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    • 45. 发明授权
    • Actuator capable of driving with large rotational angle or large deflection angle
    • 能够以大的旋转角度或大的偏转角度驱动的致动器
    • US07880365B2
    • 2011-02-01
    • US12629957
    • 2009-12-03
    • Mitsuhiro YodaHirokazu Ito
    • Mitsuhiro YodaHirokazu Ito
    • H02N1/00
    • G02B26/0841H02N1/006
    • An actuator 100 includes: a pair of driving portions 1, 11 spaced apart from each other; a movable portion 2 provided between the pair of driving portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of driving portions 1, 11 and the movable portion 2; a pair of first elastic connecting portions 4, 4 which respectively connect the pair of driving portions 1, 11 to the pair of supporting portions 3, 3 so that each of the driving portions 1, 11 can rotate with respect to the supporting portions 3, 3; and a pair of second elastic connecting portions 5, 5 which respectively connect the movable portion 2 to the pair of driving portions 1, 11 so that the movable portion 2 can rotate in accordance with the rotation of the pair of driving portions 1, 11.
    • 致动器100包括:彼此间隔开的一对驱动部分1,11; 设置在所述一对驱动部1,11之间的可动部2; 一对用于支撑一对驱动部分1,11和可移动部分2的支撑部分3,3; 分别将一对驱动部1,11分别连接到一对支撑部3,3的一对第一弹性连接部4,4,使得各驱动部1,11能够相对于支撑部3旋转, 3; 以及分别将可动部分2连接到一对驱动部分1,11的一对第二弹性连接部分5,5,使得可动部分2能够根据一对驱动部分1,11的旋转而旋转。
    • 46. 发明授权
    • Pattern inspection apparatus
    • 图案检验仪
    • US07599054B2
    • 2009-10-06
    • US12073083
    • 2008-02-29
    • Masayoshi TakedaHirokazu Ito
    • Masayoshi TakedaHirokazu Ito
    • G01N21/00
    • G01N21/95607G01N21/8851G01N2021/8416
    • The defect confirmation screen of a pattern inspection apparatus that allows the user to create a recipe and check defects easily and quickly includes a “map display part” where a wafer map is displayed, an “image display part” where a list of defect images is displayed, a “list display part” where detailed information on defects is displayed and set, and a “graph display part” where a graph is displayed for selected defect items. Those display parts cooperate with each other and change the defect images, defect information list, and defect graph according to selected map information. A classification code, a clustering condition, and a display filter entered using the information described above are registered in a recipe.
    • 允许用户容易地快速地创建食谱和检查缺陷的图案检查装置的缺陷确认屏幕包括:显示晶片图的“地图显示部”,缺陷图像的列表的“图像显示部” 显示和显示有关缺陷的详细信息的“列表显示部分”以及显示所选择的缺陷项目的图形的“图形显示部分”。 这些显示部件相互配合,根据所选择的地图信息改变缺陷图像,缺陷信息列表和缺陷图形。 使用上述信息输入的分类代码,聚类条件和显示过滤器被登记在配方中。
    • 48. 发明申请
    • Inspection apparatus and an inspection method
    • 检验仪器和检验方法
    • US20080099675A1
    • 2008-05-01
    • US11976965
    • 2007-10-30
    • Takashi HiroiHiroshi MiyaiHirokazu ItoMichio Nakano
    • Takashi HiroiHiroshi MiyaiHirokazu ItoMichio Nakano
    • G21K5/04
    • G06T7/001G06T2200/24G06T2207/10061G06T2207/30148H01J2237/2817
    • An inspection apparatus includes an irradiation optical system for irradiating an inspection target with an electron beam, a scanning unit for scanning an irradiation position in the X direction and the Y direction, an electrification control electrode for controlling secondary electrons or reflected electrons generated on the inspection target by the irradiation with the electron beam, a sensor for detecting the secondary electrons or the reflected electrons, an A/D converter for sequentially converting the signals into digital image signals from an irradiation start point-in-time of the electron beam, an addition circuit for creating a detection image by adding the digital image signals from a first set point-in-time to a second set point-in-time on each pixel basis, and an image processing circuit for judging a defect by comparing the detection image with a reference image of a circuit pattern formed on the inspection target.
    • 一种检查装置,包括:用于用电子束照射检查对象的照射光学系统,用于扫描X方向和Y方向的照射位置的扫描单元,用于控制在检查中产生的二次电子或反射电子的带电控制电极 通过用电子束照射的目标,用于检测二次电子或反射电子的传感器,用于从电子束的照射开始时间点将信号顺序地转换成数字图像信号的A / D转换器, 用于通过在每个像素的基础上将来自第一设定时刻的数字图像信号与第二设定时间点相加来创建检测图像的加法电路,以及用于通过比较检测图像来判断缺陷的图像处理电路 具有形成在检查对象上的电路图案的参照图像。
    • 49. 发明授权
    • Capacitive acceleration sensor system
    • 电容式加速度传感器系统
    • US07287429B2
    • 2007-10-30
    • US11073600
    • 2005-03-08
    • Akinobu UmemuraHirokazu Ito
    • Akinobu UmemuraHirokazu Ito
    • G01P15/125
    • G01P15/125
    • An acceleration sensor system includes: a first and a second fixed electrodes; a movable electrode for providing a first and a second capacitors; a detection capacitor for detecting a capacitance difference between the first and the second capacitors; a charge voltage conversion circuit for converting a capacitance change of the detection capacitor to an output voltage; a detection bias voltage applying circuit; a vibrating circuit for vibrating the movable electrode such that a displacement bias voltage is applied in a first period and no displacement bias voltage is applied in a second period; a sampling circuit for sampling the output voltage during the second period when the movable electrode is constantly vibrated; and an acceleration signal generating and outputting circuit for generating an acceleration signal on the basis of a sampling result.
    • 加速度传感器系统包括:第一和第二固定电极; 用于提供第一和第二电容器的可移动电极; 检测电容器,用于检测第一和第二电容器之间的电容差; 用于将检测电容器的电容变化转换为输出电压的充电电压转换电路; 检测偏压施加电路; 用于振动可动电极的振动电路,使得在第一周期中施加位移偏置电压,并且在第二周期中不施加位移偏置电压; 用于在可动电极不断地振动的第二时段期间对输出电压进行采样的采样电路; 以及加速度信号生成和输出电路,用于根据采样结果产生加速度信号。