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41. 发明授权

US5334282A Electron beam lithography system and method 失效
标题翻译：电子束光刻系统及方法
公开(公告)号：US5334282A
公开(公告)日：1994-08-02
申请号：US765252
申请日：1991-09-25
申请人： Yoshinori Nakayama , Shinji Okazaki
发明人： Yoshinori Nakayama , Shinji Okazaki
IPC分类号： H01L21/027 , B23K15/00 , G03F7/20 , H01J37/317 , A61K27/02
CPC分类号： B82Y10/00 , B23K15/0013 , B82Y40/00 , G03F7/2061 , H01J37/3174 , H01J2237/30472 , H01J2237/31767 , H01J2237/31769 , H01J2237/31776 , Y10S438/946 , Y10S438/949
摘要： An electron beam lithography system and method which provide an in-plane current density distribution of an electron beam focussed onto a specimen so as to prevent a proximity effect and space charge effect.
摘要翻译：提供电子束光刻系统和方法，其提供聚焦在样本上的电子束的面内电流密度分布，以防止接近效应和空间电荷效应。

42. 发明授权

US4798470A Pattern printing method and apparatus 失效
标题翻译：图案印刷方法和装置
公开(公告)号：US4798470A
公开(公告)日：1989-01-17
申请号：US927939
申请日：1986-11-07
申请人： Shigeo Moriyama , Toshiei Kurosaki , Tsuneo Terasawa , Shinji Okazaki , Yoshio Kawamura
发明人： Shigeo Moriyama , Toshiei Kurosaki , Tsuneo Terasawa , Shinji Okazaki , Yoshio Kawamura
IPC分类号： G03F9/00 , G01B11/00
CPC分类号： G03F9/7026 , G03F9/7076 , G03F9/7084
摘要： A pattern printing method includes a step of printing a pattern on a wafer on the basis of a target mark provided on the surface of the wafer which is opposite to the surface thereof on which the pattern is to be printed. Also disclosed is a pattern printing apparatus which comprises detecting means for detecting a target mark provided on the surface of a wafer which is opposite to the surface thereof on which a pattern is to be printed, and pattern printing means for printing the pattern on the pattern printing surface of the wafer on the basis of mark position data obtained by the detecting means.
摘要翻译：图案印刷方法包括基于设置在与要印刷图案的表面相对的晶片表面上的目标标记在晶片上印刷图案的步骤。还公开了一种图案打印装置，其包括检测装置，用于检测设置在与其上要印刷图案的表面相对的晶片表面上的目标标记，以及用于在图案上印刷图案的图案印刷装置基于由检测装置获得的标记位置数据，晶片的印刷表面。

43. 发明授权

US4740693A Electron beam pattern line width measurement system 失效
标题翻译：电子束图案线宽测量系统
公开(公告)号：US4740693A
公开(公告)日：1988-04-26
申请号：US807681
申请日：1985-12-11
申请人： Yoshinori Nakayama , Shinji Okazaki , Hidehito Obayashi , Mikio Ichihashi
发明人： Yoshinori Nakayama , Shinji Okazaki , Hidehito Obayashi , Mikio Ichihashi
IPC分类号： G01S13/74 , G01B7/02 , G01B15/00 , H01J37/28 , G01B7/14
CPC分类号： H01J37/28 , G01B15/00 , G01B7/02
摘要： Disclosed is an electron beam pattern line width measurement system wherein an electron beam is converged to a fine spot, the electron beam is scanned on a sample formed with a pattern to-be-measured, secondary electrons generated from a surface of the sample by the projection of the electron beam are detected, and the detected signal is processed to determine a line width of the pattern to-be-measured, comprising a secondary electron detector which detects a signal corresponding to an amount of all secondary electrons generated by the scanning, and a secondary electron energy analyzer which selectively detects a signal corresponding to an amount of secondary electrons of specified energy. With the electron beam pattern line width measurement system, it becomes possible to precisely detect a pattern boundary region defined by different sorts of materials in a stepped structure of a small level difference not having been measurable with a prior-art electron beam pattern line width measurement system.
摘要翻译：公开了一种电子束图案线宽度测量系统，其中电子束会聚到细微点，电子束在形成有要测量图案的样品上扫描，从样品表面产生的二次电子被检测电子束的投影，并且处理检测信号以确定要测量的图案的线宽，包括二次电子检测器，其检测对应于由扫描产生的所有二次电子的量的信号，以及二次电子能量分析器，其选择性地检测与特定能量的二次电子量对应的信号。利用电子束图案线宽度测量系统，可以精确地检测由现有技术的电子束图案线宽度测量不能测量的小电平差的阶梯式结构中由不同种类的材料限定的图案边界区域系统。

44. 发明授权

US08989225B2 Laser apparatus 有权
标题翻译：激光设备
公开(公告)号：US08989225B2
公开(公告)日：2015-03-24
申请号：US13590558
申请日：2012-08-21
申请人： Kouji Kakizaki , Shinji Okazaki , Osamu Wakabayashi , Takashi Onose , Shinichi Matsumoto
发明人： Kouji Kakizaki , Shinji Okazaki , Osamu Wakabayashi , Takashi Onose , Shinichi Matsumoto
IPC分类号： H01S3/10 , H01S5/06 , H01S3/225 , H01S3/23 , H01S5/00 , H01S5/40 , H01S3/08 , H01S3/1055 , H01S3/106 , H01S5/062 , H01S3/00 , H01S3/16
CPC分类号： H01S3/10 , H01S3/005 , H01S3/08004 , H01S3/08086 , H01S3/10092 , H01S3/1055 , H01S3/106 , H01S3/1625 , H01S3/225 , H01S3/2251 , H01S3/2325 , H01S3/235 , H01S3/2375 , H01S5/0092 , H01S5/0604 , H01S5/06216 , H01S5/4012 , H01S5/4087
摘要： A laser apparatus includes a master oscillator capable of outputting a laser beam having a spectrum that includes at least three wavelength peaks, a multi-wavelength oscillation control mechanism capable of controlling energy of each of the wavelength peaks, a spectrum detecting unit that detects the spectrum of the above-mentioned laser beam, and a controller that controls the multi-wavelength oscillation control mechanism based on a detection result detected by the spectrum detecting unit.
摘要翻译：激光装置包括能够输出具有包括至少三个波长峰值的光谱的激光束的主振荡器，能够控制每个波长峰值的能量的多波长振荡控制机构，检测频谱的频谱检测单元以及控制器，其基于由所述频谱检测单元检测到的检测结果来控制所述多波长振荡控制机构。

45. 发明授权

US08575547B2 Electron beam measurement apparatus 有权
标题翻译：电子束测量装置
公开(公告)号：US08575547B2
公开(公告)日：2013-11-05
申请号：US12982202
申请日：2010-12-30
申请人： Yasunari Sohda , Shoji Hotta , Shinji Okazaki , Muneyuki Fukuda
发明人： Yasunari Sohda , Shoji Hotta , Shinji Okazaki , Muneyuki Fukuda
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G03F7/7065 , G03F7/70541 , G03F7/70625 , G06T7/0006 , G06T2207/10056 , G06T2207/30148 , H01J2237/221 , H01J2237/24578 , H01J2237/2817 , H01L22/12
摘要： The present invention provides an electron beam measurement technique for measuring the shapes or sizes of portions of patterns on a sample, or detecting a defect or the like. An electron beam measurement apparatus has a unit for irradiating the patterns delineated on a substrate by a multi-exposure method, and classifying the patterns in an acquired image into multiple groups according to an exposure history record. The exposure history record is obtained based on brightness of the patterns and a difference between white bands of the patterns.
摘要翻译：本发明提供一种电子束测量技术，用于测量样品上图案的形状或尺寸，或检测缺陷等。电子束测量装置具有通过多曝光方法照射在基板上描绘的图案的单元，并且根据曝光历史记录将所获取的图像中的图案分类为多组。基于图案的亮度和图案的白色波段之间的差异获得曝光历史记录。

46. 发明授权

US07884325B2 Electron beam measurement apparatus 有权
标题翻译：电子束测量装置
公开(公告)号：US07884325B2
公开(公告)日：2011-02-08
申请号：US12328161
申请日：2008-12-04
申请人： Yasunari Sohda , Shoji Hotta , Shinji Okazaki , Muneyuki Fukuda
发明人： Yasunari Sohda , Shoji Hotta , Shinji Okazaki , Muneyuki Fukuda
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G03F7/7065 , G03F7/70541 , G03F7/70625 , G06T7/0006 , G06T2207/10056 , G06T2207/30148 , H01J2237/221 , H01J2237/24578 , H01J2237/2817 , H01L22/12
摘要： The present invention provides an electron beam measurement technique for measuring the shapes or sizes of portions of patterns on a sample, or detecting a defect or the like. An electron beam measurement apparatus has a unit for irradiating the patterns delineated on a substrate by a multi-exposure method, and classifying the patterns in an acquired image into multiple groups according to an exposure history record. The exposure history record is obtained based on brightness of the patterns and a difference between white bands of the patterns.
摘要翻译：本发明提供一种电子束测量技术，用于测量样品上图案的形状或尺寸，或检测缺陷等。电子束测量装置具有通过多曝光方法照射在基板上描绘的图案的单元，并且根据曝光历史记录将所获取的图像中的图案分类为多组。基于图案的亮度和图案的白色波段之间的差异获得曝光历史记录。

47. 发明申请

US20090206252A1 Defect inspection method and its system 有权
标题翻译：缺陷检查方法及其系统
公开(公告)号：US20090206252A1
公开(公告)日：2009-08-20
申请号：US12320574
申请日：2009-01-29
申请人： Shinji Okazaki , Shoji Hotta , Yasunari Sohda , Yoshinori Nakayama
发明人： Shinji Okazaki , Shoji Hotta , Yasunari Sohda , Yoshinori Nakayama
IPC分类号： G01N23/00
CPC分类号： H01L22/12 , G06T7/0006 , G06T7/001 , G06T2207/10056 , G06T2207/30148 , H01L2924/0002 , H01L2924/00
摘要： A method for enabling management of fatal defects of semiconductor integrated patterns easily, the method enables storing of design data of each pattern designed by a semiconductor integrated circuit designer, as well as storing of design intent data having pattern importance levels ranked according to their design intents respectively. The method also enables anticipating of defects to be generated systematically due to the characteristics of the subject exposure system, etc. while each designed circuit pattern is exposed and delineated onto a wafer in a simulation carried out beforehand and storing those defects as hot spot information. Furthermore, the method also enables combining of the design intent data with hot spot information to limit inspection spots that might include systematic defects at high possibility with respect to the characteristics of the object semiconductor integrated circuit and shorten the defect inspection time significantly.
摘要翻译：一种能够容易地管理半导体集成图案的致命缺陷的方法，该方法能够存储由半导体集成电路设计者设计的每个图案的设计数据，以及存储具有根据其设计意图排列的图案重要性级别的设计意图数据分别。该方法还可以预测由于目标曝光系统等的特性而系统地产生的缺陷，同时在预先进行的模拟中将每个设计的电路图案暴露并描绘到晶片上，并将这些缺陷存储为热点信息。此外，该方法还能够将设计意图数据与热点信息组合，以限制可能包括关于对象半导体集成电路的特性的高可能性的系统缺陷的检查点，并显着缩短缺陷检查时间。

48. 发明授权

US07337228B2 Information processing method and apparatus and recording medium for controlling and simplifying a sign-up operation of an apparatus over a network 失效
标题翻译：用于控制和简化通过网络的装置的注册操作的信息处理方法和装置和记录介质
公开(公告)号：US07337228B2
公开(公告)日：2008-02-26
申请号：US09996019
申请日：2001-11-28
申请人： Satoru Maeda , Munehiro Yoshikawa , Nobutaka Tani , Shinji Okazaki , Natsuko Yotsumoto , Masahiro Asai , Mami Uchida , Takaaki Miura , Katsuhisa Takata
发明人： Satoru Maeda , Munehiro Yoshikawa , Nobutaka Tani , Shinji Okazaki , Natsuko Yotsumoto , Masahiro Asai , Mami Uchida , Takaaki Miura , Katsuhisa Takata
IPC分类号： G06F15/16
CPC分类号： H04N21/42684 , H04N7/17318 , H04N21/25833 , H04N21/25883 , H04N21/4622 , H04N21/4753 , H04N21/6582
摘要： An information processing method and apparatus for enabling more prompt sign-up. A network management server at step S62 received am equipment serial number from an information processing apparatus and, at step s63, references a database to retrieve a received equipment serial number. If the equipment serial number has not been found, the program moves to step S16 where a command for initiating manual setting is sent to an information processing apparatus. If the equipment serial number has been found, the program moves to step S81 to verify whether or not the admittance made or admittance not as yet made, recorded in the database in association with the equipment serial number received is admittance made. If the verified result indicates admittance not as yet made, the program moves to step S82 where the network management server sends an automatic setting initiating command to the information processing apparatus.
摘要翻译：一种用于使得能够更快速地注册的信息处理方法和装置。步骤S62中的网络管理服务器从信息处理装置接收到设备序列号，并且在步骤s 63，引用数据库来检索接收到的设备序列号。如果未找到设备序列号，则程序移动到步骤S16，在步骤S16中，向信息处理设备发送开始手动设置的命令。如果已经找到设备序列号，则程序进入步骤S81，以验证与接收到的设备序列号相关联地记录在数据库中的还未进行的准入或准入是否是准入的。如果验证结果表示尚未进行导入，则程序移动到步骤S82，网络管理服务器向信息处理设备发送自动设置发起命令。

49. 发明申请

US20060206916A1 Information processing system, information processing apparatus and method, recording medium, and program 审中-公开
标题翻译：信息处理系统，信息处理装置和方法，记录介质和程序
公开(公告)号：US20060206916A1
公开(公告)日：2006-09-14
申请号：US11431368
申请日：2006-05-10
申请人： Satoru Maeda , Manabu Onishi , Shinji Okazaki , Katsutoshi Sakao
发明人： Satoru Maeda , Manabu Onishi , Shinji Okazaki , Katsutoshi Sakao
IPC分类号： H04N7/16
CPC分类号： H04N21/6131 , A63F2300/409 , H04N5/38 , H04N5/4401 , H04N5/76 , H04N5/765 , H04N5/775 , H04N5/907 , H04N5/913 , H04N7/163 , H04N9/8042 , H04N21/4227 , H04N21/4325 , H04N21/4333 , H04N21/4334 , H04N21/43615 , H04N21/4363 , H04N21/43637 , H04N21/4367 , H04N21/4622
摘要： The present invention propose an broadcast reception system, wherein a program reception control apparatus is connected to Internet via a network interface to which a terminal apparatus carrying by a user. The broadcast received at antenna is selected by a tuner, A/D converted, compressed at a compression unit, and encrypted at an encryption unit. The encrypted data from the encryption unit changed to packets at packet creation unit, and transmitted to the terminal apparatus via the network interface. A User is able to view the program in real time before the end of the broadcast for the program by successively creating data based on the received data, and transmitting them.
摘要翻译：本发明提出一种广播接收系统，其中节目接收控制装置通过由用户携带的终端装置的网络接口连接到因特网。在天线接收的广播是通过调谐器来选择的，A / D转换，压缩单元压缩，并以加密单元加密。来自加密单元的加密数据在分组创建单元处改变为分组，经由网络接口发送到终端装置。用户能够在节目广播结束之前实时地观看节目，依次接收数据并发送数据。

50. 发明申请

US20060206915A1 Information processing system, information processing apparatus and method, recording medium, and program 审中-公开
标题翻译：信息处理系统，信息处理装置和方法，记录介质和程序
公开(公告)号：US20060206915A1
公开(公告)日：2006-09-14
申请号：US11431367
申请日：2006-05-10
申请人： Satoru Maeda , Manabu Onishi , Shinji Okazaki , Katsutoshi Sakao
发明人： Satoru Maeda , Manabu Onishi , Shinji Okazaki , Katsutoshi Sakao
IPC分类号： H04N7/16
CPC分类号： H04N21/6131 , A63F2300/409 , H04N5/38 , H04N5/4401 , H04N5/76 , H04N5/765 , H04N5/775 , H04N5/907 , H04N5/913 , H04N7/163 , H04N9/8042 , H04N21/4227 , H04N21/4325 , H04N21/4333 , H04N21/4334 , H04N21/43615 , H04N21/4363 , H04N21/43637 , H04N21/4367 , H04N21/4622
摘要： The present invention propose an broadcast reception system, wherein a program reception control apparatus is connected to Internet via a network interface to which a terminal apparatus carrying by a user. The broadcast received at an antenna is selected by a tuner, A/D converted, compressed at a compression unit, and encrypted at an encryption unit. The encrypted data from the encryption unit changed to packets at packet creation unit, and transmitted to the terminal apparatus via the network interface. A User is able to view the program in real time before the end of the broadcast for the program by successively creating data based on the received data, and transmitting them.
摘要翻译：本发明提出一种广播接收系统，其中节目接收控制装置通过由用户携带的终端装置的网络接口连接到因特网。在天线处接收的广播由调谐器选择，A / D转换，压缩单元压缩，并以加密单元进行加密。来自加密单元的加密数据在分组创建单元处改变为分组，经由网络接口发送到终端装置。用户能够在节目广播结束之前实时地观看节目，依次接收数据并发送数据。

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