会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 43. 发明授权
    • Method for forming bridge free silicide by reverse spacer
    • 通过反向间隔物形成无桥硅化物的方法
    • US06316323B1
    • 2001-11-13
    • US09532847
    • 2000-03-21
    • Edberg FangWen-Yi HsiehTeng-Chun Tsai
    • Edberg FangWen-Yi HsiehTeng-Chun Tsai
    • H01L21336
    • H01L29/66583H01L21/28052H01L21/28114H01L29/42376H01L29/66492H01L29/665H01L29/66537H01L29/66553
    • The proposed invention is used to prevent the bridging issue of salicide process and also to provide a self-aligned contacted process in conventional self-aligned silicide process. In short, the proposed invention is a two-step silicide process with a reverse spacer structure, and comprises following steps: providing a substrate; forming a pad layer on the substrate; forming a first cap layer on the pad layer; defining a trench region over the substrate and forming the trench; implanting first ions into part of the substrate that is uncovered by the first layer; forming a pair of spacers inside the trench; implanting second ions into part of the substrate that is not covered by the first layer and the spacers; forming a gate oxide layer that is located inside the trench; filling a polysilicon layer into the trench; capping a first metal layer on the polysilicon layer; performing a first rapid thermal process; removing unreacted the first metal layer; filling the trench by a second cap layer; removing the first cap layer and the pad layer that are not located inside the trench region, and then a gate structure is formed; forming a source and a drain inside the substrate; forming a second metal layer on the substrate; performing a second rapid thermal process; removing unreacted the second metal layer; performing a third rapid thermal process; forming a third cap layer on the substrate; and forming a pair of contacts inside the third cap layer.
    • 所提出的发明用于防止自对准硅化物工艺的桥接问题,并且还提供了常规自对准硅化物工艺中的自对准接触工艺。 简而言之,本发明是具有反向间隔结构的两步硅化物工艺,包括以下步骤:提供衬底; 在衬底上形成衬垫层; 在所述垫层上形成第一盖层; 在衬底上限定沟槽区域并形成沟槽; 将第一离子注入未被第一层覆盖的部分基底; 在沟槽内形成一对垫片; 将第二离子注入未被第一层和间隔物覆盖的基底的一部分中; 形成位于沟槽内的栅氧化层; 将多晶硅层填充到沟槽中; 在多晶硅层上覆盖第一金属层; 执行第一快速热处理; 去除未反应的第一金属层; 通过第二盖层填充沟槽; 去除不位于沟槽区域内的第一覆盖层和焊盘层,然后形成栅极结构; 在衬底内形成源极和漏极; 在所述基板上形成第二金属层; 执行第二快速热处理; 去除未反应的第二金属层; 进行第三次快速热处理; 在所述基板上形成第三盖层; 以及在所述第三盖层内形成一对触点。