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41. 发明申请

US20110139271A1 AUTOMATIC PRESSURE REGULATOR FOR FLOW RATE REGULATOR 有权
标题翻译：用于流量调节器的自动调压器
公开(公告)号：US20110139271A1
公开(公告)日：2011-06-16
申请号：US12996370
申请日：2009-04-06
申请人： Kaoru Hirata , Katsuyuki Sugita , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Takeo Sugimoto
发明人： Kaoru Hirata , Katsuyuki Sugita , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Takeo Sugimoto
IPC分类号： F16K31/02
CPC分类号： G05D7/0635 , Y10T137/7761
摘要： The invention prevents overshoot from occurring in flow rate on the output side of a flow rate regulator when output flow rate is changed or the gas type distributed is changed. Thus, an automatic pressure regulator is provided to supply gas pressure to a flow rate regulator that includes a piezoelectric element driving type pressure regulating valve, a control pressure detector provided on the output side of the pressure regulating valve, and a controller to which a detected value P2 of the control pressure detector and a set value Pst for control pressure are input, wherein the controller supplies a control signal to a piezoelectric element driving unit of the pressure regulating valve using a proportional control system to perform valve opening regulation, in which the proportional control system of the controller is set to control to bring about a residual deviation in control pressure by disabling an integral action.
摘要翻译：本发明防止了当流量改变或气体分布改变时流量调节器的输出侧的流量发生过冲。因此，提供了一种自动压力调节器，用于向包括压电元件驱动型压力调节阀的流量调节器，设置在压力调节阀的输出侧的控制压力检测器和控制器提供气体压力，输入控制压力检测器的值P2和用于控制压力的设定值Pst，其中控制器使用比例控制系统向压力调节阀的压电元件驱动单元提供控制信号，以执行阀开启调节，其中控制器的比例控制系统设置为通过禁用积分作用来控制控制压力的残留偏差。

42. 发明申请

US20110108138A1 PRESSURE CONTROL VALVE DRIVING CIRCUIT FOR PRESSURE TYPE FLOW RATE CONTROL DEVICE WITH FLOW RATE SELF-DIAGNOSIS FUNCTION 有权
标题翻译：压力型流量控制装置的压力控制阀驱动电路流速自动诊断功能
公开(公告)号：US20110108138A1
公开(公告)日：2011-05-12
申请号：US12989614
申请日：2009-02-18
申请人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
发明人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
IPC分类号： F16K31/12
CPC分类号： G05D7/0635 , Y10T137/7762
摘要： A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.
摘要翻译：为压力式流量控制装置设置压力式流量控制装置，该压力式流量控制装置具有用于比较测定的初始压降特性数据和流量诊断中的压降特性数据的流量自我诊断功能，两个测量结果相同的条件是根据两个特性数据之间的差异来检测流量控制的故障，其中第一放电电路根据来自一个压电元件的降压命令信号缓慢放电施加到压电元件的压电元件驱动电压 CPU通过降压指令电路降低电压，以及第二放电电路，其根据来自CPU的高速降压命令信号快速放电施加到压电元件的压电元件的驱动电压，通过高速降压指令电路降压。

43. 发明申请

US20100229976A1 FLOW RATE RATIO VARIABLE TYPE FLUID SUPPLY APPARATUS 有权
标题翻译：流量比可变型流体供应装置
公开(公告)号：US20100229976A1
公开(公告)日：2010-09-16
申请号：US12303841
申请日：2007-06-13
申请人： Kaoru Hirata , Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Kaoru Hirata , Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16L41/00 , G01F1/42
CPC分类号： G05D7/0664 , Y10T137/85938 , Y10T137/87314 , Y10T137/87539
摘要： A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q1/Q0 so gas is supplied to a chamber, and a first orifice having opening area S1 is installed on the first flow diverting passage, and the second flow diverting passage is connected to a plurality of branch pipe passages connected in parallel, orifices having opening area installed on the branch passages, and open/close valves installed on all, or some of, the branch passages so gas is diverted to flow diverting passages with flow rate ratio Q1/Q0 equivalent to the ratio of the first orifice and the total opening area S2o of flow passable orifices of the second flow diverting passage by regulating total opening area of the flow passable orifices.
摘要翻译：流量比可变型流体供给装置包括：流量控制系统，其将具有规定流量Q1 / Q0的第一分流管路和第二分流管路的流量Q的气体供给到气室，并且具有开口面积S1的第一孔口安装在第一分流通道上，第二分流通道连接到并联连接的多个支管通道，开口区域安装在分支通道上，开口/ 安装在所有或一些分支通道上的关闭阀，使得气体转向流动转向通道，流量比Q1 / Q0等于第一孔口与第二流量的可流通孔口的总开口面积S2o的比值通过调节流通孔的总开口面积来分流通道。

44. 发明申请

US20100207044A1 CAM VALVE 有权
标题翻译：凸轮阀
公开(公告)号：US20100207044A1
公开(公告)日：2010-08-19
申请号：US12439572
申请日：2007-08-21
申请人： Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Yohei Sewada
发明人： Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Yohei Sewada
IPC分类号： F16K31/02 , F16K1/36
CPC分类号： F16K31/04 , F16K7/16 , F16K31/52491
摘要： In a step motor driven cam valve a stem freely ascends and descends within a body having an in-flow passage, an out-flow passage, a valve chamber, and a valve seat. The stem is descended by an actuator, composed of a step motor and a cam mechanism located at a position above the stem, that changes a rotational motion of the step motor to a linear motion and transmits the linear motion to the stem. A diaphragm within a valve chamber or a valve body at a lower end part of the stem rests on the valve seat. A lift support mechanism that supports the actuator to freely ascend and descend is arranged at a bonnet that covers the valve chamber. A height fine-adjustment mechanism, arranged at the lift supporting mechanism, finely adjusts the height of the actuator relative to the stem so as to perform zero-point adjustment of the valve.
摘要翻译：在步进马达驱动的凸轮阀中，杆在具有流入通道，流出通道，阀室和阀座的主体内自由上升和下降。杆由致动器下降，该致动器由位于杆上方的位置的步进电动机和凸轮机构组成，其将步进电动机的旋转运动改变为线性运动，并将线性运动传递到杆。阀室内的隔膜或阀杆的下端部的阀体位于阀座上。支撑致动器自由上升和下降的提升支撑机构布置在覆盖阀室的发动机罩上。布置在升降支撑机构处的高度精细调节机构，精细地调节致动器相对于杆的高度，以便执行阀的零点调节。

45. 发明申请

US20090292399A1 METHOD FOR DETECTING MALFUNCTION OF VALVE ON THE DOWNSTREAM SIDE OF THROTTLE MECHANISM OF PRESSURE TYPE FLOW CONTROL APPARATUS 有权
标题翻译：用于检测压力型流量控制装置的压力机构下游侧阀门故障的方法
公开(公告)号：US20090292399A1
公开(公告)日：2009-11-26
申请号：US12307554
申请日：2007-06-13
申请人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
发明人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , G01F1/36 , G01F15/005 , G01F15/022
摘要： With a pressure type flow control apparatus, a valve on the downstream side of a throttle mechanism is released and a flow rate setting value Qe inputted to the pressure type flow control apparatus is changed to detect the magnitude ΔV of change of a flow rate output signal Qo from the pressure type flow control apparatus while the flow rate setting value Qe is changed, so that normal functioning of the releasing operations of the valve on the downstream side of the throttle mechanism is confirmed when the magnitude ΔV of change of the flow rate output signal Qo is above the predetermined value. If the releasing operations are malfunctioning, the magnitude ΔV of changes is found to be below the predetermined value.
摘要翻译：利用压力式流量控制装置，释放节气门机构下游侧的阀，改变输入到压力式流量控制装置的流量设定值Qe，以检测流量输出信号的变化幅度DeltaV 当流量设定值Qe变化时，来自压力式流量控制装置的Qo，使得当流量输出的变化幅度DeltaV被确定时，节气门机构的下游侧的阀的释放操作的正常功能被确认信号Qo高于预定值。如果释放操作发生故障，则发现变化幅度DeltaV低于预定值。

46. 发明授权

US07278437B2 Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method 有权
标题翻译：关闭流体通道的方法，以及该方法中使用的无水锤阀装置和无水锤关闭装置
公开(公告)号：US07278437B2
公开(公告)日：2007-10-09
申请号：US11425028
申请日：2006-06-19
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Ryutaro Nishimura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Ryutaro Nishimura
IPC分类号： G05D16/02 , F16K47/02 , F16L55/055
CPC分类号： F16K47/02 , F16K47/023 , F16L55/043 , Y10T137/0324 , Y10T137/0379 , Y10T137/0396 , Y10T137/7761 , Y10T137/86389 , Y10T137/86461
摘要： A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps′ of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps′ capable of bringing the vibration detection signal Pr substantially to zero.
摘要翻译：流体通道在短时间内紧密关闭，而不会通过非常简单的装置和操作造成水锤。无水锤关闭装置包括设置在流体通道中的致动器操作阀，用于向致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到管道上的振动传感器执行器操作型阀的上游侧和从振动传感器接收振动检测信号Pr的调谐箱，并将控制信号Sc传送到电动气动转换装置，用于控制2- 步进致动器操作压力Pa，使得在控制信号Sc被调节的情况下，电动气动转换装置将能够使振动检测信号Pr基本上为零的步进操作压力Ps'输出2步致动器操作压力Pa。

47. 发明申请

US20070193628A1 Gas Supply Facility Of A Chamber And A Fethod For An Internal Pressure Control Of The Chamber For Which The Facility Is Employed 有权
标题翻译：商会气体供应设施及设施使用室内部压力控制的方法
公开(公告)号：US20070193628A1
公开(公告)日：2007-08-23
申请号：US10566495
申请日：2004-07-28
申请人： Hiroshi Kannan , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Nobukazu Ikeda
发明人： Hiroshi Kannan , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Nobukazu Ikeda
IPC分类号： G05D7/06
CPC分类号： G05D7/0652 , Y10T137/7761 , Y10T137/8741 , Y10T137/87507
摘要： The present invention makes it possible to prevent substantial reduction of flow rate control accuracy in a small flow quantity range, to achieve an accurate flow rate control over the entire range of a flow rate control, and also to allow control of a wide pressure range of a chamber with an accurate flow rate control. Namely, with a gas supply facility having a plurality of pressure type flow controllers connected in parallel and a controller to control operation of pressure type flow controllers to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one pressure type flow controller is made to be a controller to control a gas flow rate range up to 10% of the maximum flow rate to be supplied to a chamber, while the remaining pressure type flow controllers are made to be ones to control the rest of the gas flow rate range.
摘要翻译：本发明使得可以防止在小流量范围内的流量控制精度的显着降低，从而在流量控制的整个范围内实现精确的流量控制，并且还可以控制宽的压力范围具有精确流量控制的室。也就是说，具有并联连接的多个压力式流量控制器的气体供给装置和控制器，用于控制压力式流量控制器的操作，以在控制其流量的同时将由真空泵排出的所需气体供应到腔室，一个压力型流量控制器被制成控制器，以控制最高流量的10％的气体流量范围供给到室，而剩余的压力式流量控制器被制成控制其余的气体流量范围。

48. 发明授权

US07080658B2 Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method 有权
标题翻译：关闭流体通道的方法，以及该方法中使用的无水锤阀装置和无水锤关闭装置
公开(公告)号：US07080658B2
公开(公告)日：2006-07-25
申请号：US11152638
申请日：2005-06-15
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase , Kyousuke Dohi , Ryutaro Nishimura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase , Kyousuke Dohi , Ryutaro Nishimura
IPC分类号： G05D16/02 , F16K47/02 , F16L55/055
CPC分类号： F16K47/02 , F16K47/023 , F16L55/043 , Y10T137/0324 , Y10T137/0379 , Y10T137/0396 , Y10T137/7761 , Y10T137/86389 , Y10T137/86461
摘要： A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps′ of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps′ capable of bringing the vibration detection signal Pr substantially to zero.
摘要翻译：流体通道在短时间内紧密关闭，而不会通过非常简单的装置和操作造成水锤。无水锤关闭装置包括设置在流体通道中的致动器操作阀，用于向致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到管道上的振动传感器执行器操作型阀的上游侧和从振动传感器接收振动检测信号Pr的调谐箱，并将控制信号Sc传送到电动气动转换装置，以控制2- 步进致动器操作压力Pa，使得在控制信号Sc被调节的情况下，电动气动转换装置将能够使振动检测信号Pr基本上为零的步进操作压力Ps'输出2步致动器操作压力Pa。

49. 发明授权

US06302130B1 Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers 有权
标题翻译：用于检测压力型流量控制器孔堵塞的方法和装置
公开(公告)号：US06302130B1
公开(公告)日：2001-10-16
申请号：US09529985
申请日：2000-07-18
申请人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Kazuhiro Yoshikawa , Mutsunori Koyomogi , Tomio Uno , Eiji Ideta , Takashi Hirose
发明人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Kazuhiro Yoshikawa , Mutsunori Koyomogi , Tomio Uno , Eiji Ideta , Takashi Hirose
IPC分类号： F17D116
CPC分类号： G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/8326
摘要： A method and apparatus for detection of clogging of an orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow rate control unit and enhance its safety. The apparatus of detecting clogging of an orifice in a pressure-type flow rate controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween, and a flow rate setting circuit (32) wherein, with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated with the equation QC=KP1 (K=constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS. The apparatus comprises: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) not clogged, a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) in the actual conditions, a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t), and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.
摘要翻译：一种用于通过测量上游侧压力而不破坏使用孔口的流量控制单元中的管道系统来检测孔口堵塞的方法和装置，以延长流量控制单元的寿命并提高其安全性。检测压力型流量控制器中的孔口堵塞的装置具有控制阀（CV），用于测量其上游压力P1的孔口（2），压力检测器（14）和流量设定电路（32）其中，在上游压力P1保持大于下游压力P2的两倍或更多倍的情况下，下游流量QC用等式QC = KP1（K =常数）计算，并且其中控制阀（CV）为由计算流量QC和设定流量QS之间的差分信号QY控制。该装置包括：存储存储器M，存储以从高设定流量QSH切换到低设定流量QSL的流量测量的上游压力P1的标准压力衰减数据Y（t），其中孔口（2）没有堵塞，用于确定上游压力P1的压力衰减数据P（t）的压力检测器（14），其中流量从高设定流量QSH切换到具有孔口（2）的低设定流量QSL 实际情况是用于根据标准压力衰减数据Y（t）检测压力衰减数据P（t）的中央处理单元CPU以及当压力衰减数据P（t）偏离时引起堵塞报警的报警电路（46）从标准压力衰减数据Y（t）到特定程度或以上。

50. 发明授权

US09574917B2 Pressure type flow rate control device 有权
标题翻译：压力式流量控制装置
公开(公告)号：US09574917B2
公开(公告)日：2017-02-21
申请号：US13483328
申请日：2012-05-30
申请人： Atsushi Hidaka , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino
发明人： Atsushi Hidaka , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino
IPC分类号： G05D7/06 , G01F1/36 , G01F15/02
CPC分类号： G01F1/363 , G01F15/024 , G05D7/0635 , Y10T137/7737 , Y10T137/776 , Y10T137/7761
摘要： A pressure type flow rate control device provides flow rate control for gas at 100-500° C. with an error not more than 1.0% F.S. The pressure type flow rate control device includes a valve body with a fluid passage, a valve portion interposed in the passage, a valve drive unit driving the valve portion to open/close the passage, a restriction mechanism on the downstream side of the valve portion in the passage, a temperature detector detecting gas temperature between the valve portion and restriction mechanism, a pressure detector detecting gas pressure between the valve portion and restriction mechanism, and an arithmetic control device controlling flow rate of gas in the restriction mechanism based on values detected by the temperature detector and the pressure detector, wherein the temperature detector is inserted in an attachment hole of the valve body at a position just above an outlet side fluid passage.
摘要翻译：压力式流量控制装置为100-500℃的气体提供流量控制，误差不超过1.0％F.S. 压力式流量控制装置包括具有流体通道的阀体，插入通道中的阀部分，驱动阀部分以打开/关闭通道的阀驱动单元，在阀部分的下游侧的限制机构在通道中，检测器检测阀部分和限制机构之间的气体温度，检测阀部分和限制机构之间的气体压力的压力检测器以及根据检测到的值控制限制机构中的气体流量的算术控制装置通过温度检测器和压力检测器，其中温度检测器被插入在阀体的安装孔中，恰好在出口侧流体通道的正上方。

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