • Method of forming a nano-rugged silicon-containing layer
    • 形成纳米坚固的含硅层的方法
    • US06040230A
    • 2000-03-21
    • US39075
    • 1998-03-13
    • John Mark AnthonyRobert M. WallaceYi WeiGlen Wilk
    • John Mark AnthonyRobert M. WallaceYi WeiGlen Wilk
    • H01L21/02H01L21/20
    • H01L28/82
    • An embodiment of the instant invention is a method of forming a nano-rugged silicon-containing layer, the method comprising the steps of: providing a first silicon-containing layer (steps 202 or 802); providing a patterning layer over the first silicon-containing layer (steps 204 or 804); the patterning layer comprised of an amorphous substance; providing a second silicon-containing layer (steps 206 or 808) over the patterning layer; and wherein the patterning layer creates a nano-rugged texture in the second silicon-containing layer. Preferably, the first and second silicon-containing layers are comprised of polycrystalline silicon. In an alternative embodiment, the patterning layer is comprised of a material which has small holes such that the step of providing the second silicon-containing layer utilizes the first silicon-containing layer as a seed layer through the small holes so as to form the second silicon-containing layer. In another alternative embodiment, the second silicon-containing layer is comprised of a plurality of islands of the silicon-containing material separated by voids in the material. Preferably, the patterning layer is comprised of SiO.sub.2.
    • 本发明的一个实施方案是一种形成纳米坚固的含硅层的方法,所述方法包括以下步骤:提供第一含硅层(步骤202或802); 在第一含硅层上提供图形层(步骤204或804); 所述图案层由无定形物质构成; 在所述图案化层上提供第二含硅层(步骤206或808); 并且其中所述图案化层在所述第二含硅层中产生纳米坚固纹理。 优选地,第一和第二含硅层由多晶硅组成。 在替代实施例中,图案化层由具有小孔的材料构成,使得提供第二含硅层的步骤通过该小孔利用第一含硅层作为种子层,从而形成第二含硅层 含硅层。 在另一个替代实施例中,第二含硅层由多个岛状的含硅材料构成,该岛由材料中的空隙分开。 优选地,图案化层由SiO 2组成。