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    • 42. 发明授权
    • Nitride semiconductor light emitting element
    • 氮化物半导体发光元件
    • US08004006B2
    • 2011-08-23
    • US12084634
    • 2006-11-07
    • Ken NakaharaAtsushi Yamaguchi
    • Ken NakaharaAtsushi Yamaguchi
    • H01L33/00
    • H01L33/20H01L21/78H01L33/0095H01L33/44
    • Provided are a nitride semiconductor light emitting element which does not suffer a damage on a light emitting region and has a high luminance without deterioration, even though the nitride semiconductor light emitting element is one in which electrodes are disposed opposite to each other and an isolation trench for chip separation and laser lift-off is formed by etching; and a manufacturing method thereof. An n-type nitride semiconductor layer 2 has a step, formed in a position beyond an active layer 3 when viewed from a p side. Up to the position of this step A, a protective insulating film 6 covers a part of the n-type nitride semiconductor layer 2, the active layer 3, a p-type nitride semiconductor layer 4, the side of a p electrode 5 and a part of the top side of the p electrode 5. The use of a structure having a chip side face covered with the protective insulating film 6 prevents the active layer or the like from being exposed to an etching gas for a long time when an isolation trench for chip separation or laser lift-off is formed by etching.
    • 提供一种氮化物半导体发光元件,即使氮化物半导体发光元件是彼此相对设置的电极和隔离沟槽,也不会对发光区域造成损害并具有高亮度而不劣化 通过蚀刻形成芯片分离和激光剥离; 及其制造方法。 当从p侧观察时,n型氮化物半导体层2具有形成在超过有源层3的位置的台阶。 直到该步骤A的位置,保护绝缘膜6覆盖n型氮化物半导体层2,有源层3,p型氮化物半导体层4,p型电极5的一侧以及部分 使用由保护绝缘膜6覆盖的具有芯片侧面的结构使得有源层等长时间暴露于蚀刻气体时,当用于 通过蚀刻形成芯片分离或激光剥离。
    • 47. 发明授权
    • Beam irradiation apparatus
    • 光束照射装置
    • US07773281B2
    • 2010-08-10
    • US12496334
    • 2009-07-01
    • Yoshiaki MaenoAtsushi Yamaguchi
    • Yoshiaki MaenoAtsushi Yamaguchi
    • G02B26/08
    • G02B26/085G02B26/0875G02B26/105
    • A beam irradiation apparatus includes: an optical element which changes a travel direction of a laser beam by being rotated in a predetermined direction; an actuator which rotates the optical element in the direction; a refractive element which is disposed in the actuator and rotates in association with rotation of the optical element; a servo beam source which emits a servo beam to the refractive element; a photodetector which receives the servo beam refracted by the refractive element and outputs a signal according to a position where the servo beam is received; and a power adjustment circuit which adjusts emission power of the servo beam source. The power adjustment circuit adjusts the emission power so that a reception amount of the servo beam in the photodetector becomes constant based on an output signal from the photodetector.
    • 光束照射装置包括:光学元件,其通过沿预定方向旋转来改变激光束的行进方向; 沿该方向旋转光学元件的致动器; 折射元件,设置在致动器中并与光学元件的旋转相关联地旋转; 将伺服光束发射到折射元件的伺服光束源; 接收由折射元件折射的伺服光束并根据接收伺服光束的位置输出信号的光电检测器; 以及调整伺服光束源的发射功率的功率调节电路。 功率调整电路基于来自光电检测器的输出信号来调整发光功率,使得光电检测器中的伺服光束的接收量变得恒定。
    • 49. 发明申请
    • BEAM IRRADIATION DEVICE AND LASER RADAR SYSTEM
    • 光束辐射装置和激光雷达系统
    • US20100188648A1
    • 2010-07-29
    • US12695497
    • 2010-01-28
    • Yoshiaki MaenoAtsushi YamaguchiMitsutaka Yamaguchi
    • Yoshiaki MaenoAtsushi YamaguchiMitsutaka Yamaguchi
    • G01C3/08G01J1/20
    • G01J1/4257G01S7/4811G01S7/4817G01S17/026G01S17/10G01S17/42G01S17/936
    • A beam irradiation device includes: a laser light source for emitting laser light; an actuator which scans a targeted area with the laser light; a servo optical system which changes a propagating direction of servo light in response to driving of the actuator; a photodetector which receives the servo light to output a signal depending on a light receiving position of the servo light; an actuator controlling section which controls the actuator based on the signal to be outputted from the photodetector; and a laser controlling section which controls the laser light source based on the signal to be outputted from the photodetector. The laser controlling section controls the laser light source to emit the laser light in a pulse manner at a timing when the light receiving position of the servo light coincides with a predetermined targeted position.
    • 光束照射装置包括:用于发射激光的激光源; 用激光扫描目标区域的致动器; 伺服光学系统,其响应于致动器的驱动而改变伺服光的传播方向; 接收所述伺服光以根据所述伺服光的光接收位置输出信号的光电检测器; 致动器控制部,其基于从所述光检测器输出的信号来控制所述致动器; 以及激光控制部,其基于从光电检测器输出的信号来控制激光光源。 在伺服光的光接收位置与预定目标位置一致的时刻,激光控制部分控制激光光源以脉冲方式发射激光。