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    • 41. 发明申请
    • Bleachable materials for lithography
    • 用于光刻的可漂洗材料
    • US20080182178A1
    • 2008-07-31
    • US11698182
    • 2007-01-25
    • John A. HoffnagleDavid R. MedeirosRobert D. MillerLibor VycklickyGregory M. Wallraff
    • John A. HoffnagleDavid R. MedeirosRobert D. MillerLibor VycklickyGregory M. Wallraff
    • G03C1/00G03F1/00
    • G03F7/091G03F7/0382G03F7/0392Y10S430/106Y10S430/146
    • Compositions comprising photobleachable organic materials can be bleached by 193 nm light, and brought back to their original state by stimuli after exposure. (reversible photobleaching). We use these compositions in art-known contrast enhancement layers and as a part of a photoresist, especially in optical lithography processes for semiconductor fabrication. They may comprise polymers such as organosilicon polymers, polymers comprising polymers of aromatic hydroxyl compounds such as phenol and naphthol such as phenol formaldehyde polymers and naphthol formaldehyde polymers styrene polymers and phenolic acrylate polymers or cyclic materials comprising: where the radicals “R” and “Y” represent organo, or substituted organo moieties, Structures I, II, and III represent basic organic skeletons and can be unsubstituted or substituted in any available position with any one or combinations of multiple substituents.
    • 包含可光漂白有机材料的组合物可以用193nm的光漂白,并且在曝光后通过刺激使其恢复到其初始状态。 (可逆光漂白)。 我们将这些组合物用于本领域已知的对比增强层和作为光致抗蚀剂的一部分,特别是在用于半导体制造的光刻工艺中。 它们可以包括聚合物,例如有机硅聚合物,包含芳族羟基化合物如苯酚和萘酚的聚合物的聚合物,例如苯酚甲醛聚合物和萘酚甲醛聚合物苯乙烯聚合物和酚醛丙烯酸酯聚合物或环状材料,其包含:其中基团“R”和“Y “表示有机或取代的有机部分,结构I,II和III表示碱性有机骨架,并且可以在任何可用的位置被未取代或被任意一个或多个取代基的组合取代。
    • 49. 发明授权
    • Ultrasensitive biological and chemical detection using surface plasmon resonance
    • 使用表面等离子体共振的超敏感生物和化学检测
    • US08965737B2
    • 2015-02-24
    • US13284025
    • 2011-10-28
    • Robert E. FellerAndre KnoesenRobert D. Miller
    • Robert E. FellerAndre KnoesenRobert D. Miller
    • G01N21/00G01N21/05G01N21/552G01N21/27
    • G01N21/05G01N21/274G01N21/553
    • A device, including sample and reference channels through which first and second solutions flow, respectively, the first solution including an analyte, the channels having a metal film in contact with the first and second solutions, the metal film configured with a linker to selectively bind the analyte; a light source whose output is modulated by an optical system, so that light is directed from the optical system alternately towards the sample and reference channels, surface plasmons within the metal film being created; a first photodetector that monitors the strength of the output from the light source; a second photodetector that collects optical signals reflected from the metal film; electronics that monitors output from the first and the second photodetectors, thereby detecting a noise-compensated difference in signals from the two channels; and a computer processor that determines, from analysis of the noise-compensated difference, presence of the analyte in the first solution.
    • 一种装置,包括第一和第二溶液分别通过其流动的样品和参考通道,第一溶液包括分析物,通道具有与第一和第二溶液接触的金属膜,金属膜配置有接头以选择性地结合 分析物; 其光输出被光学系统调制的光源,使得光从光学系统交替地朝向样品和参考通道引导,产生金属膜内的表面等离子体; 第一光电检测器,其监测来自光源的输出的强度; 第二光电检测器,其收集从金属膜反射的光信号; 监视来自第一和第二光电检测器的输出的电子装置,从而检测来自两个通道的信号的噪声补偿差分; 以及计算机处理器,其从噪声补偿差分的分析确定第一解决方案中分析物的存在。